Patents by Inventor Mikio Tachibana

Mikio Tachibana has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Surface undulation inspection apparatus
    Patent number: 5309222
    Abstract: A surface undulation inspection apparatus for detecting a defect of a fine undulation including a change of a gentle profile or the like on a suitable surface of a specimen to be inspected, wherein a patterning light source is opposed to an image pickup lens having a pin hole with a specimen interposed therebetween to pin-hole image pickup the patterning light source through the specimen to be inspected whereby a ray passing through the specimen to be inspected is specified as a principal ray, and a local surface undulation defect on the surface of the specimen is stressed and a defective part is specified.
    Type: Grant
    Filed: July 14, 1992
    Date of Patent: May 3, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Mitsuhito Kamei, Mikio Tachibana