Patents by Inventor Min-Choon Park

Min-Choon Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etchant composition for molybdenum and method of using same
    Publication number: 20010034139
    Abstract: An etchant composition for molybdenum includes: 5 to 20% by weight of hydrogen peroxide (H2O2); 75 to 94% by weight of water; and an additive including a pH controlling agent. The etching composition is particularly useful for the fabrication of semiconductor devices. Molybdenum may be etched from a substrate by applying the etchant composition, preferably by spraying or immersion, and preferably at a temperature range of 30° C. to 45° C.
    Type: Application
    Filed: March 9, 2001
    Publication date: October 25, 2001
    Inventors: Hyung-Soo Song, Ky-Sub Kim, Min-Choon Park, Sok-Joo Lee