Abstract: Provided is an air conditioning apparatus that is capable of suppressing increases in volume and cost of the apparatus and performing more suitable overheating protection. An electric compressor is an inverter-integrated electric compressor (10) integrally including a compressor (5), an electric motor (6) that drives the compressor (5), and an inverter (7) including a temperature sensor (11) that detects the temperature in the vicinity of a semiconductor switching device, wherein a controller (3) estimates a discharge temperature of the compressor (5) on the basis of a correlation of respective pressure loading characteristics for the detected temperature of the inverter (7), for the rotational speed of the compressor (5), and for the motive force of the compressor (5) in a refrigerating cycle (2).

Abstract: A position detecting apparatus includes a light source, which supplies a detecting light; a light-collecting optical system which collects the detecting light onto a diffracted light generating portion provided on the object; a light guiding optical system which guides, to a predetermined position, a diffracted measuring light generated from the diffracted light generating portion by receiving the detecting light and a reference light generated from a reference surface by receiving the detecting light; and a photodetector which is arranged at the predetermined position and which detects interference fringes generated by the diffracted measuring light and the reference light. Three-dimensional positional information of, for example, a mask pattern surface or an exposure surface of a photosensitive substrate can be highly accurately detected by a relatively simple construction.

Abstract: Provided is an air conditioning apparatus that is capable of suppressing increases in volume and cost of the apparatus and performing more suitable overheating protection. An electric compressor is an inverter-integrated electric compressor (10) integrally including a compressor (5), an electric motor (6) that drives the compressor (5), and an inverter (7) including a temperature sensor (11) that detects the temperature in the vicinity of a semiconductor switching device, wherein a controller (3) estimates a discharge temperature of the compressor (5) on the basis of a correlation of respective pressure loading characteristics for the detected temperature of the inverter (7), for the rotational speed of the compressor (5), and for the motive force of the compressor (5) in a refrigerating cycle (2).

Abstract: Provided is an air conditioning apparatus that is capable of suppressing increases in volume and cost of the apparatus and performing more suitable overheating protection. An electric compressor is an inverter-integrated electric compressor integrally including a compressor, an electric motor that drives the compressor, and an inverter including a temperature sensor that detects the temperature in the vicinity of a semiconductor switching device, wherein a controller estimates a discharge temperature of the compressor on the basis of a correlation of respective pressure loading characteristics for the detected temperature of the inverter, for the rotational speed of the compressor, and for the motive force of the compressor in a refrigerating cycle.

Abstract: A position detecting apparatus includes a light source which supplies a detecting light; a light-collecting optical system which collects the detecting light onto a diffracted light generating portion provided on the object; a light guiding optical system which guides, to a predetermined position, a diffracted measuring light generated from the diffracted light generating portion by receiving the detecting light and a reference light generated from a reference surface by receiving the detecting light; and a photodetector which is arranged at the predetermined position and which detects interference fringes generated by the diffracted measuring light and the reference light. Three-dimensional positional information of, for example, a mask pattern surface or an exposure surface of a photosensitive substrate can be highly accurately detected by a relatively simple construction.

Abstract: Provided is an air conditioning apparatus that is capable of suppressing increases in volume and cost of the apparatus and performing more suitable overheating protection. An electric compressor is an inverter-integrated electric compressor integrally including a compressor, an electric motor that drives the compressor, and an inverter including a temperature sensor that detects the temperature in the vicinity of a semiconductor switching device, wherein a controller estimates a discharge temperature of the compressor on the basis of a correlation of respective pressure loading characteristics for the detected temperature of the inverter, for the rotational speed of the compressor, and for the motive force of the compressor in a refrigerating cycle.

Abstract: The invention provides a heat-transfer-medium heating apparatus using a PTC heater and a vehicular air-conditioning apparatus using such a heating apparatus, which have superior heat-conducting properties and ease of assembly, which can improve the heating capacity, and which can ensure sufficient electrical insulation. Included are a PTC heater having a stacked construction in which an electrode plate, an incompressible insulating layer, and a compressible heat-conducting layer are sequentially provided on each side of a PTC element so as to sandwich the PTC element; and heat-transfer-medium circulating boxes, respectively disposed in close contact with the two surfaces of the PTC heater and having circulating channels for the heat-transfer-medium formed therein. The heat transfer medium circulating inside the heat-transfer-medium circulating boxes is heated by radiant heat from the two surfaces of the PTC heater.

Abstract: The invention provides a heat-transfer-medium heating apparatus using a PTC heater and a vehicular air-conditioning apparatus using such a heating apparatus, which have superior heat-conducting properties and ease of assembly, which can improve the heating capacity, and which can ensure sufficient electrical insulation. Included are a PTC heater having a stacked construction in which an electrode plate, an incompressible insulating layer, and a compressible heat-conducting layer are sequentially provided on each side of a PTC element so as to sandwich the PTC element; and heat-transfer-medium circulating boxes, respectively disposed in close contact with the two surfaces of the PTC heater and having circulating channels for the heat-transfer-medium formed therein. The heat transfer medium circulating inside the heat-transfer-medium circulating boxes is heated by radiant heat from the two surfaces of the PTC heater.

Abstract: In the inspection apparatus of this projection optical system, a folding glass member, comprising a flat surface part and a reflecting spherical surface part opposing to the flat surface part, is disposed on the image plane side of the projection optical system so that the flat surface part opposes to the projection optical system. Further, in a state wherein a liquid is supplied between the projection optical system and the folding glass member, a measuring beam emitted from an interferometer unit enters the projection optical system; the measuring beam that transmitted through the projection optical system and the liquid, and entered the folding glass member is reflected by the reflecting spherical surface part, and once again passes through the liquid and the projection optical system; and the interference fringes obtained from the measuring beam and the reference beam generated within the interferometer unit are detected.

Abstract: In the inspection apparatus of this projection optical system, a folding glass member, comprising a flat surface part and a reflecting spherical surface part opposing to the flat surface part, is disposed on the image plane side of the projection optical system so that the flat surface part opposes to the projection optical system. Further, in a state wherein a liquid is supplied between the projection optical system and the folding glass member, a measuring beam emitted from an interferometer unit enters the projection optical system; the measuring beam that transmitted through the projection optical system and the liquid, and entered the folding glass member is reflected by the reflecting spherical surface part, and once again passes through the liquid and the projection optical system; and the interference fringes obtained from the measuring beam and the reference beam generated within the interferometer unit are detected.

Abstract: A position detecting apparatus includes a light source which supplies a detecting light; a light-collecting optical system which collects the detecting light onto a diffracted light generating portion provided on the object; a light guiding optical system which guides, to a predetermined position, a diffracted measuring light generated from the diffracted light generating portion by receiving the detecting light and a reference light generated from a reference surface by receiving the detecting light; and a photodetector which is arranged at the predetermined position and which detects interference fringes generated by the diffracted measuring light and the reference light. Three-dimensional positional information of, for example, a mask pattern surface or an exposure surface of a photosensitive substrate can be highly accurately detected by a relatively simple construction.

Abstract: The invention provides a heat-transfer-medium heating apparatus using a PTC heater and a vehicular air-conditioning apparatus using such a heating apparatus, which have superior heat-conducting properties and ease of assembly, which can improve the heating capacity, and which can ensure sufficient electrical insulation. Included are a PTC heater having a stacked construction in which an electrode plate, an incompressible insulating layer, and a compressible heat-conducting layer are sequentially provided on each side of a PTC element so as to sandwich the PTC element; and heat-transfer-medium circulating boxes, respectively disposed in close contact with the two surfaces of the PTC heater and having circulating channels for the heat-transfer-medium formed therein. The heat transfer medium circulating inside the heat-transfer-medium circulating boxes is heated by radiant heat from the two surfaces of the PTC heater.

Abstract: In the inspection apparatus of this projection optical system, a folding glass member, comprising a flat surface part and a reflecting spherical surface part opposing to the flat surface part, is disposed on the image plane side of the projection optical system so that the flat surface part opposes to the projection optical system. Further, in a state wherein a liquid is supplied between the projection optical system and the folding glass member, a measuring beam emitted from an interferometer unit enters the projection optical system; the measuring beam that transmitted through the projection optical system and the liquid, and entered the folding glass member is reflected by the reflecting spherical surface part, and once again passes through the liquid and the projection optical system; and the interference fringes obtained from the measuring beam and the reference beam generated within the interferometer unit are detected.

Abstract: In the inspection apparatus of this projection optical system, a folding glass member, comprising a flat surface part and a reflecting spherical surface part opposing to the flat surface part, is disposed on the image plane side of the projection optical system so that the flat surface part opposes to the projection optical system. Further, in a state wherein a liquid is supplied between the projection optical system and the folding glass member, a measuring beam emitted from an interferometer unit enters the projection optical system; the measuring beam that transmitted through the projection optical system and the liquid, and entered the folding glass member is reflected by the reflecting spherical surface part, and once again passes through the liquid and the projection optical system; and the interference fringes obtained from the measuring beam and the reference beam generated within the interferometer unit are detected.

Abstract: A point diffraction interference measuring method comprises forming a substantially ideal spherical wave by using a point light source-generating unit 101, 102, allowing a light flux composed of the spherical wave to pass through a test sample 109, thereafter dividing the light flux into two light fluxes by using an optical path-dividing element 105, allowing one light flux of the divided light fluxes to pass through a pinhole 129 to covert the one light flux into a reference light beam which is a substantially ideal spherical wave, and detecting interference fringes generated by causing interference between the reference light beam and a measuring light beam which is the other light flux of the divided light fluxes. The wavefront aberration of the test sample can be measured by observing the interference fringes without being affected by the disturbance which would be otherwise caused by any system vibration or the like.

Abstract: A point diffraction interference measuring method comprises forming a substantially ideal spherical wave by using a point light source-generating unit 101, 102, allowing a light flux composed of the spherical wave to pass through a test sample 109, thereafter dividing the light flux into two light fluxes by using an optical path-dividing element 105, allowing one light flux of the divided light fluxes to pass through a pinhole 129 to covert the one light flux into a reference light beam which is a substantially ideal spherical wave, and detecting interference fringes generated by causing interference between the reference light beam and a measuring light beam which is the other light flux of the divided light fluxes. The wavefront aberration of the test sample can be measured by observing the interference fringes without being affected by the disturbance which would be otherwise caused by any system vibration or the like.

Abstract: A projection optical system of the present invention has a first lens group G.sub.1 being positive, a second lens group G.sub.2 being negative, a third lens group G.sub.3 being positive, a fourth lens group G.sub.4 being negative, a fifth lens group G.sub.5 being positive, and a sixth lens group G.sub.6 being positive in the named order from the first object toward the second object, in which the second lens group G.sub.2 comprises an intermediate lens group G.sub.2M between a negative front lens L.sub.2F and a negative rear lens L.sub.2R and in which the intermediate lens group G.sub.2M is arranged to comprise at least a first positive lens being positive, a second lens being negative, a third lens being negative, and a fourth lens being negative in the named order from the first object toward the second object. The present invention involves findings of suitable focal length ranges for the first to the sixth lens groups G.sub.1 to G.sub.

Abstract: In a compressor in which a compression mechanism incorporated in a housing is driven by a drive shaft penetrating the housing, and the compression mechanism is lubricated by mist-form lubricating oil contained in a low-pressure gas refrigerant sucked into the housing, the lubricating oil in a space is prevented from entering a bearing and deteriorating grease in the bearing. An equalizing hole is formed to allow the space to communicate with the atmosphere, the space being defined between the bearing pivotally supporting the outer end of the drive shaft on the housing and a shaft seal disposed on the inside of the bearing to seal a gap between the drive shaft and the housing.

Abstract: A compressor having a capacity-controlling mechanism is provided, by which the inner-peripheral surface of a blind opening provided in a piston is subjected to abrasion due to sliding and rotating motions of a coil spring in the piston. In the capacity-controlling mechanism, the coil spring is covered by a cover made of abrasion resistant material and the covered coil spring is arranged in the blind opening, or a head of the coil spring is engaged to an inner surface of the blind opening.

Abstract: A projection optical system of the present invention has a first lens group G1 being positive, a second lens group G2 being negative, a third lens group G3 being positive, a fourth lens group G4 being negative, a fifth lens group G5 being positive, and a sixth lens group G6 being positive in the named order from the first object toward the second object, in which the second lens group G2 comprises an intermediate lens group G2M between a negative front lens L2F and a negative rear lens L2R and in which the intermediate lens group G2M is arranged to comprise at least a first positive lens being positive, a second lens being negative, a third lens being negative, and a fourth lens being negative in the named order from the first object toward the second object.