Patents by Inventor Miku ABE

Miku ABE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Production method for resist composition purified product, resist pattern forming method, and resist composition purified product
    Patent number: 12186715
    Abstract: There is provided a production method for a resist composition purified product, which includes a step (i) of filtering a resist composition with a filter having a porous structure in which adjacent spherical cells are connected to each other. The filter includes a porous membrane containing at least one resin selected from the group consisting of polyimide and polyamide imide. The resist composition contains a base material component (A) that exhibits changed solubility in a developing solution under action of acid, an onium salt, and an organic solvent component (S), where the content of the organic solvent component (S) is 97% by mass or more.
    Type: Grant
    Filed: May 20, 2020
    Date of Patent: January 7, 2025
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Akihiko Nakata, Miku Abe, Hiroki Saito
  • PRODUCTION METHOD FOR RESIST COMPOSITION PURIFIED PRODUCT, RESIST PATTERN FORMING METHOD, AND RESIST COMPOSITION PURIFIED PRODUCT
    Publication number: 20220242821
    Abstract: There is provided a production method for a resist composition purified product, which includes a step (i) of filtering a resist composition with a filter having a porous structure in which adjacent spherical cells are connected to each other. The filter includes a porous membrane containing at least one resin selected from the group consisting of polyimide and polyamide imide. The resist composition contains a base material component (A) that exhibits changed solubility in a developing solution under action of acid, an onium salt, and an organic solvent component (S), where the content of the organic solvent component (S) is 97% by mass or more.
    Type: Application
    Filed: May 20, 2020
    Publication date: August 4, 2022
    Applicant: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Akihiko NAKATA, Miku ABE, Hiroki SAITO