Patents by Inventor Mikhail A. Treger

Mikhail A. Treger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240332015
    Abstract: A method of forming an apparatus comprises forming a crystalline semiconductor material comprising one or more of a monocrystalline material and a nanocrystalline material adjacent to active areas of memory cells, forming an amorphous material within portions of the crystalline semiconductor material, forming a metal material comprising one or more of chlorine atoms and nitrogen atoms over the amorphous material, converting a portion of the amorphous material and the metal material to form a metal silicide material adjacent to the crystalline semiconductor material, forming cell contacts over the metal silicide material, and forming a storage node adjacent to the cell contacts. Additional methods and apparatus are also disclosed.
    Type: Application
    Filed: January 30, 2024
    Publication date: October 3, 2024
    Inventors: Protyush Sahu, Mikhail A. Treger, Yi Fang Lee, Jay S. Brown, Shuai Jia, Jaidah Mohan, Silvia Borsari, Richard Beeler, Jeffery B. Hull, Prashant Raghu
  • Patent number: 11888019
    Abstract: Some embodiments include a ferroelectric device having a ferroelectric insulative material which includes zinc. Some embodiments include a capacitor having a ferroelectric insulative material between a first electrode and a second electrode. The ferroelectric insulative material includes one or more metal-oxide-containing layers and one or more zinc-containing layers. Some embodiments include a memory array having a first set of first conductive structures and a second set of second conductive structures. The first conductive structures are coupled with driver circuitry, and the second conductive structures are coupled with sensing circuitry. The memory array includes an array of access devices. Each of the access devices is uniquely addressed by one of the first conductive structures in combination with one of the second conductive structures. Ferroelectric capacitors are coupled with the access devices. Each of the ferroelectric capacitors includes ferroelectric insulative material having zinc.
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: January 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Mikhail A. Treger, Albert Liao
  • Publication number: 20220199757
    Abstract: Some embodiments include a ferroelectric device having a ferroelectric insulative material which includes zinc. Some embodiments include a capacitor having a ferroelectric insulative material between a first electrode and a second electrode. The ferroelectric insulative material includes one or more metal-oxide-containing layers and one or more zinc-containing layers. Some embodiments include a memory array having a first set of first conductive structures and a second set of second conductive structures. The first conductive structures are coupled with driver circuitry, and the second conductive structures are coupled with sensing circuitry. The memory array includes an array of access devices. Each of the access devices is uniquely addressed by one of the first conductive structures in combination with one of the second conductive structures. Ferroelectric capacitors are coupled with the access devices. Each of the ferroelectric capacitors includes ferroelectric insulative material having zinc.
    Type: Application
    Filed: December 17, 2020
    Publication date: June 23, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Mikhail A. Treger, Albert Liao
  • Patent number: 10403575
    Abstract: Semiconductor device interconnect structures comprising nitrided barriers are disclosed herein. In one embodiment, an interconnect structure includes a conductive material at least partially filling an opening in a semiconductor substrate, and a nitrided barrier between the conductive material and a sidewall in the opening. The nitrided barrier comprises a nitride material and a barrier material, such as tantalum, between the nitride material and the sidewall of the substrate.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: September 3, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Gregory C. Herdt, Mikhail A. Treger, Jin Lu
  • Publication number: 20180204803
    Abstract: Semiconductor device interconnect structures comprising nitrided barriers are disclosed herein. In one embodiment, an interconnect structure includes a conductive material at least partially filling an opening in a semiconductor substrate, and a nitrided barrier between the conductive material and a sidewall in the opening. The nitrided barrier comprises a nitride material and a barrier material, such as tantalum, between the nitride material and the sidewall of the substrate.
    Type: Application
    Filed: January 13, 2017
    Publication date: July 19, 2018
    Inventors: Gregory C. Herdt, Mikhail A. Treger, Jin Lu