Patents by Inventor Min-Cheng Chen
Min-Cheng Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250040190Abstract: A semiconductor structure including a substrate, a capacitor, and an oxide semiconductor field effect transistor (OSFET). The capacitor is located on the substrate. The oxide semiconductor field effect transistor is located on the substrate. The oxide semiconductor field effect transistor is electrically connected to the capacitor.Type: ApplicationFiled: November 30, 2023Publication date: January 30, 2025Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Yu-Chang Lin, Min-Cheng Chen
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Publication number: 20240357827Abstract: A ferroelectric memory structure including a substrate, first and second conductive lines, first and second dielectric layers, a channel pillar, a gate pillar, and a ferroelectric material layer is provided. The first conductive line is located on the substrate. The first dielectric layer is located on the first conductive line. The channel pillar is located on the first conductive line and in the first dielectric layer. The second conductive line is located on the first dielectric layer and the channel pillar. The gate pillar passes through the second conductive line and is located in the channel pillar. The second dielectric layer is located between the gate pillar and the first conductive line, between the gate pillar and the channel pillar, and between the gate pillar and the second conductive line. The ferroelectric material layer is located between the gate pillar and the second dielectric layer.Type: ApplicationFiled: July 20, 2023Publication date: October 24, 2024Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Jyun-Hong Shih, Min-Cheng Chen
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Patent number: 12101941Abstract: A ferroelectric memory structure including a substrate, a ferroelectric capacitor structure, and a switch device is provided. The ferroelectric capacitor structure is disposed on the substrate. The ferroelectric capacitor structure includes at least one first electrode, first dielectric layers, a second electrode, and a ferroelectric material layer. The at least one first electrode and the first dielectric layers are alternately stacked. The second electrode penetrates through the first electrode. The ferroelectric material layer is disposed between the first electrode and the second electrode. The switch device is electrically connected to the ferroelectric capacitor structure.Type: GrantFiled: November 30, 2021Date of Patent: September 24, 2024Assignee: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Publication number: 20240047485Abstract: A CMOS image sensor with 3D monolithic OSFET and FEMIM capacitor, including a substrate with CMOS devices formed thereon, a BEOL interconnect layer on the substrate and with BEOL interconnects formed therein, a pixel circuit layer on the BEOL interconnect layer. The OSFETs and FEMIM capacitors are formed in the pixel circuit layer, and a photoelectric conversion layer on the pixel circuit layer and with photodiodes are formed therein, wherein the CMOS devices, the OSFETs, FEMIM capacitors and photodiodes are electrically connected with each other through the BEOL interconnects.Type: ApplicationFiled: April 12, 2023Publication date: February 8, 2024Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Shang-Shiun Chuang
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Patent number: 11800721Abstract: A ferroelectric memory structure including a first conductive line, a second conductive line, and a memory cell is provided. The second conductive line is disposed on the first conductive line. The memory cell is disposed between the first and second conductive lines. The memory cell includes a switch device and a ferroelectric capacitor structure. The switch device is disposed between the first and second conductive lines. The ferroelectric capacitor structure is disposed between the first conductive line and the switch device. The ferroelectric capacitor structure includes ferroelectric capacitors electrically connected. Each of the ferroelectric capacitors includes a first conductive layer, a second conductive layer, and a ferroelectric material layer. The second conductive layer is disposed on the first conductive layer. The ferroelectric material layer is disposed between the first conductive layer and the second conductive layer.Type: GrantFiled: August 16, 2021Date of Patent: October 24, 2023Assignee: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Patent number: 11721378Abstract: An oxide semiconductor-based FRAM is provided in the present invention, including a substrate, a word line on the substrate, a gate insulating layer on the word line, an oxide semiconductor layer on the gate insulating layer, a source and a drain respectively on the oxide semiconductor layer and spaced apart at a distance, wherein the source and the drain further connect respectively to a plate line and a bit line, a ferroelectric dielectric layer on the source, the drain and the oxide semiconductor layer, and a write electrode on the ferroelectric dielectric layer, wherein the write electrode, the ferroelectric dielectric layer, the oxide semiconductor layer, the gate insulating layer and the word line overlap each other in a direction vertical to the substrate.Type: GrantFiled: January 31, 2023Date of Patent: August 8, 2023Assignee: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Publication number: 20230178134Abstract: An oxide semiconductor-based FRAM is provided in the present invention, including a substrate, a word line on the substrate, a gate insulating layer on the word line, an oxide semiconductor layer on the gate insulating layer, a source and a drain respectively on the oxide semiconductor layer and spaced apart at a distance, wherein the source and the drain further connect respectively to a plate line and a bit line, a ferroelectric dielectric layer on the source, the drain and the oxide semiconductor layer, and a write electrode on the ferroelectric dielectric layer, wherein the write electrode, the ferroelectric dielectric layer, the oxide semiconductor layer, the gate insulating layer and the word line overlap each other in a direction vertical to the substrate.Type: ApplicationFiled: January 31, 2023Publication date: June 8, 2023Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Publication number: 20230171966Abstract: A 3D monolithic stacking memory structure is provided in the present invention, including a semiconductor substrate, a field effect transistor (FET) on the semiconductor substrate, a plurality of back-end metal layers on the FET and the semiconductor substrate, an oxide-semiconductor FET (OSFET) in the back-end metal layers, wherein a drain of the OSFET is connected with a gate of the FET, and a FEMIM storage capacitor formed on the back-end metal layers, wherein a bottom electrode of the FEMIM storage capacitor is connected with the drain of the OSFET and the gate of the FET, and the FET, the OSFET and the FEMIM storage capacitor are stacked in order from bottom to top on the semiconductor substrate.Type: ApplicationFiled: March 10, 2022Publication date: June 1, 2023Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Publication number: 20230137738Abstract: A ferroelectric memory structure including a substrate, a ferroelectric capacitor structure, and a switch device is provided. The ferroelectric capacitor structure is disposed on the substrate. The ferroelectric capacitor structure includes at least one first electrode, first dielectric layers, a second electrode, and a ferroelectric material layer. The at least one first electrode and the first dielectric layers are alternately stacked. The second electrode penetrates through the first electrode. The ferroelectric material layer is disposed between the first electrode and the second electrode. The switch device is electrically connected to the ferroelectric capacitor structure.Type: ApplicationFiled: November 30, 2021Publication date: May 4, 2023Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Patent number: 11610621Abstract: An oxide semiconductor based FRAM is provided in the present invention, including a substrate, a write electrode on the substrate, a ferroelectric dielectric layer on the write electrode, an oxide semiconductor layer on the ferroelectric dielectric layer, a source and a drain respectively on the oxide semiconductor layer and spaced apart at a distance, wherein the source and the drain are further connected to a plate line and a bit line respectively, a gate insulating layer on the source, the drain and the oxide semiconductor layer, and a word line on the gate insulating layer, wherein the word line, the oxide semiconductor layer, the ferroelectric dielectric layer and the write electrode overlapping each other in a direction vertical to the substrate.Type: GrantFiled: September 27, 2021Date of Patent: March 21, 2023Assignee: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Publication number: 20230071750Abstract: An oxide semiconductor based FRAM is provided in the present invention, including a substrate, a write electrode on the substrate, a ferroelectric dielectric layer on the write electrode, an oxide semiconductor layer on the ferroelectric dielectric layer, a source and a drain respectively on the oxide semiconductor layer and spaced apart at a distance, wherein the source and the drain are further connected to a plate line and a bit line respectively, a gate insulating layer on the source, the drain and the oxide semiconductor layer, and a word line on the gate insulating layer, wherein the word line, the oxide semiconductor layer, the ferroelectric dielectric layer and the write electrode overlapping each other in a direction vertical to the substrate.Type: ApplicationFiled: September 27, 2021Publication date: March 9, 2023Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Publication number: 20230038759Abstract: A ferroelectric memory structure including a first conductive line, a second conductive line, and a memory cell is provided. The second conductive line is disposed on the first conductive line. The memory cell is disposed between the first and second conductive lines. The memory cell includes a switch device and a ferroelectric capacitor structure. The switch device is disposed between the first and second conductive lines. The ferroelectric capacitor structure is disposed between the first conductive line and the switch device. The ferroelectric capacitor structure includes ferroelectric capacitors electrically connected. Each of the ferroelectric capacitors includes a first conductive layer, a second conductive layer, and a ferroelectric material layer. The second conductive layer is disposed on the first conductive layer. The ferroelectric material layer is disposed between the first conductive layer and the second conductive layer.Type: ApplicationFiled: August 16, 2021Publication date: February 9, 2023Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Shou-Zen Chang, Ming-Han Liao, Min-Cheng Chen, Hiroshi Yoshida
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Patent number: 10598658Abstract: A reduced graphene oxide-based biosensor includes a nano-structure field-effect transistor including a channel region which includes a reduced graphene oxide having a linking moiety to be bonded to a receptor specific to an analyte, and which is represented by a formula of —(C?O)—X—COOH, wherein X represents a C1-C3 alkenylene group or a C1-C3 alkylene group.Type: GrantFiled: November 16, 2015Date of Patent: March 24, 2020Assignee: Chang Gung UniversityInventors: Mu-Yi Hua, Hsiao-Chien Chen, Yi-Ting Chen, Rung-Ywan Tsai, Min-Cheng Chen, Chien-Lun Chen
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Patent number: 10446694Abstract: A field-effect transistor structure having two-dimensional transition metal dichalcogenides includes a substrate, a source/drain structure, a two-dimensional (2D) channel layer, and a gate layer. The source/drain structure is disposed on the substrate and has a surface higher than a surface of the substrate. The 2D channel layer is disposed on the source and the drain and covers the space between the source and the drain. The gate layer is disposed between the source and the drain and covers the 2D channel layer. The field-effect transistor having two-dimensional transition metal dichalcogenides is a planar field-effect transistor or a fin field-effect transistor.Type: GrantFiled: June 13, 2017Date of Patent: October 15, 2019Assignee: National Applied Research LaboratoriesInventors: Kai-Shin Li, Bo-Wei Wu, Min-Cheng Chen, Jia-Min Shieh, Wen-Kuan Yeh
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Publication number: 20180358474Abstract: A field-effect transistor structure having two-dimensional transition metal dichalcogenides includes a substrate, a source/drain structure, a two-dimensional (2D) channel layer, and a gate layer. The source/drain structure is disposed on the substrate and has a surface higher than a surface of the substrate. The 2D channel layer is disposed on the source and the drain and covers the space between the source and the drain. The gate layer is disposed between the source and the drain and covers the 2D channel layer. The field-effect transistor having two-dimensional transition metal dichalcogenides is a planar field-effect transistor or a fin field-effect transistor.Type: ApplicationFiled: June 13, 2017Publication date: December 13, 2018Inventors: Kai-Shin Li, Bo-Wei Wu, Min-Cheng Chen, Jia-Min Shieh, Wen-Kuan Yeh
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Publication number: 20160334399Abstract: A reduced graphene oxide-based biosensor includes a nano-structure field-effect transistor including a channel region which includes a reduced graphene oxide having a linking moiety to be bonded to a receptor specific to an analyte, and which is represented by a formula of —(C?O)—X—COOH, wherein X represents a C1-C3 alkenylene group or a C1-C3 alkylene group.Type: ApplicationFiled: November 16, 2015Publication date: November 17, 2016Inventors: Mu-Yi Hua, Hsiao-Chien Chen, Yi-Ting Chen, Rung-Ywan Tsai, Min-Cheng Chen, Chien-Lun Chen
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Publication number: 20150145068Abstract: The present invention relates to a method for fabricating FinFETs and the structure thereof. The present invention uses an additional mask to define regions forming semiconductor fins having high semiconductor-fin height. By making use of multiple etching processes of the insulating layer, structures with differences in the height of semiconductor fins are achieved. The method can be combined with current process for semiconductor-based FinFETs for overcoming effectively the problem of electron-channel-width quantization effect as well as improving the performance of FinFETs.Type: ApplicationFiled: April 30, 2014Publication date: May 28, 2015Applicant: NATIONAL APPLIED RESEARCH LABORATORIESInventors: MIN-CHENG CHEN, CHIA-HUA HO, FU-LIANG YANG
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Patent number: 8987071Abstract: A thin-film transistor comprises a semiconductor panel, a dielectric layer, a semiconductor film layer, a conduct layer, a source and a drain. The semiconductor panel comprises a base, an intra-dielectric layer, at least one metal wire layer and at least one via layer. The dielectric layer is stacked on the semiconductor panel. The semiconductor film layer is stacked on the dielectric layer. The conduct layer is formed on the semiconductor film layer. The source is formed on the via of the vias that is adjacent to and connects to the gate via. The drain is formed on another via of the vias that is adjacent to and connects to the gate via. A fabricating method for a thin-film transistor with metal-gates and nano-wires is also disclosed.Type: GrantFiled: December 16, 2013Date of Patent: March 24, 2015Assignee: National Applied Research LaboratoriesInventors: Min-Cheng Chen, Chang-Hsien Lin, Chia-Yi Lin, Tung-Yen Lai, Chia-Hua Ho
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Publication number: 20140131716Abstract: A memory device comprises a substrate, a tunnel oxide layer, a charge trapping layer, a block oxide layer, a plurality of conductive quantum dots, a metal gate and a source/drain structure. The tunnel oxide layer is disposed on the substrate and has a thickness substantially less than or equal to 2 nm. The charge trapping layer is disposed on the tunnel oxide layer. The quantum dots are embedded in the charge trapping layer. The block oxide layer is disposed on the charge trapping layer. The metal gate essentially consisting of aluminum (Al), copper (Cu), tantalum nitride (TiN), titanium nitride (TaN), aluminum-silicon-copper (Al—Si—Cu) alloys or the arbitrary combinations thereof is disposed on the block oxide layer. The source/drain structure is disposed in the substrate.Type: ApplicationFiled: January 18, 2013Publication date: May 15, 2014Applicant: NATIONAL APPLIED RESEARCH LABORATORIESInventors: Jia-Min Shieh, Yu-Chung Lien, Wen-Hsien Huang, Chang-Hong Shen, Min-Cheng Chen, Ci-Ling Pan
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Publication number: 20140099756Abstract: A thin-film transistor comprises a semiconductor panel, a dielectric layer, a semiconductor film layer, a conduct layer, a source and a drain. The semiconductor panel comprises a base, an intra-dielectric layer, at least one metal wire layer and at least one via layer. The dielectric layer is stacked on the semiconductor panel. The semiconductor film layer is stacked on the dielectric layer. The conduct layer is formed on the semiconductor film layer. The source is formed on the via of the vias that is adjacent to and connects to the gate via. The drain is formed on another via of the vias that is adjacent to and connects to the gate via. A fabricating method for a thin-film transistor with metal-gates and nano-wires is also disclosed.Type: ApplicationFiled: December 16, 2013Publication date: April 10, 2014Applicant: National Applied Research LaboratoriesInventors: Min-Cheng CHEN, Chang-Hsien LIN, Chia-Yi LIN, Tung-Yen LAI, Chia-Hua HO