Patents by Inventor Mikiko Kawaguchi

Mikiko Kawaguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for forming electrolytic water and apparatus for washing semiconductor substrate using electrolytic water-forming apparatus
    Patent number: 6723226
    Abstract: In forming an electrolytic water, pure water or ultra-pure water is added to at least one solid supporting electrolyte selected from the group consisting of oxalic acid, ammonium oxalate, ammonium formate, ammonium bicarbonate, and ammonium tartrate to prepare a solution saturated with the supporting electrolyte. The solution containing the supporting electrolyte is subjected to hydrolysis to obtain an anodic water and a cathodic water.
    Type: Grant
    Filed: April 12, 1996
    Date of Patent: April 20, 2004
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Jun Takayasu, Naoto Miyashita, Mikiko Kawaguchi