Abstract: A diaphragm valve including a valve body, a diaphragm assembly and an actuator assembly having a housing body that isolates the actuator from the ambient atmosphere. The diaphragm assembly is welded to the valve body to reduce and/or eliminate fluid leakage around the diaphragm assembly. Additionally or alternatively, the housing body for the actuator assembly may be welded to the valve body to reduce fluid leakage. The welding may be performed using ultrasonic welding techniques.

Abstract: A diaphragm valve including a valve body, a diaphragm assembly and an actuator assembly having a housing body that isolates the actuator from the ambient atmosphere. The diaphragm assembly is welded to the valve body to reduce and/or eliminate fluid leakage around the diaphragm assembly. Additionally or alternatively, the housing body for the actuator assembly may be welded to the valve body to reduce fluid leakage. The welding may be performed using ultrasonic welding techniques.

Abstract: A three-way valve is disclosed having flow ports that are co-planar and a unitary actuation stem made of a material such as a fluoropolymer that is resistant to caustic fluids commonly used in the semiconductor industry. The three way valve does not require a diaphragm, and thus occupies a smaller footprint relative to standard diaphragm-type valves. The stem is designed to accommodate valving portions or “poppets” that can be assembled by hand, without need for special tooling. The valve body may also be made of a fluoropolymer, and may be either machined or molded to form.