Abstract: A spin coating apparatus for use in applying a coating solution in film form to an upper surface of a substrate. This apparatus includes a spinning table for supporting and spinning the substrate in horizontal posture, an upper spinning plate disposed parallel to and substantially slightly spaced from the upper surface of the substrate supported on the spinning table, and having an opening formed substantially centrally thereof, the upper spinning plate being adapted to spin concurrently with the spinning table, and a cleaning nozzle vertically movably mounted in the opening of the upper spinning plate. The cleaning nozzle is lowered when cleaning a lower surface of the upper spinning plate, so that a cleaning liquid outlet port formed in a lower end region of the cleaning nozzle is exposed below the lower surface of the rotary plate. In this state, a cleaning liquid is directed to the lower surface of the upper spinning plate being spinng to clean the lower surface thereof.

Abstract: A transfer device of a sheet object in which at least one position adjustment piece is fitted in one transfer bar and at least two position adjustment pieces are fitted in another transfer bar, and in which a spacing between the two transfer bars as well as positions of the position adjustment pieces are adjustable.

Abstract: A positioning assembly comprises a base having a pair of taller projections and a pair of shorter projections on its surface. The positioning assembly is placed between a pair of belts which form a conveying assembly, so that the taller projections receive a sheet material which is conveyed along the belts. The positioning assembly is positioned at a middle position in which the taller projections project above the belts, whereby the taller projections receive the material. Receiving the material, the positioning assembly is elevated to a high position where all the projections including the shorter one project above the belts, whereby the material is held on the base. The material is processed with being rotated at the high position. Then the positioning assembly is lowered to a low position where all the projections are below the belts, whereby the material is delivered again onto the belts to be conveyed to the next process.