Patents by Inventor Miles V. Sullivan

Miles V. Sullivan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Technique for the fabrication of an iron oxide mask
    Patent number: 4422898
    Abstract: Iron oxide films for "see-through" photomasks are deposited upon heated substrates by chemical vapor deposition from iron pentacarbonyl in the presence of oxygen. The solubility of the iron oxide film is found to be higher, the lower the temperature of the substrate during deposition. At temperatures below 160 degrees C., films are obtained which can be patterned at reasonable rates by photolithographic procedures using conventional mild etchants.
    Type: Grant
    Filed: June 2, 1982
    Date of Patent: December 27, 1983
    Assignee: Bell Telephone Laboratories, Incorporated
    Inventors: John B. MacChesney, Paul B. O'Connor, Miles V. Sullivan