Patents by Inventor Min-Hung Lee

Min-Hung Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11942546
    Abstract: A method includes forming an interfacial layer over a substrate; forming a quasi-antiferroelectric (QAFE) layer over the interfacial layer, in which forming the QAFE layer comprises performing an atomic layer deposition (ALD) cycle, and the ALD cycle includes performing a first sub-cycle for X time(s), in which the first sub-cycle comprises providing a Zr-containing precursor; performing a second sub-cycle for Y time(s), in which the second sub-cycle comprises providing a Hf-containing precursor; and performing a third sub-cycle for Z time(s), in which the third sub-cycle comprises providing a Zr-containing precursor, and in which X+Z is at least three times Y; and forming a gate electrode over the QAFE layer.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: March 26, 2024
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, NATIONAL TAIWAN NORMAL UNIVERSITY
    Inventors: Kuan-Ting Chen, Shu-Tong Chang, Min-Hung Lee
  • Publication number: 20240094834
    Abstract: An active stylus having physical writing function includes a tip shell including a first opening and a second opening, a first electrode including a first end protruded through the first opening of the tip shell and including a second end protruded through the second opening of the tip shell and entered a main body housing of the active stylus, wherein the first electrode includes conductive material. The tip shell includes non-conductive material. The first end of the first electrode is configured to leave colored traces on an object by physical friction caused between the first end of the first electrode and the object.
    Type: Application
    Filed: July 27, 2023
    Publication date: March 21, 2024
    Inventors: Shih-Yen LEE, Tzu-Yu TING, Yeh Sen-Fan CHUEH, Min-Hung LIN, Shih-Hsiung HSIAO
  • Publication number: 20230422515
    Abstract: An integrated circuit device includes a substrate and a memory device. The memory device is over the substrate. The memory device includes a bottom electrode, a dielectric layer, an antiferroelectric layer, and a top electrode. The dielectric layer is over the bottom electrode. The antiferroelectric layer is over the dielectric layer. The top electrode is over the antiferroelectric layer.
    Type: Application
    Filed: June 24, 2022
    Publication date: December 28, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, National Taiwan Normal University
    Inventors: Kuo-Yu HSIANG, Chun-Yu LIAO, Jen-Ho LIU, Min-Hung LEE
  • Publication number: 20230363170
    Abstract: A method includes forming a semiconductor layer over a substrate; depositing a first ferroelectric layer over a channel region of the semiconductor layer; depositing a first dielectric layer over the first ferroelectric layer; depositing a second ferroelectric layer over the first dielectric layer; depositing a gate metal layer over the second ferroelectric layer; patterning the gate metal layer, the second ferroelectric layer, the first dielectric layer, and the first ferroelectric layer to form a gate structure; and forming source/drain regions in the semiconductor layer and on opposite sides of the gate structure.
    Type: Application
    Filed: May 9, 2022
    Publication date: November 9, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, National Taiwan Normal University
    Inventors: Kuan-Ting CHEN, Chun-Yu LIAO, Kuo-Yu HSIANG, Yun-Fang CHUNG, Min-Hung LEE, Shu-Tong CHANG
  • Publication number: 20220359762
    Abstract: A semiconductor device includes a substrate, a gate structure over the substrate, and source/drain regions in the substrate and on opposite sides of the gate structure. The gate structure includes an interfacial layer, a quasi-antiferroelectric (QAFE) layer over the interfacial layer, and a gate electrode over the QAFE layer. The QAFE layer includes Hf1?xZrxO2, in which x is greater than 0.5 and is lower than 1.
    Type: Application
    Filed: July 26, 2022
    Publication date: November 10, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, National Taiwan Normal University
    Inventors: Kuan-Ting CHEN, Shu-Tong CHANG, Min-Hung LEE
  • Publication number: 20220181494
    Abstract: A method includes forming an interfacial layer over a substrate; forming a quasi-antiferroelectric (QAFE) layer over the interfacial layer, in which forming the QAFE layer comprises performing an atomic layer deposition (ALD) cycle, and the ALD cycle includes performing a first sub-cycle for X time(s), in which the first sub-cycle comprises providing a Zr-containing precursor; performing a second sub-cycle for Y time(s), in which the second sub-cycle comprises providing a Hf-containing precursor; and performing a third sub-cycle for Z time(s), in which the third sub-cycle comprises providing a Zr-containing precursor, and in which X+Z is at least three times Y; and forming a gate electrode over the QAFE layer.
    Type: Application
    Filed: December 3, 2020
    Publication date: June 9, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITY, National Taiwan Normal University
    Inventors: Kuan-Ting Chen, Shu-Tong Chang, Min-Hung Lee
  • Patent number: 10686072
    Abstract: A semiconductor device includes a source and a drain and a channel disposed between the source and the drain, a first gate dielectric layer disposed on the channel, a first gate electrode disposed on the first gate dielectric layer, a second gate dielectric layer disposed on the first gate electrode, and a second gate electrode disposed on the second gate dielectric layer. The second gate dielectric layer is made of a ferroelectric material. A first area of a bottom surface of the first gate electrode which is in contact with the first gate dielectric layer where the is greater than a second area of a bottom surface of the second gate dielectric layer which is in contact with the first gate electrode.
    Type: Grant
    Filed: March 2, 2017
    Date of Patent: June 16, 2020
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Yu-Hung Liao, Samuel C. Pan, Sheng-Ting Fan, Min-Hung Lee, Chee-Wee Liu
  • Publication number: 20180190853
    Abstract: A Heterojunction with Intrinsic Thin layer (HIT) solar cell has a crystalline Si substrate, an intrinsic amorphous Si layer, a doped amorphous Si layer, a transparent conductive layer and two electrode layers. The intrinsic amorphous Si layer disposed between the doped amorphous Si layer and the crystalline silicon substrate contacts the doped amorphous Si layer and the crystalline silicon substrate. Each of the intrinsic amorphous Si layer and the doped amorphous Si layer has the thickness less than 50 nm. The intrinsic amorphous Si layer and the doped amorphous Si layer are both made by electron beam evaporation. The transparent conductive layer is formed on the doped amorphous Si layer. The two electrode layers are formed on the transparent conductive layer and the crystalline silicon substrate respectively. The crystalline silicon substrate is disposed between the two electrode layers.
    Type: Application
    Filed: December 19, 2017
    Publication date: July 5, 2018
    Inventors: MIN-HUNG LEE, CHIH-YU CHEN, GING-RUE LIOU, SHU-TONG CHANG
  • Publication number: 20180166582
    Abstract: A semiconductor device includes a source and a drain and a channel disposed between the source and the drain, a first gate dielectric layer disposed on the channel, a first gate electrode disposed on the first gate dielectric layer, a second gate dielectric layer disposed on the first gate electrode, and a second gate electrode disposed on the second gate dielectric layer. The second gate dielectric layer is made of a ferroelectric material. A first area of a bottom surface of the first gate electrode which is in contact with the first gate dielectric layer where the is greater than a second area of a bottom surface of the second gate dielectric layer which is in contact with the first gate electrode.
    Type: Application
    Filed: March 2, 2017
    Publication date: June 14, 2018
    Inventors: Yu-Hung LIAO, Samuel C. PAN, Sheng-Ting FAN, Min-Hung LEE, Chee-Wee LIU
  • Patent number: 9978868
    Abstract: The present disclosure provides a semiconductor device in accordance with some embodiments. The semiconductor device includes a substrate; a gate stack over the substrate. The gate stack includes a ferroelectric layer; a first dielectric material layer; and a first conductive layer. One of the first dielectric material layer and the ferroelectric layer is electrically charged to form a charged layer with fixed charge. The semiconductor device further includes source and drain features formed on the substrate and disposed on sides of the gate stack.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: May 22, 2018
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Der-Chuan Lai, Samuel C Pan, Yu-Cheng Shen, Min-Hung Lee, Chee-Wee Liu
  • Patent number: 9768030
    Abstract: A Tunnel Field-Effect Transistor (TFET) includes a source region in a semiconductor substrate, and a drain region in the semiconductor substrate. The source region and the drain region are of opposite conductivity types. The TFET further includes a gate stack over the semiconductor substrate, with the source region and the drain region extending to opposite sides of the gate stack. The gate stack includes a gate dielectric over the semiconductor substrate, and a ferroelectric layer over the gate dielectric.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: September 19, 2017
    Assignees: Taiwan Semiconductor Manufacturing Company, Ltd., National Taiwan University
    Inventor: Min-Hung Lee
  • Publication number: 20170141235
    Abstract: The present disclosure provides a semiconductor device in accordance with some embodiments. The semiconductor device includes a substrate; a gate stack over the substrate. The gate stack includes a ferroelectric layer; a first dielectric material layer; and a first conductive layer. One of the first dielectric material layer and the ferroelectric layer is electrically charged to form a charged layer with fixed charge. The semiconductor device further includes source and drain features formed on the substrate and disposed on sides of the gate stack.
    Type: Application
    Filed: November 16, 2015
    Publication date: May 18, 2017
    Inventors: Der-Chuan Lai, Samuel C. Pan, Yu-Cheng Shen, Min-Hung Lee, Chee-Wee Liu
  • Publication number: 20160308021
    Abstract: A Tunnel Field-Effect Transistor (TFET) includes a source region in a semiconductor substrate, and a drain region in the semiconductor substrate. The source region and the drain region are of opposite conductivity types. The TFET further includes a gate stack over the semiconductor substrate, with the source region and the drain region extending to opposite sides of the gate stack. The gate stack includes a gate dielectric over the semiconductor substrate, and a ferroelectric layer over the gate dielectric.
    Type: Application
    Filed: June 28, 2016
    Publication date: October 20, 2016
    Inventor: Min-Hung Lee
  • Patent number: 9391162
    Abstract: A Tunnel Field-Effect Transistor (TFET) includes a source region in a semiconductor substrate, and a drain region in the semiconductor substrate. The source region and the drain region are of opposite conductivity types. The TFET further includes a gate stack over the semiconductor substrate, with the source region and the drain region extending to opposite sides of the gate stack. The gate stack includes a gate dielectric over the semiconductor substrate, and a ferroelectric layer over the gate dielectric.
    Type: Grant
    Filed: April 4, 2014
    Date of Patent: July 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Min-Hung Lee
  • Publication number: 20150287802
    Abstract: A Tunnel Field-Effect Transistor (TFET) includes a source region in a semiconductor substrate, and a drain region in the semiconductor substrate. The source region and the drain region are of opposite conductivity types. The TFET further includes a gate stack over the semiconductor substrate, with the source region and the drain region extending to opposite sides of the gate stack. The gate stack includes a gate dielectric over the semiconductor substrate, and a ferroelectric layer over the gate dielectric.
    Type: Application
    Filed: April 4, 2014
    Publication date: October 8, 2015
    Applicants: National Taiwan University, Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Min-Hung Lee
  • Patent number: 7868314
    Abstract: A phase change memory device and fabricating method are provided. A disk-shaped phase change layer is buried within the insulating material. A center via and ring via are formed by a lithography. The center via is located in the center of the phase change layer and passes through the phase change layer, and the ring via takes the center via as a center. A heating electrode within the center via performs Joule heating of the phase change layer, and the contact area between the phase change layer and the heating electrode is reduced by controlling the thickness of the phase change layer. Furthermore, a second electrode within the ring via dissipates the heat transmitted to the contact interface between the phase change layers, so as to avoid transmitting the heat to the etching boundary at the periphery of the phase change layer.
    Type: Grant
    Filed: August 26, 2009
    Date of Patent: January 11, 2011
    Assignee: Industrial Technology Research Institute
    Inventors: Wei-Su Chen, Yi-Chan Chen, Wen-Han Wang, Hong-Hui Hsu, Chien-Min Lee, Yen Chuo, Te-Sheng Chao, Min-Hung Lee
  • Patent number: 7835177
    Abstract: A phase change memory (PCM) cell fabricated by etching a tapered structure into a phase change layer, and planarizing a dielectric layer on the phase change layer until a tip of the tapered structure is exposed for contacting a heating electrode. Therefore, the area of the exposed tip of the phase change layer is controlled to be of an extremely small size, the contact area between the phase change layer and the heating electrode is reduced, thereby lowering the operation current.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: November 16, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: Hong-Hui Hsu, Chien-Min Lee, Wen-Han Wang, Min-Hung Lee, Te-Sheng Chao, Yen Chuo, Yi-Chan Chen, Wei-Su Chen
  • Patent number: 7741169
    Abstract: The present invention provides a complementary metal-oxide-semiconductor (CMOS) device and a fabrication method thereof. The CMOSFET device includes a compressively strained SiGe channel for a PMOSFET, as well as a tensile strained Si channel for an NMOSFET, thereby enhancing hole and electron mobility for the PMOSFET and the NMOSFET, respectively. As such, the threshold voltages of the two types of transistors can be obtained in oppositely symmetric by single metal gate.
    Type: Grant
    Filed: August 4, 2008
    Date of Patent: June 22, 2010
    Assignee: Industrial Technology Research Institute
    Inventors: Shin-Chii Lu, Yu-Ming Lin, Min-Hung Lee, Zing-Way Pei, Wen Yi Hsieh
  • Publication number: 20100140583
    Abstract: A phase change memory device and fabricating method are provided. A disk-shaped phase change layer is buried within the insulating material. A center via and ring via are formed by a lithography. The center via is located in the center of the phase change layer and passes through the phase change layer, and the ring via takes the center via as a center. A heating electrode within the center via performs Joule heating of the phase change layer, and the contact area between the phase change layer and the heating electrode is reduced by controlling the thickness of the phase change layer. Furthermore, a second electrode within the ring via dissipates the heat transmitted to the contact interface between the phase change layers, so as to avoid transmitting the heat to the etching boundary at the periphery of the phase change layer.
    Type: Application
    Filed: August 26, 2009
    Publication date: June 10, 2010
    Applicant: Industrial Technology Research Institute
    Inventors: Wei-Su Chen, Yi-Chan Chen, Wen-Han Wang, Hong-Hui Hsu, Chien-Min Lee, Yen Chuo, Te-Sheng Chao, Min-Hung Lee
  • Publication number: 20090302349
    Abstract: A strained germanium field effect transistor (FET) and method of fabricating the same is related to the strained Ge field effect transistor with a thin and pure Ge layer as a carrier channel. The pure Ge layer with the thickness between 1 nm and 10 nm is formed between an unstrained substrate and a gate insulation layer, and directly contacts with the unstrained substrate. The gate is disposed on the gate insulation layer. The germanium layer is used as a carrier transport channel of the strained Ge FET to improve the drive current and the carrier mobility, and to increase the devices performance effectively. Furthermore, a Si protective layer with extremely thin thickness can be deposed between and directly contacts with the gate insulation layer and the pure Ge layer.
    Type: Application
    Filed: August 12, 2009
    Publication date: December 10, 2009
    Applicant: Industrial Technology Research Institute
    Inventors: Min Hung Lee, Cheng Yeh Yu, Chee Wee Liu