Patents by Inventor Min-Lyul Lee

Min-Lyul Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reduced cost process modules
    Publication number: 20060196023
    Abstract: A process module and a method of making the same for processing substrates comprising two different types of materials, one of the materials being a corrosive-retardant material forming a module interior face disposed to be subjected to the interior atmosphere in the module, and another of the materials being located on the side of the corrosive-retardant material to define a module outer face opposite the interior face, wherein the corrosive-retardant material and the other material are joined together.
    Type: Application
    Filed: March 2, 2005
    Publication date: September 7, 2006
    Inventor: Min-Lyul Lee