Patents by Inventor Mikhail Y. Kachalov

Mikhail Y. Kachalov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7425093
    Abstract: A method and apparatus for thermographically evaluating the bond integrity of a sputtering target assembly is described. The method includes applying a heating or cooling medium or energy to one surface of the assembly and acquiring a graphic recording of a corresponding temperature change on the opposing surface of the assembly using an imaging device. Also described is a method of mathematically analyzing the pixel data recorded in each frame to produce an integrated normalized temperature map that represents the bond integrity of the assembly.
    Type: Grant
    Filed: July 13, 2004
    Date of Patent: September 16, 2008
    Assignee: Cabot Corporation
    Inventors: Charles E. Wickersham, Jr., Zhiguo Zhang, Larry Edwin Ellison, Mikhail Y. Kachalov, John D. White, III
  • Patent number: 6992261
    Abstract: A method of forming a sputtering target assembly and other metal articles is described. Sputtering target assemblies and metal articles are also described. The method includes bonding a sputter target to a backing plate using resistance heating or welding to bond assembly members that respectively include mating projections and grooves formed in bonding surfaces thereof.
    Type: Grant
    Filed: July 15, 2003
    Date of Patent: January 31, 2006
    Assignee: Cabot Corporation
    Inventors: Mikhail Y. Kachalov, Charles E. Wickersham, Jr.