Patents by Inventor Mike Ingamells

Mike Ingamells has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monolithic ceramic component of gas delivery system and method of making and use thereof
    Patent number: 9580360
    Abstract: A method of making a monolithic ceramic component of a gas delivery system of a semiconductor substrate processing apparatus wherein the gas delivery system is configured to supply process gas to a gas distribution member disposed downstream thereof. The gas distribution member is configured to supply the process gas to a processing region of a vacuum chamber of the apparatus, wherein the processing region is disposed above an upper surface of a semiconductor substrate to be processed. The method comprises preparing a green compact of ceramic material. The green compact of ceramic material is formed into a form of a desired monolithic ceramic component of the gas delivery system. The formed green compact of ceramic material is fired to form the monolithic ceramic component of the gas delivery system.
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: February 28, 2017
    Assignee: LAM RESEARCH CORPORATION
    Inventors: John Daugherty, Iqbal Shareef, Mike Ingamells
  • MONOLITHIC CERAMIC COMPONENT OF GAS DELIVERY SYSTEM AND METHOD OF MAKING AND USE THEREOF
    Publication number: 20150287572
    Abstract: A method of making a monolithic ceramic component of a gas delivery system of a semiconductor substrate processing apparatus wherein the gas delivery system is configured to supply process gas to a gas distribution member disposed downstream thereof. The gas distribution member is configured to supply the process gas to a processing region of a vacuum chamber of the apparatus, wherein the processing region is disposed above an upper surface of a semiconductor substrate to be processed. The method comprises preparing a green compact of ceramic material. The green compact of ceramic material is formed into a form of a desired monolithic ceramic component of the gas delivery system. The formed green compact of ceramic material is fired to form the monolithic ceramic component of the gas delivery system.
    Type: Application
    Filed: April 1, 2015
    Publication date: October 8, 2015
    Applicant: Lam Research Corporation
    Inventors: John Daugherty, Iqbal Shareef, Mike Ingamells