Patents by Inventor Miki AOYAGI

Miki AOYAGI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Correction Coefficient Calculation Device, Correction Coefficient Calculation Method, and Correction Coefficient Calculation Program
    Publication number: 20230343547
    Abstract: The purpose of the present disclosure is to provide a technology for calculating a machine difference correction coefficient more efficiently with high accuracy. A defect inspection device according to the present disclosure calculates a machine difference correction coefficient for correcting a difference in the feature amount of a reference sample between devices, and when a machine difference variation coefficient indicating the change over time in the feature amount of a calibration member is outside a threshold range, recalculates the machine difference correction coefficient by using the feature amount of the calibration member.
    Type: Application
    Filed: July 16, 2020
    Publication date: October 26, 2023
    Inventors: Miki AOYAGI, Masumi SHIRAI, Kei SAKAI