Patents by Inventor Min-Kuei Chu
Min-Kuei Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7875335Abstract: The present invention provides a polishing pad. The polishing pad comprises a transparent part and a high molecular weight layer. The transparent part has an uneven side surface and the profile of the uneven side surface is selected from a group consisting of a serrated shape, a wavy shape and a toothed shape. The high molecular weight layer encircles the transparent part.Type: GrantFiled: April 24, 2006Date of Patent: January 25, 2011Assignee: IV Technologies Co., Ltd.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Publication number: 20080102741Abstract: A foamed plastic is cut to form a single-layer polishing pad having a desired rigidity and compressibility. A polishing surface of the polishing pad has a higher density than a mounting surface of the polishing pad. The polishing surface and the mounting surface may have different areas having different densities for achieving desired rigidity and compressibility property. Furthermore, methods of making such single-layer polishing pads are also disclosed.Type: ApplicationFiled: December 26, 2007Publication date: May 1, 2008Applicant: IV TECHNOLOGIES CO., LTD.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Patent number: 7335094Abstract: A foamed plastic is cut to form a single-layer polishing pad having a desired rigidity and compressibility. A polishing surface of the polishing pad has a higher density than a mounting surface of the polishing pad. The polishing surface and the mounting surface may have different areas having different densities for achieving desired rigidity and compressibility property. Furthermore, methods of making such single-layer polishing pads are also disclosed.Type: GrantFiled: July 22, 2006Date of Patent: February 26, 2008Assignee: IV Technologies Co., Ltd.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Patent number: 7285233Abstract: A method of manufacturing a polishing pad is described. A mold having a mold cavity therein is provided. At least a strip is buried in the mold. A polymer foam material is injected into the mold cavity of the mold. The polymer foam material is cured to mold the polymer foam material into a molding polymer article. A mold release process is performed to obtain the molding polymer article. The strip on the molding article is removed to form a polishing pad having at least one groove thereon.Type: GrantFiled: January 10, 2006Date of Patent: October 23, 2007Assignee: IV Technologies Co., Ltd.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Patent number: 7258602Abstract: A polishing pad having grooved window therein is provided. The polishing pad comprises a polishing layer and a window, wherein the polishing layer has at least one first groove therein and the window has at least one second groove therein. More particularly, the first groove is deeper than the second groove. The polishing pad having a grooved window therein has advantages of providing precise endpoint detection and thereby reducing or resolving defect problems.Type: GrantFiled: September 24, 2004Date of Patent: August 21, 2007Assignee: IV Technologies Co., Ltd.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Patent number: 7241408Abstract: The present invention provides a method of fabricating a polishing pad having a detection window thereon. A mold having a cavity therein and a transparent thermosetting plastic part that is incompletely hardened are provided. The transparent thermosetting plastic part is disposed in the mold and a high molecular weight foam is injected into the cavity of the mold. The transparent thermosetting plastic part and the high molecular weight foam are hardened at the same time. After the step of demolding is performed, a polishing pad having a detection window thereon is formed. Moreover, the transparent thermosetting plastic part can be designed to have the central portion thicker than its peripheral portion for preventing deformation that is caused by the material difference of the detection window and other portions of the polishing pad.Type: GrantFiled: April 24, 2006Date of Patent: July 10, 2007Assignee: I.V. Technologies Co., Ltd.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Publication number: 20060258277Abstract: A foamed plastic is cut to form a single-layer polishing pad having a desired rigidity and compressibility. A polishing surface of the polishing pad has a higher density than a mounting surface of the polishing pad. The polishing surface and the mounting surface may have different areas having different densities for achieving desired rigidity and compressibility property. Furthermore, methods of making such single-layer polishing pads are also disclosed.Type: ApplicationFiled: July 22, 2006Publication date: November 16, 2006Applicant: IV TECHNOLOGIES CO., LTD.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Patent number: 7131901Abstract: A polishing pad having a polishing surface, a back surface and a sidewall is provided. The sidewall is connected to the polishing surface and the back surface. The polishing pad includes a polishing region and a region neighboring to the polishing region. Wherein, at least one stress buffer pattern is designed in the neighboring region. The stress buffer pattern is formed to buffer the stress created during a polishing process to prevent the region from being protruded and thus prevent the surface of the region, once protruded, from rubbing against the wafer carrier to generate particles, so that contamination of the surface of the wafers can be avoided. On the other hand, at least one cambered surface can be designed on the sidewall of the polishing pad to prevent the sidewall from rubbing against the wafer carrier to generate particles, so that contamination can be avoided.Type: GrantFiled: September 29, 2004Date of Patent: November 7, 2006Assignee: IV Technologies Co., Ltd.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Patent number: 7132070Abstract: A method of manufacturing a polishing pad is described. A mold having a mold cavity therein is provided. At least a strip is buried in the mold. A polymer foam material is injected into the mold cavity of the mold. The polymer foam material is cured to mold the polymer foam material into a molding polymer article. A mold release process is performed to obtain the molding polymer article. The strip on the molding article is removed to form a polishing pad having at least one groove thereon.Type: GrantFiled: May 14, 2003Date of Patent: November 7, 2006Assignee: IV Technologies, Co., Ltd.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Publication number: 20060198992Abstract: The present invention provides a polishing pad. The polishing pad comprises a transparent part and a high molecular weight layer. The transparent part has an uneven side surface and the profile of the uneven side surface is selected from a group consisting of a serrated shape, a wavy shape and a toothed shape. The high molecular weight layer encircles the transparent part.Type: ApplicationFiled: April 24, 2006Publication date: September 7, 2006Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Publication number: 20060197249Abstract: The present invention provides a method of fabricating a polishing pad having a detection window thereon. A mold having a cavity therein and a transparent thermosetting plastic part that is incompletely hardened are provided. The transparent thermosetting plastic part is disposed in the mold and a high molecular weight foam is injected into the cavity of the mold. The transparent thermosetting plastic part and the high molecular weight foam are hardened at the same time. After the step of demolding is performed, a polishing pad having a detection window thereon is formed. Moreover, the transparent thermosetting plastic part can be designed to have the central portion thicker than its peripheral portion for preventing deformation that is caused by the material difference of the detection window and other portions of the polishing pad.Type: ApplicationFiled: April 24, 2006Publication date: September 7, 2006Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Patent number: 7101501Abstract: A foamed plastic is cut to form a single-layer polishing pad having a desired rigidity and compressibility. A polishing surface of the polishing pad has a higher density than a mounting surface of the polishing pad. The polishing surface and the mounting surface may have different areas having different densities for achieving desired rigidity and compressibility property. Furthermore, methods of making such single-layer polishing pads are also disclosed.Type: GrantFiled: May 3, 2005Date of Patent: September 5, 2006Assignee: IV Technologies Co., Ltd.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Publication number: 20060113705Abstract: A method of manufacturing a polishing pad is described. A mold having a mold cavity therein is provided. At least a strip is buried in the mold. A polymer foam material is injected into the mold cavity of the mold. The polymer foam material is cured to mold the polymer foam material into a molding polymer article. A mold release process is performed to obtain the molding polymer article. The strip on the molding article is removed to form a polishing pad having at least one groove thereon.Type: ApplicationFiled: January 11, 2006Publication date: June 1, 2006Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Publication number: 20050250431Abstract: A foamed plastic is cut to form a single-layer polishing pad having a desired rigidity and compressibility. A polishing surface of the polishing pad has a higher density than a mounting surface of the polishing pad. The polishing surface and the mounting surface may have different areas having different densities for achieving desired rigidity and compressibility property. Furthermore, methods of making such single-layer polishing pads are also disclosed.Type: ApplicationFiled: May 3, 2005Publication date: November 10, 2005Applicant: IV TECHNOLOGIES CO., LTD.Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Publication number: 20050090187Abstract: A polishing pad having grooved window therein is provided. The polishing pad comprises a polishing layer and a window, wherein the polishing layer has at least one first groove therein and the window has at least one second groove therein. More particularly, the first groove is deeper than the second groove. The polishing pad having a grooved window therein has advantages of providing precise endpoint detection and thereby reducing or resolving defect problems.Type: ApplicationFiled: September 24, 2004Publication date: April 28, 2005Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Publication number: 20050070217Abstract: A polishing pad having a polishing surface, a back surface and a sidewall is provided. The sidewall is connected to the polishing surface and the back surface. The polishing pad includes a polishing region and a region neighboring to the polishing region. Wherein, at least one stress buffer pattern is designed in the neighboring region. The stress buffer pattern is formed to buffer the stress created during a polishing process to prevent the region from being protruded and thus prevent the surface of the region, once protruded, from rubbing against the wafer carrier to generate particles, so that contamination of the surface of the wafers can be avoided. On the other hand, at least one cambered surface can be designed on the sidewall of the polishing pad to prevent the sidewall from rubbing against the wafer carrier to generate particles, so that contamination can be avoided.Type: ApplicationFiled: September 29, 2004Publication date: March 31, 2005Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu
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Publication number: 20040094855Abstract: The present invention provides a method of fabricating a polishing pad having a detection window thereon. A mold having a cavity therein and a transparent thermosetting plastic part that is incompletely hardened are provided. The transparent thermosetting plastic part is disposed in the mold and a high molecular weight foam is injected into the cavity of the mold. The transparent thermosetting plastic part and the high molecular weight foam are hardened at the same time. After the step of demolding is performed, a polishing pad having a detection window thereon is formed. Moreover, the transparent thermosetting plastic part can be designed to have the central portion thicker than its peripheral portion for preventing deformation that is caused by the material difference of the detection window and other portions of the polishing pad.Type: ApplicationFiled: May 14, 2003Publication date: May 20, 2004Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Publication number: 20040096529Abstract: A method of manufacturing a polishing pad is described. A mold having a mold cavity therein is provided. At least a strip is buried in the mold. A polymer foam material is injected into the mold cavity of the mold. The polymer foam material is cured to mold the polymer foam material into a molding polymer article. A mold release process is performed to obtain the molding polymer article. The strip on the molding article is removed to form a polishing pad having at least one groove thereon.Type: ApplicationFiled: May 14, 2003Publication date: May 20, 2004Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei
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Publication number: 20040021243Abstract: A method for manufacturing a PU (polyurethane) polishing pad is provided. Resins containing active hydrogen functional groups such as polyol resins, polyamine resins, and polythiol resins, and polyisocyanate resins containing —NCO functional groups are mixed to form a foamed PU polishing pad with excellent polishing properties by reaction injection-molding under high pressure, low temperature and auxiliary gas-adding. The PU polishing pad in accompany with an abrasive slurry can be widely used to polish high-level products such as wafers and optical glass.Type: ApplicationFiled: March 27, 2003Publication date: February 5, 2004Inventors: Wen-Chang Shih, Yung-Chung Chang, Min-Kuei Chu, Lung-Chen Wei, Wen-Pin Chen