Patents by Inventor Million Daniel

Million Daniel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser closed power loop with an acousto-optic modulator for power modulation
    Patent number: 11374375
    Abstract: A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: June 28, 2022
    Assignee: KLA Corporation
    Inventors: Mandar Paranjape, Steve Yifeng Cui, Anatoly Romanovsky, Million Daniel, Nadine Asenbaum-Doerre, Jeff Chen
  • Laser Closed Power Loop with an Acousto-Optic Modulator for Power Modulation
    Publication number: 20210050700
    Abstract: A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.
    Type: Application
    Filed: August 7, 2020
    Publication date: February 18, 2021
    Inventors: Mandar Paranjape, Steve Yifeng Cui, Anatoly Romanovsky, Million Daniel, Nadine Asenbaum-Doerre, Jeff Chen