Patents by Inventor Mike Wojtowicz

Mike Wojtowicz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for detecting and adjusting substrate height
    Patent number: 7800766
    Abstract: A method and apparatus 10 for detecting the height of non-flat and transparent substrates using one or more reflectors 30 patterned on the surface of the substrate 40 and adjusting the position of the substrate in its holder based on measurement of the height of the reflectors in comparison to a calibration marker 60 on the holder and using appropriate spacers 50 with appropriate thickness to adjust the placement of the substrate at various locations to place the greatest portion of the substrate in an optimal focal range of the lithography system.
    Type: Grant
    Filed: September 21, 2007
    Date of Patent: September 21, 2010
    Assignee: Northrop Grumman Space & Mission Systems Corp.
    Inventors: Carol Osaka Namba, Po-Hsin Liu, Ioulia Smorchkova, Mike Wojtowicz, Rob Coffie
  • Method and Apparatus For Detecting and Adjusting Substrate Height
    Publication number: 20090078888
    Abstract: A method and apparatus 10 for detecting the height of non-flat and transparent substrates using one or more reflectors 30 patterned on the surface of the substrate 40 and adjusting the position of the substrate in its holder based on measurement of the height of the reflectors in comparison to a calibration marker 60 on the holder and using appropriate spacers 50 with appropriate thickness to adjust the placement of the substrate at various locations to place the greatest portion of the substrate in an optimal focal range of the lithography system.
    Type: Application
    Filed: September 21, 2007
    Publication date: March 26, 2009
    Applicant: Northrop Grumman Space & Mission Systems Corp.
    Inventors: Carol Osaka Namba, Po-Hsin Liu, Ioulia Smorchkova, Mike Wojtowicz, Rob Coffie