Patents by Inventor Mike Rogowski

Mike Rogowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • POST SPUTTER WASH PROCESS MODULE
    Publication number: 20110030733
    Abstract: In one embodiment, a method for cleaning a substrate in a cleaning module is disclosed. The method includes an operation that receives the substrate into a first level of the cleaning module. In another operation, the substrate is spun while contemporaneously applying a cleaning fluid to top and bottom surfaces of the substrate. In yet another operation, the substrate is spun at a second level of the cleaning module. The method also includes an operation to dry the substrate in an enclosed cavity at a third level of the cleaning module.
    Type: Application
    Filed: June 13, 2008
    Publication date: February 10, 2011
    Inventors: Dave Frost, Mike Rogowski, Yassin Mehmandoust, Tom Poplawski, Stan Young