Abstract: The present disclosure relates to a ceramic susceptor and a method of manufacturing the same. The ceramic susceptor includes: a base substrate having a gas flow path configured to supply cooling gas; an insulating plate fixed on the base substrate and having a gas hole; and a pore structure to allow the gas flow path and the gas hole to communicate with each other between the base substrate and the insulating plate, the pore structure including a support fixed to a groove of the base substrate and having a communication hole configured to communicate with the gas flow path, a porous filter embedded between the communication hole and the gas hole on the support, and a fluid stopper disposed on an outer side surface of the support.

Abstract: The present disclosure relates to a method of manufacturing a susceptor. The present disclosure may provide a method of manufacturing a susceptor in which a cap-type bushing structure or tube structure is applied to a bonding structure of a base substrate and an insulating plate, so that the bonding structure can withstand or prevent the increase in pressure inside a gas flow path during a curing process, thereby preventing clogging of a gas hole in a high-power susceptor or the like for a high aspect ratio contact (HARC) processes, and minimizing the occurrence of arcing by reducing contamination around the gas hole. In addition, the present disclosure may also provide a susceptor manufactured by the method.

Abstract: The present disclosure relates to a method of manufacturing a susceptor. The present disclosure may provide a method of manufacturing a susceptor in which a cap-type bushing structure or tube structure is applied to a bonding structure of a base substrate and an insulating plate, so that the bonding structure can withstand or prevent the increase in pressure inside a gas flow path during a curing process, thereby preventing clogging of a gas hole in a high-power susceptor or the like for a high aspect ratio contact (HARC) processes, and minimizing the occurrence of arcing by reducing contamination around the gas hole. In addition, the present disclosure may also provide a susceptor manufactured by the method.

Abstract: The present disclosure provides a susceptor including a base member and an electrostatic chuck plate bonded to the base member by an adhesive layer, wherein the adhesive layer includes a plurality of spacers made of a first elastomer, and an adhesive made of a second elastomer, the adhesive filling a space between the spacers and bonding the base material and the electrostatic chuck plate to each other.