Abstract: The present invention discloses a microwave heating system for desorbing contaminated soil, comprising: a feeding module; a heating cavity; a first microwave suppression cavity; a second microwave suppression cavity; a conveyor belt; a feeding device; and an exhaust module. The feeding device is arranged above the first microwave suppression cavity or the second microwave suppression cavity, and the feeding device contains a microwave absorber material. The invention further discloses a microwave heating process for desorption of polluted soil. With the microwave heating system and process for desorbing contaminated soil, the contaminated soil can be heated quickly and uniformly, and quickly cooled and taken out smoothly.

Abstract: A method for utilizing a dry film is provided. A dry film is pressed onto a substrate, such as a wafer. The dry film includes a photoresist layer tightly attached to the substrate and an exposed carrier film with light transmission. Before exposure and development, the carrier film of the dry film is cleaned in a darkroom, wherein the cleaning method may include a step of chemical spraying and a step of rinsing through DI water. Accordingly, the contaminant on the carrier film can be removed. In addition, the dry film burrs can be also removed. Thus, an excellent production yield for sequent exposure and development can be achieved.