Patents by Inventor Mikko PARTANEN

Mikko PARTANEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250206595
    Abstract: A device may include a device layer, wherein a vertical direction is perpendicular to a surface of the device layer, a movable structure in the device layer, wherein a first rotation axis extends through the movable structure and lies in the device layer, an electrostatic in-plane force transducer, which comprises one or more first transducer structure on a first side from the first rotation axis, and one or more second transducer structure on a second side from the first rotation axis, and a first translation spring, which extends from the movable structure to the electrostatic in-plane force transducer on the first side from the first rotation axis, and a second translation spring which extends from the movable structure to the electrostatic in-plane force transducer on the second side from the first rotation axis, and wherein the first translation spring and the second translation spring are in the device layer.
    Type: Application
    Filed: December 17, 2024
    Publication date: June 26, 2025
    Inventors: Matti LIUKKU, Mikko PARTANEN, Anssi BLOMQVIST
  • Publication number: 20250109012
    Abstract: A device is provided that includes a stator including a stator element and a row of stator comb fingers, wherein the stator comb fingers extend away from the stator element in a y-direction. A device may include a rotor including a rotor element and a row of rotor comb fingers, wherein the rotor comb fingers extend away from the rotor element in a direction which is opposite to the y-direction, and wherein the stator comb fingers are interdigitated with the rotor comb fingers, and form an interdigitated row, and each pair of adjacent stator comb finger and rotor comb finger are separated from each other by a x-gap in a x-direction, which is perpendicular to the y-direction.
    Type: Application
    Filed: September 25, 2024
    Publication date: April 3, 2025
    Inventors: Mikko PARTANEN, Konsta HANNULA
  • Publication number: 20240393114
    Abstract: A microelectromechanical device is provided that includes a first proof mass and a second proof mass in a device plane. The first proof mass includes a first set of rotor combs, and the first set of rotor combs comprises a first set of rotor transducer combs. The second proof mass includes a second set of rotor combs, and the second set of rotor combs comprises a second set of rotor transducer combs. The first and second proof masses are configured to undergo anti-phase movement. The first set of rotor combs also includes a first set of dummy rotor combs and the second set of rotor combs also includes a second set of dummy rotor combs. The first set of rotor combs is reflection-symmetric with the second set of rotor combs.
    Type: Application
    Filed: May 16, 2024
    Publication date: November 28, 2024
    Inventor: Mikko PARTANEN
  • Patent number: 12139395
    Abstract: A micromechanical device further comprises a motion limiter configured to prevent a rotor from coming into direct physical contact with a stator. The motion limiter comprises a spring which extends across the rotor-stator gap. The motion limiter further comprises a stopper which is attached to the spring. When the rotor moves toward the stator, the motion limiter is configured to bring the stopper into contact with a counter-structure.
    Type: Grant
    Filed: December 6, 2021
    Date of Patent: November 12, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Mikko Partanen
  • Publication number: 20240166499
    Abstract: A method is provided for bonding microelectromechanical components with at least two different pressure element cavities. The method includes forming on the cap wafer or/and on the structure wafer a metal layer that allows the hermetically sealing of one cavity at a first pressure, then hermetically scaling the other cavity at a second pressure.
    Type: Application
    Filed: November 20, 2023
    Publication date: May 23, 2024
    Inventors: Mikko PARTANEN, Petteri KILPINEN
  • Patent number: 11987492
    Abstract: This disclosure describes a micromechanical device comprising a first device part and a second device part. One of the first and second device parts is a mobile rotor and the other of the first and second device parts is a fixed stator. The micromechanical device further comprises a motion limiter which extends from the first device part to the second device part. The motion limiter comprises an elongated lever, and the motion limiter is configured to bring a stopper into contact with a counter-structure by rotating the elongated lever.
    Type: Grant
    Filed: December 6, 2021
    Date of Patent: May 21, 2024
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Mikko Partanen
  • Publication number: 20230234834
    Abstract: A microelectromechanical device is provided that includes a mobile rotor and a fixed stator in a device plane. Moreover, a fixed wall defines a wall plane that is adjacent to the device plane and a motion limiter is provided to prevent the rotor from coming into direct physical contact with the fixed wall. The motion limiter includes a shock absorber that extends from the rotor to the stator and a fixed stopper structure that protrudes from the fixed wall toward the shock absorber.
    Type: Application
    Filed: January 25, 2023
    Publication date: July 27, 2023
    Inventor: Mikko PARTANEN
  • Publication number: 20230219803
    Abstract: A microelectromechanical device having a mobile rotor and a fixed stator in a device plane, and a motion limiter that prevents the mobile rotor from contacting a fixed wall in a vertical direction that is perpendicular to the device plane. Moreover, the motion limiter extends between the rotor and the stator and includes a stopper lever that is configured to rotate out of the device plane.
    Type: Application
    Filed: January 9, 2023
    Publication date: July 13, 2023
    Inventor: Mikko PARTANEN
  • Patent number: 11561097
    Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: January 24, 2023
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Anssi Blomqvist, Ville-Pekka Rytkönen, Mikko Partanen
  • Publication number: 20220194781
    Abstract: This disclosure describes a micromechanical device comprising a first device part and a second device part. One of the first and second device parts is a mobile rotor and the other of the first and second device parts is a fixed stator. The micromechanical device further comprises a motion limiter which extends from the first device part to the second device part. The motion limiter comprises an elongated lever, and the motion limiter is configured to bring a stopper into contact with a counter-structure by rotating the elongated lever.
    Type: Application
    Filed: December 6, 2021
    Publication date: June 23, 2022
    Inventor: Mikko PARTANEN
  • Publication number: 20220194782
    Abstract: A micromechanical device further comprises a motion limiter configured to prevent a rotor from coming into direct physical contact with a stator. The motion limiter comprises a spring which extends across the rotor-stator gap. The motion limiter further comprises a stopper which is attached to the spring. When the rotor moves toward the stator, the motion limiter is configured to bring the stopper into contact with a counter-structure.
    Type: Application
    Filed: December 6, 2021
    Publication date: June 23, 2022
    Inventor: Mikko PARTANEN
  • Publication number: 20210364293
    Abstract: A gyroscope with a first Coriolis mass quartet and a second Coriolis mass quartet arranged around two quartet center points, and two elongated mass elements or synchronization bars aligned with each other outside of each Coriolis mass. One end of each elongated mass element and synchronization bar is attached to the corresponding Coriolis mass. Each elongated mass element is suspended from a peripheral anchor point by a mass element suspension arrangement which allows said elongated mass element to undergo rotational motion both in the device plane and out of the device plane. Each elongated synchronization bar is suspended from a peripheral anchor point by a synchronization bar suspension arrangement which allows said elongated synchronization bar to undergo rotational motion both in the device plane and out of the device plane substantially around its midpoint.
    Type: Application
    Filed: May 24, 2021
    Publication date: November 25, 2021
    Inventors: Anssi BLOMQVIST, Ville-Pekka RYTKÖNEN, Mikko PARTANEN
  • Patent number: D1080788
    Type: Grant
    Filed: September 12, 2022
    Date of Patent: June 24, 2025
    Assignee: Lappset Group Oy
    Inventors: Mikko Partanen, Oskari Koistinen