Abstract: A refuse vehicle includes a chassis, an energy storage device supported by the chassis and configured to provide electrical power to a prime mover, wherein activation of the prime mover selectively drives the refuse vehicle, a body for storing refuse therein supported by the chassis, a first hydraulic pump configured to convert electrical power into hydraulic power, a second first hydraulic pump configured to convert electrical power into hydraulic power, and a motor coupled to at least one of the body or the chassis and configured to drive the first hydraulic pump and drive the second hydraulic pump.

Abstract: The present disclosure includes a system, method, and article of manufacture for performing dispute resolution. The method may include retrieving an identifier that associates a funds request with a rewards currency request, crediting, based on the identifier, a transaction account based upon the funds request, and crediting, based on the identifier, a rewards account based upon the rewards currency request. The method may further comprise crediting the transaction account less a value associated with the rewards currency request and/or generating a first statement that shows a funds balance and a second statement that shows a rewards currency balance. A funds balance may be credited by an amount associated with the funds request, and a rewards currency balance may be credited by an amount associated with the rewards currency request.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate.

Abstract: A system is disclosed which facilitates authentication processes with web-enabled wireless devices, including those that do not support the use of cookie files. To facilitate such authentication, a web server analyzes an HTTP request file from a communication device for the presence of security token data. Where none is found, a client is directed to a login page for input of authentication data, such as a user name and password information. Upon proper authentication, the client's communication device is issued a security token using standard HTML-INPUT tags. Thereafter, the web server determines if each additional HTTP request file received from the client includes a security token before responding to the request.

Abstract: A system and method for data communication in a computational network is disclosed. The computational network includes a server computational device and a client computational device. The server computational device stores one or more container data objects, and a container data object includes a reference to multiple external data objects. The client computational device retrieves a container data object from the server computational device. If the container data object includes a reference to multiple external data objects, the client computational device sends a request to the server computational device. The server computational device provides a response including the multiple external data objects.

Abstract: A system is disclosed which facilitates authentication processes with web-enabled wireless devices, including those that do not support the use of cookie files. To facilitate such authentication, a web server analyzes an HTTP request file from a communication device for the presence of security token data. Where none is found, a client is directed to a login page for input of authentication data, such as a user name and password information. Upon proper authentication, the client's communication device is issued a security token using standard HTML-INPUT tags. Thereafter, the web server determines if each additional HTTP request file received from the client includes a security token before responding to the request.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, the enclosure containing at least a portion of a vertical actuator assembly, a support plate coupled to the enclosure, and a first transfer robot disposed on the support plate.

Abstract: A system is disclosed which facilitates authentication processes with web-enabled wireless devices, including those that do not support the use of cookie files. To facilitate such authentication, a web server analyzes an HTTP request file from a communication device for the presence of security token data. Where none is found, a client is directed to a login page for input of authentication data, such as a user name and password information. Upon proper authentication, the client's communication device is issued a security token using standard HTML-INPUT tags. Thereafter, the web server determines if each additional HTTP request file received from the client includes a security token before responding to the request.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, an actuator within the enclosure, and a fan assembly disposed in the enclosure that is adapted to generate a pressure within the enclosure that is less than a pressure outside of the enclosure.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, the second motion assembly being coupled to the first motion assembly and being movable relative to the first motion assembly in a second direction that is generally orthogonal to the first direction. The robot assembly further comprises an enclosure disposed in one of the first motion assembly or the second motion assembly, an actuator within the enclosure, and a fan assembly disposed in the enclosure that is adapted to generate a pressure within the enclosure that is less than a pressure outside of the enclosure.

Abstract: A method and apparatus for processing substrates using a cluster tool that has an increased system throughput, increased system reliability, improved device yield performance, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robot assemblies that are configured in a parallel processing configuration and adapted to move in a vertical and a horizontal direction to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms.

Abstract: A system and method for data communication in a computational network is disclosed. The computational network includes a server computational device and a client computational device. The server computational device stores one or more container data objects, and a container data object includes a reference to multiple external data objects. The client computational device retrieves a container data object from the server computational device. If the container data object includes a reference to multiple external data objects, the client computational device sends a request to the server computational device. The server computational device provides a response including the multiple external data objects.

Abstract: The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system that has the capability of receiving and performing single substrate processing steps performed in parallel, while using the many favorable aspects of batch processing. Embodiments of the invention described herein are adapted to maximize system throughput, reduce system cost, reduce cost per substrate during processing, increase system reliability, improve the device yield on the processed substrates, and reduce system footprint. In one embodiment, the cluster tool is adapted to perform a wet/clean process sequence in which various substrate cleaning processes are performed on a substrate in the cluster tool.

Abstract: Embodiments of the invention provide a method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. Generally, the various embodiments described herein are advantageous since each row or group of substrate processing chambers are serviced by two or more robots to allow for increased throughput and increased system reliability. Also, the various embodiments described herein are generally configured to minimize and control the particles generated by the substrate transferring mechanisms, to prevent device yield and substrate scrap problems that can affect the cost of ownership of the cluster tool.

Abstract: A vacuum chamber having a gate valve including a chamber housing defining an internal vacuum region and first and second openings through the chamber housing and a gate valve secured to the chamber housing. The gate valve includes a sealing door located in the processing region and configured to seal the first opening in the chamber housing; a vertical actuator located outside the chamber housing; a one-sided horizontal actuator located within the processing region and connected to the sealing door; and a valve shaft extending through the second opening in the chamber housing and connecting the vertical actuator to the one-sided horizontal actuator.

Abstract: The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system that has the capability of receiving and performing single substrate processing steps performed in parallel, while using the many favorable aspects of batch processing. Embodiments of the invention described herein are adapted to maximize system throughput, reduce system cost, reduce cost per substrate during processing, increase system reliability, improve the device yield on the processed substrates, and reduce system footprint. In one embodiment, the cluster tool is adapted to perform a wet/clean process sequence in which various substrate cleaning processes are performed on a substrate in the cluster tool.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system (e.g., a cluster tool) that has the capability of receiving and performing substrate processing steps in any substrate orientation. The various embodiments of the cluster tool may utilize one or more robots that are adapted to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates.

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are configured in a parallel processing configuration to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates. In one aspect, the parallel processing configuration contains two or more robot assemblies that are adapted to move in a vertical and horizontal directions, to access the various processing chambers retained in generally adjacently positioned processing racks.

Abstract: A system is disclosed which facilitates authentication processes with web-enabled wireless devices, including those that do not support the use of cookie files. To facilitate such authentication, a web server analyzes an HTTP request file from a communication device for the presence of security token data. Where none is found, a client is directed to a login page for input of authentication data, such as a user name and password information. Upon proper authentication, the client's communication device is issued a security token using standard HTML-INPUT tags. Thereafter, the web server determines if each additional HTTP request file received from the client includes a security token before responding to the request.