Abstract: A rotary machine unit includes a casing having a tubular barrel, a stator core fixed to an inner peripheral surface of the tubular barrel, and a first member provided between the inner peripheral surface of the tubular barrel and an outer peripheral surface of the stator core. A shape of the inner peripheral surface of the tubular barrel is a non-perfect circular shape as viewed in a cylinder axis direction of the tubular barrel. The first member is made of a material having a lower Young's modulus than a material forming the tubular barrel and a material forming the stator core.

Abstract: Disclosed is an inspection sensor and inspection apparatus capable of accurately inspecting the shape of a conductive pattern. A sensor element 12a includes an MOSFET, and an aluminum electrode (AL) serving as a passive element 80. The passive element or aluminum electrode 80 is connected to the gate of a MOSFET 81 and the source of a MOSFET 82. A voltage VDD is supplied from a power supply circuit 18 to the drain of the MOSFET 81, and the source of the MOSFET 81 is connected to the drain of a MOSFET 83. A reset signal is entered from a vertical selection section 14 into the gate of the MOSFET 82, and the voltage VDD is supplied from the power supply circuit 18 to the drain of the MOSFET 82. A selection signal is entered from the vertical selection section 14 into the gate of the MOSFET 83, and an output from the source of the MOSFET 83 is entered into a lateral selection section 13.

Abstract: Disclosed is an inspection apparatus and method for inspecting a circuit wiring on a circuit board. An inspection signal is supplied to the circuit wiring on the circuit board (S 141), and potential variation generated in a specific region of the circuit wiring in response to the inspection signal is detected using a plurality of sensor elements (S 142) to create image data representing the shape of the circuit wiring (S 151 and subsequent Steps). The shape of the circuit wiring is compared with a corresponding pre-registered standard shape (S 167) to check the state of the circuit wiring (S 168, S 169). The inspection apparatus and method of the present invention can reliably inspect the state of a circuit wiring with a high degree of accuracy.

Abstract: Disclosed is an inspection sensor and inspection apparatus capable of accurately inspecting the shape of a conductive pattern. A sensor element 12a includes an MOSFET, and an aluminum electrode (AL) serving as a passive element 80. The passive element or aluminum electrode 80 is connected to the gate of a MOSFET 81 and the source of a MOSFET 82. A voltage VDD is supplied from a power supply circuit 18 to the drain of the MOSFET 81, and the source of the MOSFET 81 is connected to the drain of a MOSFET 83. A reset signal is entered from a vertical selection section 14 into the gate of the MOSFET 82, and the voltage VDD is supplied from the power supply circuit 18 to the drain of the MOSFET 82. A selection signal is entered from the vertical selection section 14 into the gate of the MOSFET 83, and an output from the source of the MOSFET 83 is entered into a lateral selection section 13.

Abstract: Disclosed is an apparatus and method for inspection a circuit wiring on a circuit board. In advance of an actual inspection of the circuit board, image data on all of standard circuit wirings of a standard circuit board are extracted and registered as standard-shape or reference data (FIG. 14). An actual-image data obtained by actually inspecting a target circuit wiring is compared with the reference data through a least squares method (S 167) to determine the state of the target circuit wiring in accordance with a correlation value of the two data (S168). The comparison result is displayed on a display 21a while specifying a region from the reference data (S169).

Abstract: Disclosed is a method for inspection a circuit wiring on a circuit board, which comprises the steps of supplying an inspection signal to the circuit wiring (S141), detecting potential variation which is generated in the circuit wiring in response to the supplied inspection signal, by use of a plurality of sensor elements (S142), and creating image data representing the shape of the circuit if the detected potential variation at the specific position is out of a given range (S143-N), while omitting the generation of the image data if the detected potential variation at the specific position falls within the given range (S143-Y).