Patents by Inventor Miki Saito

Miki Saito has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200294838
    Abstract: A substrate fixing device includes a base plate including therein a gas supply section, and an electrostatic chuck provided on the base plate. The electrostatic chuck includes a base having a mounting surface on which a target to be held by electrostatic attraction is mounted, an insertion hole, penetrating the base, having an inner surface that defines the insertion hole and is threaded to foLm a female thread, and a screw member, having an outer surface that is threaded to form a male thread, and inserted into the insertion hole to assume a mated state in which the male thread mates with the female thread. A gas from the gas supply section is supplied to the mounting surface via the screw member.
    Type: Application
    Filed: March 9, 2020
    Publication date: September 17, 2020
    Inventors: Tadayoshi YOSHIKAWA, Miki SAITO, Takahiko SUZUKI, Shuzo AOKI
  • Patent number: 9837297
    Abstract: A tray includes a support base having both a first face on which a clamp object is placed and a second face opposite the first face, an upper electrode embedded in the support base and situated toward the first face, a lower electrode embedded in the support base and situated further toward the second face than the upper electrode is, and one or more interconnect lines configured to provide an electrical connection between the upper electrode and the lower electrode.
    Type: Grant
    Filed: June 8, 2015
    Date of Patent: December 5, 2017
    Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Naoto Watanabe, Miki Saito
  • Publication number: 20150371885
    Abstract: A tray includes a support base having both a first face on which a clamp object is placed and a second face opposite the first face, an upper electrode embedded in the support base and situated toward the first face, a lower electrode embedded in the support base and situated further toward the second face than the upper electrode is, and one or more interconnect lines configured to provide an electrical connection between the upper electrode and the lower electrode.
    Type: Application
    Filed: June 8, 2015
    Publication date: December 24, 2015
    Inventors: Koki TAMAGAWA, Norio SHIRAIWA, Tadayoshi YOSHIKAWA, Naoto WATANABE, Miki SAITO
  • Patent number: 9120704
    Abstract: A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (?·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
    Type: Grant
    Filed: October 15, 2013
    Date of Patent: September 1, 2015
    Assignees: Nippon Tungsten Co., Ltd., Shinko Electric Industries Co., Ltd., Trek Holding Co., Ltd., Japan Fine Ceramics Center
    Inventors: Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito, Toshio Uehara, Hideaki Matsubara, Tetsushi Matsuda
  • Publication number: 20140103612
    Abstract: A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (?·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.
    Type: Application
    Filed: October 15, 2013
    Publication date: April 17, 2014
    Applicants: NIPPON TUNGSTEN CO., LTD., JAPAN FINE CERAMICS CENTER, TREK HOLDING CO., LTD., SHINKO ELECTRIC INDUSTRIES CO., LTD.
    Inventors: Kouta Tsutsumi, Mitsuyoshi Nagano, Koki Tamagawa, Norio Shiraiwa, Tadayoshi Yoshikawa, Miki Saito, Toshio Uehara, Hideaki Matsubara, Tetsushi Matsuda
  • Patent number: 8641825
    Abstract: A substrate temperature regulation fixed apparatus has a base substance on which a vacuumed object is placed, an adhesive layer and a base plate. The base substance is fixed on the base plate through the adhesive layer. The adhesive layer contains a substance having plasma resistance.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: February 4, 2014
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Hiroshi Yonekura, Miki Saito, Koki Tamagawa
  • Patent number: 8505928
    Abstract: A substrate temperature control fixing apparatus comprises an electrostatic chuck which includes a base body and adsorbs and holds an adsorbing target mounted on one of surfaces of the base body, a base plate which supports the electrostatic chuck, and a bank portion provided on an outer periphery of one of surfaces of the base plate which is opposed to the other of the surfaces of the base body.
    Type: Grant
    Filed: December 21, 2009
    Date of Patent: August 13, 2013
    Assignee: Shinko Electric Industries Co., Ltd.
    Inventors: Miki Saito, Tadayoshi Yoshikawa, Koki Tamagawa
  • Publication number: 20100156055
    Abstract: A substrate temperature control fixing apparatus comprises an electrostatic chuck which includes a base body and adsorbs and holds an adsorbing target mounted on one of surfaces of the base body, a base plate which supports the electrostatic chuck, and a bank portion provided on an outer periphery of one of surfaces of the base plate which is opposed to the other of the surfaces of the base body.
    Type: Application
    Filed: December 21, 2009
    Publication date: June 24, 2010
    Applicant: Shinko Electric Industries Co., Ltd.
    Inventors: Miki Saito, Tadayoshi Yoshikawa, Koki Tamagawa
  • Publication number: 20090308538
    Abstract: A substrate temperature regulation fixed apparatus has a base substance on which a vacuumed object is placed, an adhesive layer and a base plate. The base substance is fixed on the base plate through the adhesive layer. The adhesive layer contains a substance having plasma resistance.
    Type: Application
    Filed: June 11, 2009
    Publication date: December 17, 2009
    Applicant: Shinko Electric Industries Co., Ltd.
    Inventors: Hiroshi YONEKURA, Miki Saito, Koki Tamagawa