Patents by Inventor Mike Binnard
Mike Binnard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20070268475Abstract: A stage assembly (220) that moves a work piece (200) a movement step (257) includes a first stage (238), a first mover assembly (242), a second stage (240) that retains the work piece (200), and a second mover assembly (244). The first mover assembly (242) moves the first stage (238) with a first velocity profile (770) during the movement step (257) and the second mover assembly (244) moves the second stage (240) with a second velocity profile (772) during the movement step (257) that is different than the first velocity profile (770). For example, the first mover assembly (242) moves the first stage (238) during the movement step (257) with a higher peak velocity than the second mover assembly (244) moves the second stage (240) during the movement step (257). This can reduce the amount of relative stroke required by the second mover assembly (244).Type: ApplicationFiled: May 10, 2007Publication date: November 22, 2007Applicant: Nikon CorporationInventor: Mike Binnard
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Patent number: 7221433Abstract: A stage assembly (220) for moving and positioning a device (200) includes a stage base (202), a stage (206), a stage mover assembly (204), and a reaction assembly (226). The stage mover assembly (204) moves the stage (206) relative to the stage base (202). The reaction assembly (226) is coupled to the stage mover assembly (204). The reaction assembly (226) reduces the reaction forces created by the stage mover assembly (204) that are transferred to the stage base (202). In one embodiment, the reaction assembly (226) includes a pair of masses (250A), (250B) and a connector assembly (236) that connects the masses (250A), (250B) together, allows the masses to move independently along a first axis, and causes the masses (250A), (250B) to move concurrently along a second axis.Type: GrantFiled: January 28, 2004Date of Patent: May 22, 2007Assignee: Nikon CorporationInventor: Mike Binnard
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Patent number: 6958808Abstract: A stage assembly for moving and positioning a device is provided herein. The stage assembly includes a stage base, a stage, a stage mover assembly, a reaction mass assembly, a reaction mover assembly, and a control system. The stage mover assembly moves the stage relative to the stage base. The reaction mass assembly reduces the reaction forces created by the stage mover assembly that are transferred to the stage base. The reaction mover assembly adjusts the position of the reaction mass assembly relative to the stage base. Uniquely, the control system controls and directs current to the reaction mover assembly in a way that minimizes the influence of disturbances created by the reaction mover assembly on the stage assembly. More specifically, the timing and/or the amount of current from the control system directed to the reaction mover assembly is varied to minimize the influence of the disturbances created by the reaction mover assembly on the stage assembly.Type: GrantFiled: June 11, 2003Date of Patent: October 25, 2005Assignee: Nikon CorporationInventors: Keiichi Tanaka, Mike Binnard, Andrew J. Hazelton
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Publication number: 20050162635Abstract: A stage assembly (220) for moving and positioning a device (200) includes a stage base (202), a stage (206), a stage mover assembly (204), and a reaction assembly (226). The stage mover assembly (204) moves the stage (206) relative to the stage base (202). The reaction assembly (226) is coupled to the stage mover assembly (204). The reaction assembly (226) reduces the reaction forces created by the stage mover assembly (204) that are transferred to the stage base (202). In one embodiment, the reaction assembly (226) includes a pair of masses (250A), (250B) and a connector assembly (236) that connects the masses (250A), (250B) together, allows the masses to move independently along a first axis, and causes the masses (250A), (250B) to move concurrently along a second axis.Type: ApplicationFiled: January 28, 2004Publication date: July 28, 2005Inventor: Mike Binnard
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Patent number: 6888620Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).Type: GrantFiled: November 29, 2001Date of Patent: May 3, 2005Assignee: Nikon CorporationInventors: Martin E. Lee, Mike Binnard, Douglas C. Watson
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Patent number: 6885430Abstract: A stage assembly includes a stage base, a stage, a stage mover assembly, a reaction mass assembly, a reaction mover assembly, and a control system. The stage mover assembly moves the stage relative to the stage base. The reaction mass assembly reduces the reaction forces created by the stage mover assembly that are transferred to the stage base. The reaction mover assembly adjusts the position of the reaction mass assembly relative to the stage base. The control system controls and directs current to the reaction mover assembly in a way that minimizes the influence of disturbances created by the reaction mover assembly on the stage assembly. The timing and/or the amount of current from the control system directed to the reaction mover assembly is varied to minimize the influence of the disturbances created by the reaction mover assembly on the stage assembly.Type: GrantFiled: June 11, 2003Date of Patent: April 26, 2005Assignee: Nikon CorporationInventors: Keiichi Tanaka, Mike Binnard, Andrew J. Hazelton
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Patent number: 6882126Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).Type: GrantFiled: November 29, 2001Date of Patent: April 19, 2005Assignee: Nikon CorporationInventors: Douglas C. Watson, Mike Binnard, Andrew J. Hazelton, Martin E. Lee
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Patent number: 6842248Abstract: A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a device table (48), a stage mover assembly (16), a measurement system (20), and a control system (22). The stage mover assembly (16) moves the device table (48) along an X axis, along a Y axis, and about a Z axis relative to the stage base (12). The measurement system (20) includes a first X mirror (25A) for monitoring the position of the device table (48) in an alignment position (31A) and a second X mirror (25B) for monitoring the position of the device table (48) in an operational position (31B). In one embodiment, the stage assembly (10) includes a first fiducial mark (76) and a second fiducial mark (78) that are secured to the device table (48) to determine the relative position of the X mirrors (25A)(25B).Type: GrantFiled: November 28, 2000Date of Patent: January 11, 2005Assignee: Nikon CorporationInventors: Mike Binnard, Masahiko Okumura
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Patent number: 6757053Abstract: A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction mass assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction mass assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction mass assembly (18) reduces the reaction forces created by the stage mover assembly (16) in three degrees of freedom that are transferred to the stage base (12). With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).Type: GrantFiled: November 16, 2000Date of Patent: June 29, 2004Assignee: Nikon CorporationInventors: Andrew J. Hazelton, Mike Binnard
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Patent number: 6731372Abstract: A fluid mount (10) for an exposure apparatus (32) includes a first subsystem (12) and a second subsystem (14). The first subsystem (12) includes a first cylinder (18) and a first piston (20). The first piston (20) moves within the first cylinder (18) along a first axis (26). The second subsystem (14) includes a second cylinder (22) and a second piston (24). The second piston (24) moves within the second cylinder (22) along a second axis (28). Importantly, (i) the second subsystem (14) is stacked on top of the first subsystem (12), (ii) the second axis (28) is substantially coaxial with the first axis (26), and (iii) the first piston (20) is connected to the second piston (24) with a piston connector (16). The resulting fluid mount (10) has a relatively high load carrying capacity and a relatively small footprint.Type: GrantFiled: March 27, 2001Date of Patent: May 4, 2004Assignee: Nikon CorporationInventors: Mike Binnard, Douglas C. Watson
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Publication number: 20040051854Abstract: A stage assembly for moving and positioning a device is provided herein. The stage assembly includes a stage base, a stage, a stage mover assembly, a reaction mass assembly, a reaction mover assembly, and a control system. The stage mover assembly moves the stage relative to the stage base. The reaction mass assembly reduces the reaction forces created by the stage mover assembly that are transferred to the stage base. The reaction mover assembly adjusts the position of the reaction mass assembly relative to the stage base. Uniquely, the control system controls and directs current to the reaction mover assembly in a way that minimizes the influence of disturbances created by the reaction mover assembly on the stage assembly. More specifically, the timing and/or the amount of current from the control system directed to the reaction mover assembly is varied to minimize the influence of the disturbances created by the reaction mover assembly on the stage assembly.Type: ApplicationFiled: June 11, 2003Publication date: March 18, 2004Applicant: Nikon CorporationInventors: Keiichi Tanaka, Mike Binnard, Andrew J. Hazelton
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Publication number: 20040012768Abstract: A stage assembly for moving and positioning a device is provided herein. The stage assembly includes a stage base, a stage, a stage mover assembly, a reaction mass assembly, a reaction mover assembly, and a control system. The stage mover assembly moves the stage relative to the stage base. The reaction mass assembly reduces the reaction forces created by the stage mover assembly that are transferred to the stage base. The reaction mover assembly adjusts the position of the reaction mass assembly relative to the stage base. Uniquely, the control system controls and directs current to the reaction mover assembly in a way that minimizes the influence of disturbances created by the reaction mover assembly on the stage assembly. More specifically, the timing and/or the amount of current from the control system directed to the reaction mover assembly is varied to minimize the influence of the disturbances created by the reaction mover assembly on the stage assembly.Type: ApplicationFiled: June 11, 2003Publication date: January 22, 2004Applicant: Nikon CorporationInventors: Keiichi Tanaka, Mike Binnard, Andrew J. Hazelton
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Publication number: 20030218732Abstract: A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) counteracts and reduces the reaction forces created by the stage mover assembly (16) in two degrees of freedom that are transferred to a reaction base (102). With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).Type: ApplicationFiled: May 20, 2003Publication date: November 27, 2003Inventors: Douglas C. Watson, Andrew J. Hazelton, Mike Binnard
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Publication number: 20030202167Abstract: A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) reduces the reaction forces created by the stage mover assembly (16) in three degrees of freedom that are transferred to the stage base (12). As provided herein, the reaction assembly (18) includes a first reaction mass (88) and a second reaction mass (90) that move independently along the X axis, along the Y axis and about a Z axis. With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).Type: ApplicationFiled: June 3, 2003Publication date: October 30, 2003Inventor: Mike Binnard
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Patent number: 6603531Abstract: A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) reduces the reaction forces created by the stage mover assembly (16) in three degrees of freedom that are transferred to the stage base (12). As provided herein, the reaction assembly (18) includes a first reaction mass (88) and a second reaction mass (90) that move independently along the X axis, along the Y axis and about a Z axis. With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).Type: GrantFiled: November 16, 2000Date of Patent: August 5, 2003Assignee: Nikon CorporationInventor: Mike Binnard
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Patent number: 6593997Abstract: A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) counteracts and reduces the reaction forces created by the stage mover assembly (16) in two degrees of freedom that are transferred to a reaction base (102). With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).Type: GrantFiled: November 16, 2000Date of Patent: July 15, 2003Assignee: Nikon CorporationInventors: Doug Watson, Andrew J. Hazelton, Mike Binnard
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Publication number: 20030098963Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).Type: ApplicationFiled: November 29, 2001Publication date: May 29, 2003Inventors: Alton H. Phillips, Mike Binnard
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Publication number: 20030098964Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).Type: ApplicationFiled: November 29, 2001Publication date: May 29, 2003Inventors: Martin E. Lee, Mike Binnard, Douglas C. Watson
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Publication number: 20030098664Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).Type: ApplicationFiled: November 29, 2001Publication date: May 29, 2003Inventors: Douglas C. Watson, Mike Binnard, Andrew J. Hazelton, Martin E. Lee
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Publication number: 20030098965Abstract: A stage assembly (224) for moving and positioning a device (300) includes a device table (308), a device holder (312) that retains the device (300), and a holder connector assembly (338). The holder connector assembly (338) includes a first assembly (320) that supports the device holder (312) relative to the device table (308) along a first axis, and a second assembly (322) that supports the device holder (312) relative to the device table (308) along a second axis, the second axis being orthogonal to the first axis.Type: ApplicationFiled: November 4, 2002Publication date: May 29, 2003Inventors: Mike Binnard, Mats Engwall