Patents by Inventor Mike Groh

Mike Groh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Self-aligned coating on released MEMS
    Patent number: 7470557
    Abstract: A method of making a semiconductor device including the steps of fabricating at least one component on a substrate and coating the component with a first self-aligned polymer film.
    Type: Grant
    Filed: April 19, 2004
    Date of Patent: December 30, 2008
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Chien-Hua Chen, Bradley Charles John, Mike Groh
  • MEMS device polymer film deposition process
    Patent number: 7172978
    Abstract: A method of depositing polymer thin films on a MEMS device having a wafer stack includes depositing one or more protection films on a polymer thin film layer on the wafer stack, fabricating the MEMS device, and removing the one or more protection films.
    Type: Grant
    Filed: July 21, 2004
    Date of Patent: February 6, 2007
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Hang Liao, Timothy Mellander, Mike Groh
  • MEMS device polymer film deposition process
    Publication number: 20060019420
    Abstract: A method of depositing polymer thin films on a MEMS device having a wafer stack includes depositing one or more protection films on a polymer thin film layer on the wafer stack, fabricating the MEMS device, and removing the one or more protection films.
    Type: Application
    Filed: July 21, 2004
    Publication date: January 26, 2006
    Inventors: Hang Liao, Timothy Mellander, Mike Groh