Abstract: A substrate processing apparatus includes a processing container in which a plurality of substrates are processed; a plurality of heaters configured to control a temperature of the plurality of substrates accommodated in the processing container for each of a plurality of zones; and a controller configured to control an operation of the plurality of heaters. The controller is configured to control the plurality of heaters to a set temperature set in advance for each of the plurality of zones, thereby performing a processing on the plurality of substrates accommodated in the processing container, determine whether an abnormality determination condition is satisfied, including that an output value of at least one heater of the plurality of heaters is equal to or less than a heater control resolution, and issue a warning for the set temperature for each of the plurality of zones based on a result of the determining.

Abstract: A failure detection system detects a failure of a sensor that detects a state of a semiconductor manufacturing apparatus. The failure detection system includes a generation unit configured to generate times-series data of information on a detection value of the sensor during a determination period, a calculation unit configured to calculate a regression line of the times-series data, and a failure determination unit configured to determine whether the sensor has failed based on a slope of the regression line.

Abstract: A semiconductor manufacturing system according to an embodiment includes: a controller configured to control a semiconductor manufacturing apparatus; and a server configured to bidirectionally communicate with the controller via a communication line. The server includes a first processor configured to: transmit a backup file creation request (signal) that sets data specific to each controller as a backup file and transmit a backup file acquisition request (signal) requesting acquisition of the created backup file; and receive the created backup file. The controller includes a second processor configured to: receive a request (signal) from the server; and create the backup file when receiving the backup file creation request (signal).

Abstract: A failure detection system detects a failure of a sensor that detects a state of a semiconductor manufacturing apparatus. The failure detection system includes a generation unit configured to generate times-series data of information on a detection value of the sensor during a determination period, a calculation unit configured to calculate a regression line of the times-series data, and a failure determination unit configured to determine whether the sensor has failed based on a slope of the regression line.

Abstract: A semiconductor manufacturing system according to an embodiment includes: a controller configured to control a semiconductor manufacturing apparatus; and a server configured to bidirectionally communicate with the controller via a communication line. The server includes a first processor configured to: transmit a backup file creation request (signal) that sets data specific to each controller as a backup file and transmit a backup file acquisition request (signal) requesting acquisition of the created backup file; and receive the created backup file. The controller includes a second processor configured to: receive a request (signal) from the server; and create the backup file when receiving the backup file creation request (signal).

Abstract: An accumulating unit accumulates image data of an original read by a reading unit. A combining unit combines the image data accumulated in the accumulating unit in a single printing sheet according to a predetermined copy mode. An output unit prints and outputs the image data according to the copy mode. An input unit receives an input of a read instruction. When a total number of originals read by the reading unit is smaller than a total number of originals specified in the copy mode and when the input unit does not receive an input of the read instruction within a predetermined time, a discard determining unit discards the image data accumulated in the accumulating unit, and finishes a printing process.

Abstract: An accumulating unit accumulates image data of an original read by a reading unit. A combining unit combines the image data accumulated in the accumulating unit in a single printing sheet according to a predetermined copy mode. An output unit prints and outputs the image data according to the copy mode. An input unit receives an input of a read instruction. When a total number of originals read by the reading unit is smaller than a total number of originals specified in the copy mode and when the input unit does not receive an input of the read instruction within a predetermined time, a discard determining unit discards the image data accumulated in the accumulating unit, and finishes a printing process.