Abstract: The present invention provides a cell or stack for evaluating the performance of a fuel cell and a method of evaluating the performance of the fuel cell using the cell or stack, in which a semiconductor thermoelectric device, attached to the side surface of the unit cell or stack of the fuel cell, is provided so as to evaluate the performance of the fuel cell in an environment in which temperature is maintained at a uniform temperature. According to the present invention, the temperatures of an anode and a cathode of the fuel cell can be precisely changed or maintained. Further, the performance of the fuel cell can also be measured in sub-zero temperature conditions without requiring a separate environmental chamber. A rate of temperature decrease, at which the temperature decreases to a certain sub-zero temperature, or a rate of temperature increase can be precisely controlled.

Abstract: A plasma doping method includes providing a substrate including a layer to be doped inside a chamber, and supplying first and second source gases to the layer to achieve a desired doping concentration. The first source gas includes a component configured to increase a thickness of the layer, and the second gas includes a component configured to reduce a thickness of the layer.