Patents by Inventor Min Han HSU

Min Han HSU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11940388
    Abstract: Example methods are provided to improve placement of an adaptor (210,220) to a mobile computing device (100) to measure a test strip (221) coupled to the adaptor (220) with a camera (104) and a screen (108) on a face of the mobile computing device (100). The method may include displaying a light area on a first portion of the screen (108). The first portion may be adjacent to the camera (104). The light area and the camera (104) may be aligned with a key area of the test strip (221) so that the camera (104) is configured to capture an image of the key area. The method may further include providing first guiding information for a user to place the adaptor (210,220) to the mobile computing device (100) according to a position of the light area on the screen (108).
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: March 26, 2024
    Assignee: IXENSOR CO., LTD.
    Inventors: Yenyu Chen, An Cheng Chang, Tai I Chen, Su Tung Yang, Chih Jung Hsu, Chun Cheng Lin, Min Han Wang, Shih Hao Chiu
  • Patent number: 11929314
    Abstract: In some implementations, one or more semiconductor processing tools may form a metal cap on a metal gate. The one or more semiconductor processing tools may form one or more dielectric layers on the metal cap. The one or more semiconductor processing tools may form a recess to the metal cap within the one or more dielectric layers. The one or more semiconductor processing tools may perform a bottom-up deposition of metal material on the metal cap to form a metal plug within the recess and directly on the metal cap.
    Type: Grant
    Filed: March 12, 2021
    Date of Patent: March 12, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Hsien Huang, Peng-Fu Hsu, Yu-Syuan Cai, Min-Hsiu Hung, Chen-Yuan Kao, Ken-Yu Chang, Chun-I Tsai, Chia-Han Lai, Chih-Wei Chang, Ming-Hsing Tsai
  • Patent number: 11769669
    Abstract: The semiconductor device includes a semiconductor fin, and a gate stack over the semiconductor fin. The gate stack includes a gate dielectric layer over a channel region of the semiconductor fin, a work function material layer over the gate dielectric layer, wherein the work function material layer includes dopants, and a gate electrode layer over the work function material layer. The gate dielectric layer is free of the dopants.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: September 26, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Min Han Hsu, Jung-Chih Tsao
  • Publication number: 20220384195
    Abstract: A method of fabricating a semiconductor device includes forming a dummy gate structure over a semiconductor fin. The dummy gate structure includes a dummy gate stack and gate spacers along sidewalls of the dummy gate stack. The method further includes forming an inter-layer dielectric (ILD) layer surrounding the dummy gate structure, removing the dummy gate stack to provide an opening exposing a channel region of the semiconductor fin, depositing a gate dielectric layer over bottom and sidewalls of the opening and over the ILD layer, forming a doped work function material layer over the gate dielectric layer using an in-situ doping process, and depositing a gate electrode layer over the doped work function material layer.
    Type: Application
    Filed: August 10, 2022
    Publication date: December 1, 2022
    Inventors: Min Han HSU, Jung-Chih TSAO
  • Publication number: 20220384253
    Abstract: A method includes depositing a metallic hardmask over a dielectric layer. The method further includes etching a metallic hardmask opening in the metallic hardmask to expose a top surface of the dielectric layer. The method further includes modifying a sidewall of the metallic hardmask opening by adding non-metal atoms into the metallic hardmask. The method further includes depositing a conductive material in the metallic hardmask opening.
    Type: Application
    Filed: July 29, 2022
    Publication date: December 1, 2022
    Inventors: Min Han HSU, Chun-Chang CHEN, Jung-Chih TSAO
  • Patent number: 11450557
    Abstract: A method of making a dual damascene interconnect includes operations of depositing a metal hardmask over a dielectric layer; etching a metal hardmask opening in the metal hardmask to expose a top surface of the dielectric layer; etching at least one interconnect opening in the dielectric layer, to expose a top surface of a base conductive layer; modifying a sidewall of the metal hardmask opening; and depositing a conductive material in the metal hardmask opening and the at least one interconnect opening.
    Type: Grant
    Filed: February 26, 2020
    Date of Patent: September 20, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Min Han Hsu, Chun-Chang Chen, Jung-Chih Tsao
  • Publication number: 20220005697
    Abstract: The semiconductor device includes a semiconductor fin, and a gate stack over the semiconductor fin. The gate stack includes a gate dielectric layer over a channel region of the semiconductor fin, a work function material layer over the gate dielectric layer, wherein the work function material layer includes dopants, and a gate electrode layer over the work function material layer. The gate dielectric layer is free of the dopants.
    Type: Application
    Filed: February 2, 2021
    Publication date: January 6, 2022
    Inventors: Min Han HSU, Jung-Chih TSAO
  • Publication number: 20210210378
    Abstract: A method of making a dual damascene interconnect includes operations of depositing a metal hardmask over a dielectric layer; etching a metal hardmask opening in the metal hardmask to expose a top surface of the dielectric layer; etching at least one interconnect opening in the dielectric layer, to expose a top surface of a base conductive layer; modifying a sidewall of the metal hardmask opening; and depositing a conductive material in the metal hardmask opening and the at least one interconnect opening.
    Type: Application
    Filed: February 26, 2020
    Publication date: July 8, 2021
    Inventors: Min Han HSU, Chun-Chang CHEN, Jung-Chih TSAO