Abstract: Disclosed herein is an inertial sensor including: a sensor part including a driving body, a flexible substrate part displaceably supporting the driving body, a support part supporting the flexible substrate part so that the driving body is freely movable in a state in which it is floated, and a lower cap covering a lower portion of the driving body and coupled to the support part; an application specific integrated circuit (ASIC) including the sensor part stacked thereon and coupled thereto; a printed circuit board including the ASIC stacked thereon and coupled thereto and electrically connected to the sensor part and the ASIC by a wire; and a cap covering the sensor part and the ASIC and coupled to the printed circuit board, wherein the cap includes an air discharging hole formed in order to discharge internal air to the outside.

Abstract: Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.

Abstract: This invention relates to an electrical plug (1; 100; 154; 160; 200; 300) comprising: a plug main body (3; 103; 204; 302); and a plurality of electrical pins (21, 23; 156, 158; 164, 166; 210, 212; 310; 312), the pins being carried by an arm (17; 208; 308) that is coupled to said plug main body (3; 103; 204; 302) and is rotatable relative thereto between a stowed position where the arm (17; 208; 308) is generally linearly aligned with the plug main body (3; 103; 204; 302), and a deployed position where the arm (17; 208; 308) has rotated relative to the plug main body (3; 103; 204; 302) so as to be generally perpendicular thereto. A multi-plug adaptor for use with the plug is also disclosed.

Abstract: Disclosed herein is an inertial sensor of the present invention. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 and surrounding the mass body 120, a piezoelectric material 140 formed above the membrane 110 and provided with a cavity 141 in a thickness direction, a sensing electrode 150 disposed in the cavity 141 and a driving electrode 160 disposed outside the cavity 141, whereby the thickness of the piezoelectric material 140 of the portion on which the sensing electrode 150 is disposed is formed to be thin, such that the sensitivity of the inertial sensor 100 can be improved.

Abstract: A chemical dispensing control device capable of indicating an open/closed position of a drain valve and generating an interlock signal when the drain valve is opened in a chemical coating process is disclosed. The chemical dispensing control device for use in a photo spinner to alarm and generate an interlock signal in case the drain valve is not closed in a spin coating process includes a variable resistance for detecting a voltage corresponding to a change of resistance value based on an open/close position of said drain valve and a controller for receiving the detected voltage, determining an open/close position of the drain valve, and generating an interlock signal when the closed position of the drain valve is not detected during the coating process.

Abstract: A filter detection apparatus for photolithography equipment for fabricating a semiconductor device includes a filter which filters at least one of air bubbles and particles in a photoresist. The apparatus also includes a housing which holds the filter. In addition, the apparatus includes a housing fixing portion which fixes the housing. The apparatus also includes a built-in filter sensing portion which senses a presence of the filter in the housing fixed to the housing fixing portion. The apparatus also includes an indicator which indicates the presence of the filter in the housing, in accordance with a signal sensed in the built-in filter sensing portion.