Patents by Inventor Mike Leone

Mike Leone has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma coil
    Patent number: 6597117
    Abstract: Various embodiments of a plasma coil, methods of making the same, a processing apparatus utilizing plasma processes and methods of manufacture are disclosed. In one aspect, a plasma coil is provided that includes a first conductor coil that has a plurality of turns. An innermost of the plurality of turns terminates to define a central void portion and an outermost of the plurality of turns defines a peripheral portion. A first conductor plate is positioned in the central void portion of and coupled in series to the first conductor coil. The conductor plate provides a more uniform and intense electrical field in order to retard residue formation on plasma chamber windows.
    Type: Grant
    Filed: November 30, 2001
    Date of Patent: July 22, 2003
    Assignee: Samsung Austin Semiconductor, L.P.
    Inventors: Mike Leone, Jim Gernert, Wei Sun
  • Plasma coil
    Publication number: 20030102811
    Abstract: Various embodiments of a plasma coil, methods of making the same, a processing apparatus utilizing plasma processes and methods of manufacture are disclosed. In one aspect, a plasma coil is provided that includes a first conductor coil that has a plurality of turns. An innermost of the plurality of turns terminates to define a central void portion and an outermost of the plurality of turns defines a peripheral portion. A first conductor plate is positioned in the central void portion of and coupled in series to the first conductor coil. The conductor plate provides a more uniform and intense electrical field in order to retard residue formation on plasma chamber windows.
    Type: Application
    Filed: November 30, 2001
    Publication date: June 5, 2003
    Applicant: Samsung Austin Semiconductor, L.P.
    Inventors: Mike Leone, Jim Gernert, Wei Sun