Patents by Inventor Mike Jing

Mike Jing has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate holder having integrated temperature measurement electrical devices
    Patent number: 10978323
    Abstract: A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.
    Type: Grant
    Filed: January 14, 2019
    Date of Patent: April 13, 2021
    Assignee: Lam Research Corporation
    Inventors: Eric Pape, Darrell Ehrlich, Mike Jing
  • Substrate Holder Having Integrated Temperature Measurement Electrical Devices
    Publication number: 20190148190
    Abstract: A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.
    Type: Application
    Filed: January 14, 2019
    Publication date: May 16, 2019
    Inventors: Eric Pape, Darrell Ehrlich, Mike Jing
  • Substrate holder having integrated temperature measurement electrical devices
    Patent number: 10186437
    Abstract: A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.
    Type: Grant
    Filed: October 5, 2015
    Date of Patent: January 22, 2019
    Assignee: Lam Research Corporation
    Inventors: Eric Pape, Darrell Ehrlich, Mike Jing
  • Substrate Holder Having Integrated Temperature Measurement Electrical Devices
    Publication number: 20170098564
    Abstract: A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.
    Type: Application
    Filed: October 5, 2015
    Publication date: April 6, 2017
    Inventors: Eric Pape, Darrell Ehrlich, Mike Jing