Patents by Inventor Mike Woolston

Mike Woolston has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Treatment of effluent from a substrate processing chamber
    Patent number: 7160521
    Abstract: A substrate processing apparatus has a process chamber and an effluent treatment reactor. The process chamber has a substrate support, a process gas supply, a gas energizer, and an exhaust conduit. The effluent treatment reactor has an effluent inlet to receive effluent from the exhaust conduit of the process chamber, a plasma cell having one or more electrodes electrically connected to a voltage source adapted to electrically bias the electrodes to couple energy to effluent received in the plasma cell, a scrubbing cell coaxially exterior to the plasma cell, the scrubbing cell having a scrubbing fluid inlet to introduce scrubbing fluid into effluent in the scrubbing cell and a scrubbing fluid outlet, and an effluent outlet to release the treated effluent.
    Type: Grant
    Filed: January 13, 2003
    Date of Patent: January 9, 2007
    Assignee: Applied Materials, Inc.
    Inventors: Peter Porshnev, Sebastien Raoux, Mike Woolston, Christopher L. Aardahl, Rick J. Orth, Kenneth G. Rappe
  • Treatment of effluent from a substrate processing chamber
    Publication number: 20040001787
    Abstract: A substrate processing apparatus has a process chamber and an effluent treatment reactor. The process chamber has a substrate support, a process gas supply, a gas energizer, and an exhaust conduit. The effluent treatment reactor has an effluent inlet to receive effluent from the exhaust conduit of the process chamber, a plasma cell having one or more electrodes electrically connected to a voltage source adapted to electrically bias the electrodes to couple energy to effluent received in the plasma cell, a scrubbing cell coaxially exterior to the plasma cell, the scrubbing cell having a scrubbing fluid inlet to introduce scrubbing fluid into effluent in the scrubbing cell and a scrubbing fluid outlet, and an effluent outlet to release the treated effluent.
    Type: Application
    Filed: January 13, 2003
    Publication date: January 1, 2004
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Peter Porshnev, Sebastien Raoux, Mike Woolston, Christopher L. Aardahl, Rick J. Orth, Kenneth G. Rappe