Patents by Inventor Min-Hui LIN

Min-Hui LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10038000
    Abstract: A memory cell includes a selector, a fuse connected to the selector in series, a contact etch stop layer formed on the selector and the fuse, a bit line connected to the fuse, and a word line connected to the selector. The contact etch stop layer includes a high-k dielectric for improving the ability of capturing the electrons, thus the retention time of the memory cell is increased.
    Type: Grant
    Filed: September 17, 2015
    Date of Patent: July 31, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Yi Wu, Jian-Shin Tsai, Kuo-Hsien Cheng, Min-Hui Lin, Wei-Li Chen, Chao-Ching Chang, Chung-Yu Hsieh, Chin-Szu Lee
  • Publication number: 20180047682
    Abstract: A semiconductor device includes a substrate, a dielectric structure, a top metal layer and a bonding structure. The dielectric structure is disposed on the substrate. The top metal layer is disposed in the dielectric structure. The bonding structure is disposed on the dielectric structure and the top metal layer. The bonding structure includes a silicon oxide layer, a silicon oxy-nitride layer, a conductive bonding layer and a barrier layer. The silicon oxide layer is disposed on the dielectric structure. The silicon oxy-nitride layer covers the silicon oxide layer. The conductive bonding layer is disposed in the silicon oxide layer and the silicon oxy-nitride layer. The barrier layer covers a sidewall and a bottom of the conductive bonding layer.
    Type: Application
    Filed: August 15, 2016
    Publication date: February 15, 2018
    Inventors: Chao-Ching Chang, Sheng-Chan Li, Wen-Jen Tsai, Chih-Hui Huang, Jian-Shin Tsai, Cheng-Yi Wu, Yi-Ming Lin, Min-Hui Lin
  • Publication number: 20170250211
    Abstract: Semiconductor image sensor devices and manufacturing method of the same are disclosed. The semiconductor image sensor device includes a substrate, a first pixel and a second pixel, and an isolation structure. The first pixel and second pixel are disposed in the substrate, wherein the first and second pixels are neighboring pixels. The isolation structure is disposed in the substrate and between the first and second pixels, wherein the isolation structure includes a dielectric layer, and the dielectric layer includes silicon oxycarbonitride (SiOCN).
    Type: Application
    Filed: February 25, 2016
    Publication date: August 31, 2017
    Inventors: Chao-Ching Chang, Sheng-Chan Li, Chih-Hui Huang, Jian-Shin Tsai, Cheng-Yi Wu, Chia-Hsing Chou, Yi-Ming Lin, Min-Hui Lin, Chin-Szu Lee
  • Publication number: 20170207298
    Abstract: Semiconductor devices and manufacturing method thereof are disclosed. The semiconductor device includes a substrate, a device layer, first and second conductive layers, first and second vias, and a MIM capacitor structure. The substrate includes active and passive regions. The device layer is in the active region. The first conductive layer is over the device layer. The second conductive layer is over the first conductive layer, wherein the first conductive layer is disposed between the device layer and the second conductive layer. The first via electrically connects the first and the second conductive layers. The MIM capacitor structure is between the first and the second conductive layers and in the passive region, and includes first and second electrodes and a capacitor dielectric layer therebetween. The capacitor dielectric layer includes Group IIIA-metal oxide or nitride. The second via electrically connects the second conductive layer and one of the first and second electrodes.
    Type: Application
    Filed: January 15, 2016
    Publication date: July 20, 2017
    Inventors: Chao-Ching Chang, Cheng-Yi Wu, Jian-Shin Tsai, Min-Hui Lin, Yi-Ming Lin, Chin-Szu Lee, Wen-Shan Chang, Yi-Hui Chen
  • Publication number: 20170084620
    Abstract: A memory cell includes a selector, a fuse connected to the selector in series, a contact etch stop layer formed on the selector and the fuse, a bit line connected to the fuse, and a word line connected to the selector. The contact etch stop layer includes a high-k dielectric for improving the ability of capturing the electrons, thus the retention time of the memory cell is increased.
    Type: Application
    Filed: September 17, 2015
    Publication date: March 23, 2017
    Inventors: Cheng-Yi WU, Jian-Shin TSAI, Kuo-Hsien CHENG, Min-Hui LIN, Wei-Li CHEN, Chao-Ching CHANG, Chung-Yu HSIEH, Chin-Szu LEE
  • Publication number: 20150361547
    Abstract: A method and an apparatus for forming a cleaning a chemical vapor deposition (CVD) chamber are provided. The method includes providing a chemical vapor deposition (CVD) chamber. The method further includes introducing a remote plasma source into the CVD chamber. The method also includes performing a plasma cleaning process to the CVD chamber by applying a radio-frequency (RF) power in the CVD chamber.
    Type: Application
    Filed: June 13, 2014
    Publication date: December 17, 2015
    Inventors: Min-Hui LIN, Kuo-Hsien CHENG, Chia-Hsing CHOU, Miao-Cheng LIAO, Lai-Wan CHONG