Patents by Inventor Mike Kubani

Mike Kubani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Purged heater-susceptor for an ALD/CVD reactor
    Patent number: 7015426
    Abstract: A heater assembly for an ALD or CVD reactor provides protection for an electrical conductor associated with a heating element by using a purge gas to isolate the conductor from the corrosive environment of the reactor chamber. The purge gas is introduced into a sleeve surrounding the conductor and from there is allowed to leak into the reactor chamber to be pumped out with the process gasses. This arrangement avoids the need for airtight seals at the junction of the sleeve and the heating element easing manufacturing requirements and potentially reducing component costs.
    Type: Grant
    Filed: February 11, 2004
    Date of Patent: March 21, 2006
    Assignee: Genus, Inc.
    Inventors: Ken Doering, Mike Kubani, Gi Kim, David Foote
  • Purged heater-susceptor for an ALD/CVD reactor
    Publication number: 20040211764
    Abstract: A heater assembly for an ALD or CVD reactor provides protection for an electrical conductor associated with a heating element by using a purge gas to isolate the conductor from the corrosive environment of the reactor chamber. The purge gas is introduced into a sleeve surrounding the conductor and from there is allowed to leak into the reactor chamber to be pumped out with the process gasses. This arrangement avoids the need for airtight seals at the junction of the sleeve and the heating element easing manufacturing requirements and potentially reducing component costs.
    Type: Application
    Filed: February 11, 2004
    Publication date: October 28, 2004
    Inventors: Ken Doering, Mike Kubani, Gi Kim, David Foote