Abstract: An ion implanter including a beam generation device that generates an ion beam, based on an implantation recipe, a plurality of measurement devices that measure beam currents of the ion beam, and a control device. The control device acquires a data set including the beam currents and an implantation parameter in the implantation recipe, and evaluates measurement validity of the beam currents of the ion beam by using the model. The implantation parameter may be one of ion species, beam energy, a beam current, a beam size, a wafer tilt angle, a wafer twist angle and an average dose. The model may be built based on a plurality of past data sets acquired during a plurality of implantation process based on the implantation recipe.

Abstract: An ion implanter includes a beam generation device that generates an ion beam with which a workpiece is irradiated, a control device that sets a plurality of operation parameters for controlling an operation of the beam generation device, a measurement device that measures at least one of beam characteristics of the ion beam, a storage device that accumulates data sets in each of which a set of set values of the plurality of operation parameters and a measurement value of the at least one of the beam characteristics of the ion beam are associated with each other, and an analysis device that generates a function for estimating the at least one of the beam characteristics from a set value of at least one of specific parameters included in the plurality of operation parameters, based on a plurality of the data sets accumulated in the storage device.

Abstract: An ion implanter including a beam generation device that generates an ion beam, based on an implantation recipe, a plurality of measurement devices that measure beam currents of the ion beam, and a control device. The control device acquires a data set including the beam currents and an implantation parameter in the implantation recipe, and evaluates measurement validity of the beam currents of the ion beam by using the model. The implantation parameter may be one of ion species, beam energy, a beam current, a beam size, a wafer tilt angle, a wafer twist angle and an average dose. The model may be built based on a plurality of past data sets acquired during a plurality of implantation process based on the implantation recipe.

Abstract: There is provided an ion implanter including a beam generation device that generates an ion beam, based on an implantation recipe, a plurality of measurement devices that measure at least one physical quantity of the ion beam, and a control device that acquires a data set including a plurality of measurement values measured by the plurality of measurement devices, and evaluates measurement validity of the at least one physical quantity of the ion beam by using a model representing a correlation between the plurality of measurement values.

Abstract: An ion implanter includes a beam generation device that generates an ion beam with which a workpiece is irradiated, a control device that sets a plurality of operation parameters for controlling an operation of the beam generation device, a measurement device that measures at least one of beam characteristics of the ion beam, a storage device that accumulates data sets in each of which a set of set values of the plurality of operation parameters and a measurement value of the at least one of the beam characteristics of the ion beam are associated with each other, and an analysis device that generates a function for estimating the at least one of the beam characteristics from a set value of at least one of specific parameters included in the plurality of operation parameters, based on a plurality of the data sets accumulated in the storage device.

Abstract: There is provided an ion implanter including a beam generation device that generates an ion beam, based on an implantation recipe, a plurality of measurement devices that measure at least one physical quantity of the ion beam, and a control device that acquires a data set including a plurality of measurement values measured by the plurality of measurement devices, and evaluates measurement validity of the at least one physical quantity of the ion beam by using a model representing a correlation between the plurality of measurement values.

Abstract: A cleaning unit includes a cleaning member, an accommodating portion, and a transport member. The cleaning member removes a developer from a surface of an image carrier. The accommodating portion accommodates the removed developer. The transport member transports the developer removed by the cleaning member to the accommodating portion. The transport member includes a shaft member and first and second transport bodies. The shaft member extends in a direction intersecting a transport direction of the developer. The first transport body is rotatably supported by the shaft member. The second transport body is rotatably supported by the first transport body at a position spaced from the shaft member. The second transport body extends toward the cleaning member. When the shaft member rotates, a trajectory of an end portion, at a cleaning member side, of the second transport body is an ellipse elongated along the transport direction on the cleaning member.

Abstract: An image forming apparatus includes one or plural forming devices that form respective images on a recording medium that is being transported, a fixing device provided on a downstream side with respect to at least one of the forming devices in a direction of transport of the recording medium and that fixes the images formed on the recording medium, a delivering device that receives the recording medium transported in a first direction and discharges the recording medium in a second direction that is different from the first direction, and a supplying device that supplies the recording medium to any of the forming devices or to the delivering device. The forming devices, the fixing device, the delivering device, and the supplying device have respective housings and are each joinable to any of the other devices.

Abstract: A cleaning unit includes a cleaning member, an accommodating portion, and a transport member. The cleaning member removes a developer from a surface of an image carrier. The accommodating portion accommodates the removed developer. The transport member transports the developer removed by the cleaning member to the accommodating portion. The transport member includes a shaft member and first and second transport bodies. The shaft member extends in a direction intersecting a transport direction of the developer. The first transport body is rotatably supported by the shaft member. The second transport body is rotatably supported by the first transport body at a position spaced from the shaft member. The second transport body extends toward the cleaning member. When the shaft member rotates, a trajectory of an end portion, at a cleaning member side, of the second transport body is an ellipse elongated along the transport direction on the cleaning member.

Abstract: A cleaning unit includes a cleaning member that removes a developer from a surface of an image holding member; an accommodating portion that accommodates the removed developer; and a transport member that transports the developer removed by the cleaning member to the accommodating portion, wherein the transport member includes a transport unit that extends in a direction intersecting with a developer transport direction, has a surface formed to be inclined in a direction approaching the cleaning member towards an upstream side, and transports the developer while contacting with the developer.

Abstract: An image forming apparatus includes one or plural forming devices that form respective images on a recording medium that is being transported, a fixing device provided on a downstream side with respect to at least one of the forming devices in a direction of transport of the recording medium and that fixes the images formed on the recording medium, a delivering device that receives the recording medium transported in a first direction and discharges the recording medium in a second direction that is different from the first direction, and a supplying device that supplies the recording medium to any of the forming devices or to the delivering device. The forming devices, the fixing device, the delivering device, and the supplying device have respective housings and are each joinable to any of the other devices.

Abstract: A cleaning unit includes a cleaning member that removes a developer from a surface of an image holding member; an accommodating portion that accommodates the removed developer; and a transport member that transports the developer removed by the cleaning member to the accommodating portion, wherein the transport member includes a transport unit that extends in a direction intersecting with a developer transport direction, has a surface formed to be inclined in a direction approaching the cleaning member towards an upstream side, and transports the developer while contacting with the developer.

Abstract: A charging unit includes: a charging member that contacts with an image holding body holding an image and charges a surface of the image holding body; a support member that supports the charging member; and a pressing member that has plural springs that expand and contract in a direction from the support member to the image holding body, and pushes the support member toward the image holding body, and at least two of the plural springs of the pressing member are formed by a single metal wire.

Abstract: A charging unit includes: a charging member that contacts with an image holding body holding an image and charges a surface of the image holding body; a support member that supports the charging member; and a pressing member that has plural springs that expand and contract in a direction from the support member to the image holding body, and pushes the support member toward the image holding body, and at least two of the plural springs of the pressing member are formed by a single metal wire.

Abstract: An applying device includes an applying member and a contact member. The applying member applies voltage to an image bearing member and has an elastic layer and an endless surface layer. The elastic layer is disposed facing the image bearing member, is rotatable about a rotation axis, and is composed of a foam material. The surface layer surrounds an outer periphery of the elastic layer, is supported by the elastic layer in a non-bonded state, and is rotatable together therewith. The contact member comes into contact with the surface layer at an upstream side, in a rotational direction of the applying member, relative to an imaginary line segment connecting a rotation axis of the image bearing member and the rotation axis of the applying member, so as to apply tension to the surface layer at a contact position between the image bearing member and the applying member.

Abstract: Provided is a cleaning member, including a shaft material that rotates about an axial center, and a cleaning material that is spirally wound around the shaft material, is driven to be rotated by a rotating member to be cleaned, cleans the member to be cleaned, and has the number of windings which is equal to or greater than 1 and less than 2 in a cleaning area where the member to be cleaned is cleaned.

Abstract: Provided is an image forming apparatus including an image holder that is provided to be rotatable, and a charging member that includes a charging member main body and a cover member, in which an outer circumferential surface of the cover member is disposed to be in contact with the image holder, and that charges the image holder, wherein a circumferential speed of one member of the rotating image holder and the rotating charging member main body is greater than a circumferential speed of the other member, and wherein the cover member moves to follow a movement of the one member at a contact portion where the cover member and the image holder come into contact with each other, and a portion of the cover member that is positioned on an upstream side of the contact portion is drawn toward a downstream side.

Abstract: A charging device includes a charging member and a cleaning member. The charging member is driven and rotated while in contact with an outer peripheral surface of an image carrier which rotates, and charges the image carrier. The cleaning member is driven and rotated while in contact with an outer peripheral surface of the charging member and cleans the outer peripheral surface of the charging member. In the charging device, a radius of the charging member is less than a radius of the cleaning member.

Abstract: Provided is an image forming apparatus including an image holder that is mounted at a predetermined mount position, a charging member that charges the image holder, a cleaning member that cleans the charging member, a holding member that holds the charging member and the cleaning member, includes a mount section on which the cleaning member is mounted, is urged toward the image holder side, and recedes when the image holder is mounted at the predetermined mount position, and a drop-out prevention section that is disposed at a position facing the mount section which is included in the holding member at a receding position and that prevents the cleaning member from dropping out from the mount section.

Abstract: Provided is an image forming apparatus including an image holder that is provided to be rotatable, and a charging member that includes a charging member main body and a cover member, in which an outer circumferential surface of the cover member is disposed to be in contact with the image holder, and that charges the image holder, wherein a circumferential speed of one member of the rotating image holder and the rotating charging member main body is greater than a circumferential speed of the other member, and wherein the cover member moves to follow a movement of the one member at a contact portion where the cover member and the image holder come into contact with each other, and a portion of the cover member that is positioned on an upstream side of the contact portion is drawn toward a downstream side.