Abstract: A method for selectively performing a full bridge control and a half bridge control in a WPT system using an LCCL-S resonant network may include: performing the full bridge control by controlling the switches not connected in series of the full bridge inverter to operate simultaneously; calculating a coupling coefficient of the WPT system; determining whether it is possible to switch the full bridge control to the half bridge control based on the calculated coupling coefficient; in response to determining that it is possible to switch the full bridge control to the half bridge control, calculating a load of the WPT system; and performing the half bridge control for the full bridge inverter based on the calculated load.

Abstract: A motor driving device is disclosed. The motor driving device includes: a rectifier rectifying alternating current (AC) power into direct current (DC) power to output an input voltage; a first buck-boost converter including a plurality of switches for converting the input voltage and having a buck mode of stepping down the input voltage and a boost mode of stepping up the input voltage; an inverter converting a DC-link voltage transformed from the first buck-boost converter into an AC voltage and transferring the AC voltage to a motor; and a controller receiving motor information related to driving of the motor, comparing magnitudes of a desired DC-link voltage depending on the received motor information and the input voltage with each other, and performing a control to switch only any one of the plurality of switches so that the first buck-boost converter is operated in the buck mode or the boost mode.

Abstract: A foreign object detection apparatus using a mobile laser in a wireless power transfer (WPT) system may comprise a laser transmitting part installed on one side of an upper portion of a transmission pad to generate a laser; a laser receiving part installed on an opposite side to the one side, and receiving the laser generated by the laser transmitting part; and a laser moving part for moving the laser transmitting part and the laser receiving part along the one side or the opposite side of the transmission pad.

Abstract: The present invention discloses a composite material separation plate for a fuel cell and a method for manufacturing the same. The disclosed composite material separation plate for a fuel cell according to the present invention is a composite material separation plate for a fuel cell including carbon materials covered with a polymer matrix, and is characterized in that the carbon materials are exposed to the surface of the composite material separation plate. Therefore, the present invention is advantageous in that the physical contact between a sacrificial layer, which is made of a soft material, and the separation plate exposes the carbon materials of the separation plate, thereby lowering the electric contact resistance of the separation plate.

Abstract: A reception pad for a wireless power transfer (WPT) system includes: a plate-shaped ferrite; an insulating layer disposed on one side of the ferrite; a first coil layer disposed on the insulating layer; an interlayer insulating layer disposed on the first coil layer; and a second coil layer disposed on the interlayer insulating layer. The insulating layer at least partially surrounds the first coil layer and the second coil layer, the first coil layer and the second coil layer at least partially overlap each other and are arranged in a rectangular ring form on the one side of the ferrite, and a ratio of a width which is larger between a first width of the first coil layer and a second width of the second coil layer to a first length of the ferrite in a width direction corresponding to the first width or the second width is 0.14 to 0.15.

Abstract: A method of measuring an overlay offset using a scanning electron microscope system includes: scanning an in-cell region, which includes a lower structure and an upper structure stacked in a sample, using a primary electron beam with a landing energy of at least 10 kV; detecting electrons emitted from the scanned in-cell region; and measuring an overlay offset with respect to overlapping patterns included in the in-cell region using an image of the in-cell region that is generated based on the detected electrons emitted from the scanned in-cell region.

Abstract: A wireless power transfer (WPT) control method using an object detection sensor, performed at a WPT apparatus, may include detecting whether or not an object exists between a transmission pad and a reception pad mounted on an electric vehicle (EV) using an object detection sensor; in response to detecting that an object does not exist between the transmission pad and the reception pad, controlling the transmission pad to perform WPT to the reception pad; and in response to detecting that an object exists between the transmission pad and the reception pad, generating ultrasonic waves using an ultrasonic wave generator.

Abstract: An apparatus and method of forming an epitaxial layer are provided. The apparatus includes a process chamber in which an epitaxial process is performed to form epitaxial layer on a substrate. A first supplier supplies source gases for the epitaxial layer into the process chamber. A second supplier supplies dopants into the process chamber. A detector detects a composition ratio of the epitaxial layer and a concentration of the dopants in the epitaxial layer during the epitaxial growth process. And a controller controls a mass flow of at least one of the source gases and a mass flow of the dopants in-line with the epitaxial growth process. Accordingly, the layer thickness of the epitaxial layer can be accurately controlled in real time in line with the epitaxial process.

Abstract: A motor driving device is disclosed. The motor driving device includes: a rectifier rectifying alternating current (AC) power into direct current (DC) power to output an input voltage; a first buck-boost converter including a plurality of switches for converting the input voltage and having a buck mode of stepping down the input voltage and a boost mode of stepping up the input voltage; an inverter converting a DC-link voltage transformed from the first buck-boost converter into an AC voltage and transferring the AC voltage to a motor; and a controller receiving motor information related to driving of the motor, comparing magnitudes of a desired DC-link voltage depending on the received motor information and the input voltage with each other, and performing a control to switch only any one of the plurality of switches so that the first buck-boost converter is operated in the buck mode or the boost mode.

Abstract: A primary coil circuit of a ground assembly for wirelessly transferring power to a secondary coil includes: a primary coil magnetically coupled to the secondary coil and having a first terminal and a second terminal; a second capacitor having a first terminal and a second terminal connected to the first terminal of the primary coil; a first inductor having a first terminal coupled to a first input terminal of a power source and a second terminal coupled to the first terminal of the second capacitor; and a first capacitor having a first terminal coupled commonly to the second terminal of the first inductor and the first terminal of the second capacitor and a second terminal coupled commonly to the second terminal of the primary coil and a second input terminal of the power source.

Abstract: A wireless power transmission pad for transmitting wireless power to a reception pad including a secondary coil includes: a rectangular-shaped primary coil having an X-width defined in an x-direction and a Y-width defined in a y-direction and having a central space; a ferrite coupled to the primary coil; and a housing supporting the primary coil and the ferrite. A first cross-sectional area of a first portion including the X-width of the primary coil is smaller than a second cross-sectional area of a second portion including the Y-width of the primary coil.

Abstract: A structure analysis method using a scanning electron microscope includes irradiating a sample with an electron beam having a first landing energy to obtain a first image at a first depth of the sample and accelerating the electron beam to have a second landing energy higher than the first landing energy to obtain a second image at a second depth of the sample.

Abstract: A spatial image having 2D spatial information is obtained from a surface of a sample by an image creating method. The surface of the sample is milled to obtain an elemental image having material information from the milled surface. The spatial image and the elemental image are composed to form a 2D spatial/elemental image.

Abstract: A spatial image having 2D spatial information is obtained from a surface of a sample by an image creating method. The surface of the sample is milled to obtain an elemental image having material information from the milled surface. The spatial image and the elemental image are composed to form a 2D spatial/elemental image.

Abstract: An apparatus and method of forming an epitaxial layer are provided. The apparatus includes a process chamber in which an epitaxial process is performed to form epitaxial layer on a substrate. A first supplier supplies source gases for the epitaxial layer into the process chamber. A second supplier supplies dopants into the process chamber. A detector detects a composition ratio of the epitaxial layer and a concentration of the dopants in the epitaxial layer during the epitaxial growth process. And a controller controls a mass flow of at least one of the source gases and a mass flow of the dopants in-line with the epitaxial growth process. Accordingly, the layer thickness of the epitaxial layer can be accurately controlled in real time in line with the epitaxial process.

Abstract: Microelectronic substrate inspection equipment includes a gas container which contains helium gas, a helium ion generator which is disposed in the gas container and converts the helium gas into helium ions and a wafer stage which is disposed under the gas container and on which a substrate to be inspected is placed. The equipment further includes a secondary electron detector which is disposed above the wafer stage and detects electrons generated from the substrate, a compressor which receives first gaseous nitrogen from a continuous nitrogen supply device and compresses the received first gaseous nitrogen into liquid nitrogen, a liquid nitrogen dewar which is connected to the compressor and stores the liquid nitrogen, and a cooling device that is coupled to the helium ion generator. The cooling device is disposed on the gas container, and cools the helium ion generator by vaporizing the liquid nitrogen received from the liquid nitrogen dewar into second gaseous nitrogen. Related methods are also disclosed.

Abstract: A method of measuring an overlay offset using a scanning electron microscope system includes: scanning an in-cell region, which includes a lower structure and an upper structure stacked in a sample, using a primary electron beam with a landing energy of at least 10 kV; detecting electrons emitted from the scanned in-cell region; and measuring an overlay offset with respect to overlapping patterns included in the in-cell region using an image of the in-cell region that is generated based on the detected electrons emitted from the scanned in-cell region.

Abstract: A broadband light illuminator of an optical inspector for optically detecting defects of an inspection object may include an electrode-less chamber including a plasma area from which broadband light is generated; a first energy provider, exterior to the chamber, configured to provide first energy for ionizing high pressure gases to form ionized gases in the chamber; a second energy provider, exterior to the chamber, configured to provide second energy for transforming the ionized gases into a plasma state to form the plasma area at a central portion of the chamber; an elliptical reflector having a first focus at which the chamber is positioned and a second focus such that the broadband light is reflected from the elliptical reflector toward the second focus; and a lens unit focusing the reflected broadband light onto the inspection object to form an inspection light for detecting the defects of the inspection object.

Abstract: Microelectronic substrate inspection equipment includes a gas container which contains helium gas, a helium ion generator which is disposed in the gas container and converts the helium gas into helium ions and a wafer stage which is disposed under the gas container and on which a substrate to be inspected is placed. The equipment further includes a secondary electron detector which is disposed above the wafer stage and detects electrons generated from the substrate, a compressor which receives first gaseous nitrogen from a continuous nitrogen supply device and compresses the received first gaseous nitrogen into liquid nitrogen, a liquid nitrogen dewar which is connected to the compressor and stores the liquid nitrogen, and a cooling device that is coupled to the helium ion generator. The cooling device is disposed on the gas container, and cools the helium ion generator by vaporizing the liquid nitrogen received from the liquid nitrogen dewar into second gaseous nitrogen. Related methods are also disclosed.

Abstract: Microelectronic substrate inspection equipment includes a gas container which contains helium gas, a helium ion generator which is disposed in the gas container and converts the helium gas into helium ions and a wafer stage which is disposed under the gas container and on which a substrate to be inspected is placed. The equipment further includes a secondary electron detector which is disposed above the wafer stage and detects electrons generated from the substrate, a compressor which receives first gaseous nitrogen from a continuous nitrogen supply device and compresses the received first gaseous nitrogen into liquid nitrogen, a liquid nitrogen dewar which is connected to the compressor and stores the liquid nitrogen, and a cooling device that is coupled to the helium ion generator. The cooling device is disposed on the gas container, and cools the helium ion generator by vaporizing the liquid nitrogen. Related methods are also disclosed.