Patents by Inventor Min-Hsu Wang

Min-Hsu Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER LOADLOCK CHAMBER AND WAFER HOLDER
    Publication number: 20060182530
    Abstract: A wafer loadlock chamber includes a loadlock housing having at least a loading port, at least a loading door deposited on the outside of the loadlock housing, and at least a wafer holder deposited in the inside of the loadlock housing for loading a wafer. In addition, the wafer holder has at least a wafer shelf and a plurality of locators mounted on the wafer shelf. When the wafer is loaded on the wafer shelf, the bottom surface of the wafer only contacts the locators.
    Type: Application
    Filed: January 5, 2005
    Publication date: August 17, 2006
    Inventor: Min-Hsu Wang