Patents by Inventor Min-Wei Hung
Min-Wei Hung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240413020Abstract: A method includes forming a contact spacer on a sidewall of an inter-layer dielectric, wherein the contact spacer encircles a contact opening, forming a silicide region in the opening and on a source/drain region, depositing an adhesion layer extending into the contact opening, and performing a treatment process, so that the contact spacer is treated. The treatment process is selected from the group consisting of an oxidation process, a carbonation process, and combinations thereof. The method further includes depositing a metal barrier over the adhesion layer, depositing a metallic material to fill the contact opening, and performing a planarization process to remove excess portions of the metallic material over the inter-layer dielectric.Type: ApplicationFiled: October 17, 2023Publication date: December 12, 2024Inventors: Min-Hsiu Hung, Chun-I Tsai, Chih-Wei Chang, Ming-Hsing Tsai, Syun-Ming Jang, Wei-Jen Lo, Wei-Jung Lin, Yu-Ting Wen, Kai-Chieh Yang
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Publication number: 20240395545Abstract: Semiconductor devices and methods of manufacture are provided whereby fences are formed over a substrate and III-V materials are grown over the substrate, wherein the fences block growth of the III-V materials. As such, smaller areas of the III-V materials are grown, thereby preventing stresses that occur with the growth of larger sheets.Type: ApplicationFiled: July 30, 2024Publication date: November 28, 2024Inventors: Min-Sung Kuo, I-Kai Hung, Po-Wei Chen, Chung-Cheng Chen
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Publication number: 20240379423Abstract: A barrier layer is formed in a portion of a thickness of sidewalls in a recess prior to formation of an interconnect structure in the recess. The barrier layer is formed in the portion of the thickness of the sidewalls by a plasma-based deposition operation, in which a precursor reacts with a silicon-rich surface to form the barrier layer. The barrier layer is formed in the portion of the thickness of the sidewalls in that the precursor consumes a portion of the silicon-rich surface of the sidewalls as a result of the plasma treatment. This enables the barrier layer to be formed in a manner in which the cross-sectional width reduction in the recess from the barrier layer is minimized while enabling the barrier layer to be used to promote adhesion in the recess.Type: ApplicationFiled: July 25, 2024Publication date: November 14, 2024Inventors: Chien CHANG, Min-Hsiu HUNG, Yu-Hsiang LIAO, Yu-Shiuan WANG, Tai Min CHANG, Kan-Ju LIN, Chih-Shiun CHOU, Hung-Yi HUANG, Chih-Wei CHANG, Ming-Hsing TSAI
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Publication number: 20240363339Abstract: Generally, the present disclosure provides example embodiments relating to conductive features, such as metal contacts, vias, lines, etc., and methods for forming those conductive features. In a method embodiment, a dielectric layer is formed on a semiconductor substrate. The semiconductor substrate has a source/drain region. An opening is formed through the dielectric layer to the source/drain region. A silicide region is formed on the source/drain region and a barrier layer is formed in the opening along sidewalls of the dielectric layer by a same Plasma-Enhance Chemical Vapor Deposition (PECVD) process.Type: ApplicationFiled: July 12, 2024Publication date: October 31, 2024Inventors: Cheng-Wei Chang, Min-Hsiu Hung, Hung-Yi Huang, Chun Chieh Wang, Yu-Ting Lin
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Patent number: 12087575Abstract: Generally, the present disclosure provides example embodiments relating to conductive features, such as metal contacts, vias, lines, etc., and methods for forming those conductive features. In a method embodiment, a dielectric layer is formed on a semiconductor substrate. The semiconductor substrate has a source/drain region. An opening is formed through the dielectric layer to the source/drain region. A silicide region is formed on the source/drain region and a barrier layer is formed in the opening along sidewalls of the dielectric layer by a same Plasma-Enhance Chemical Vapor Deposition (PECVD) process.Type: GrantFiled: January 18, 2022Date of Patent: September 10, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Cheng-Wei Chang, Min-Hsiu Hung, Hung-Yi Huang, Chun Chieh Wang, Yu-Ting Lin
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Publication number: 20240249948Abstract: The present disclosure relates to a method for fabricating a semiconductor structure. The method includes providing a substrate with a gate structure, an insulating structure over the gate structure, and a S/D region; depositing a titanium silicide layer over the S/D region with a first chemical vapor deposition (CVD) process. The first CVD process includes a first hydrogen gas flow. The method also includes depositing a titanium nitride layer over the insulating structure with a second CVD process. The second CVD process includes a second hydrogen gas flow. The first and second CVD processes are performed in a single reaction chamber and a flow rate of the first hydrogen gas flow is higher than a flow rate of the second hydrogen gas flow.Type: ApplicationFiled: March 28, 2024Publication date: July 25, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Wei CHANG, Kao-Feng LIN, Min-Hsiu HUNG, Yi-Hsiang CHAO, Huang-Yi HUANG, Yu-Ting LIN
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Patent number: 10942456Abstract: An ultraviolet (UV) light source is provided. The device uses a high-uniformity diode array. A lens unit of collimated illumination lenses is used. A light source of UV light-emitting diode (UVLED) array is formed and passes through the lens unit to uniformly distribute the light source and obtain a collimated light. The present invention comprises a light source of UVLED array; a collimated illumination lens unit; and a substrate. The construction is simple. The present invention can be applied in the lithography of a semiconductor. The lithography forms contact lines of widths not greater than 3 microns (?m); soft-contact lines of widths of 3˜30 ?m; and short-spaced lines of widths of 30˜200 ?m. The present invention avoids the mask from contact wear-out for multiple uses, and further reduces the replacement rate.Type: GrantFiled: January 17, 2020Date of Patent: March 9, 2021Assignee: National Applied Research LaboratoriesInventors: Jiun-Woei Huang, Min-Wei Hung, Kuo-Cheng Huang
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Patent number: 10928247Abstract: A system for detecting an illuminance of the present invention includes a light source, a light sensor, and a signal output module. The light source includes a first A light-emitting diode, the first A light-emitting diode having a first color light; and the light source emits a first ray of light. The light sensor has a sensing face; the light sensor includes a first B light-emitting diode disposed on the sensing face, the first B light-emitting diode having the first color light; and the light sensor receives at least a portion of the first ray of light and generates a first sensing voltage. The signal output module is coupled to the light sensor to receive the first sensing voltage and output a sensing result signal according to the first sensing voltage.Type: GrantFiled: February 27, 2019Date of Patent: February 23, 2021Assignee: NATIONAL APPLIED RESEARCH LABORATORIESInventors: Fang-Ci Su, Hsin-Yi Tsai, Min-Wei Hung, Yi-Cheng Lin, Kuo-Cheng Huang, Hsin-Su Yu, Chiou-Lian Lai, Chung-Yao Hsu, Chao-Hung Cheng, Li-Wei Kuo
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Patent number: 10912948Abstract: The present invention provides a composite intelligent biological phototherapy device including a base structure, a plurality of white light fluorescent tubes arranged side by side on the base structure, a plurality of LEDs disposed between the white light fluorescent tubes, a housing having an opening and configured to accommodate the base structure and the white light fluorescent tubes and the LEDs thereon, a light-transmittable plate disposed on the housing corresponding to the opening, and an control module configured to respectively control the white light fluorescent tubes and the LEDs. The base structure includes a plurality of sections, and each of the sections has a first surface facing the light-transmittable plate. The white light fluorescent tubes and the LEDs are provided on the first surfaces, and the sections are bent relative to each other so an angle between the first surfaces of adjacent sections is less than 180 degrees.Type: GrantFiled: April 4, 2018Date of Patent: February 9, 2021Assignee: NATIONAL APPLIED RESEARCH LABORATORIESInventors: Yi-Cheng Lin, Hsin-Yi Tsai, Min-Wei Hung, Kuo-Cheng Huang, Hsin-Su Yu, Chiou-Lian Lai, Chung-Yao Hsu, Chao-Hung Cheng, Li-Wei Kuo, Hung-Che Chiang, Chih-Yi Yang
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Publication number: 20190383660Abstract: A system for detecting an illuminance of the present invention includes a light source, a light sensor, and a signal output module. The light source includes a first A light-emitting diode, the first A light-emitting diode having a first color light; and the light source emits a first ray of light. The light sensor has a sensing face; the light sensor includes a first B light-emitting diode disposed on the sensing face, the first B light-emitting diode having the first color light; and the light sensor receives at least a portion of the first ray of light and generates a first sensing voltage. The signal output module is coupled to the light sensor to receive the first sensing voltage and output a sensing result signal according to the first sensing voltage.Type: ApplicationFiled: February 27, 2019Publication date: December 19, 2019Inventors: FANG-CI SU, HSIN-YI TSAI, MIN-WEI HUNG, YI-CHENG LIN, KUO-CHENG HUANG, HSIN-SU YU, CHIOU-LIAN LAI, CHUNG-YAO HSU, CHAO-HUNG CHENG, LI-WEI KUO
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Publication number: 20190111277Abstract: The present invention provides a composite intelligent biological phototherapy device including a base structure, a plurality of white light fluorescent tubes arranged side by side on the base structure, a plurality of LEDs disposed between the white light fluorescent tubes, a housing having an opening and configured to accommodate the base structure and the white light fluorescent tubes and the LEDs thereon, a light-transmittable plate disposed on the housing corresponding to the opening, and an control module configured to respectively control the white light fluorescent tubes and the LEDs. The base structure includes a plurality of sections, and each of the sections has a first surface facing the light-transmittable plate. The white light fluorescent tubes and the LEDs are provided on the first surfaces, and the sections are bent relative to each other so an angle between the first surfaces of adjacent sections is less than 180 degrees.Type: ApplicationFiled: April 4, 2018Publication date: April 18, 2019Inventors: YI-CHENG LIN, HSIN-YI TSAI, MIN-WEI HUNG, KUO-CHENG HUANG, HSIN-SU YU, CHIOU-LIAN LAI, CHUNG-YAO HSU, CHAO-HUNG CHENG, LI-WEI KUO, HUNG-CHE CHIANG, CHIH-YI YANG
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Patent number: 10180374Abstract: A test device for testing a first contact lens classified as a specific type of contact lens is disclosed. The test device includes a light emitting unit and a detection unit. The light emitting unit emits a first incident light to the first contact lens to generate a first reflected light having a first light intensity, and the detection unit receives the first reflected light, in response to the first light intensity generates a first light intensity value, and implements a specific water content algorithm based on the first light intensity value to estimate an actual water content associated with the first contact lens, wherein the specific water content algorithm is constructed based on a water content reference data associated with the specific type of contact lens and a corresponding light intensity measurement data associated with the water content reference data.Type: GrantFiled: November 30, 2017Date of Patent: January 15, 2019Assignee: NATIONAL APPLIED RESEARCH LABORATORIESInventors: Yu-Hsuan Lin, Hsin-Yi Tsai, Kuo-Cheng Huang, Min-Wei Hung
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Patent number: 10086559Abstract: A system for online monitoring powder-based 3D printing processes and method thereof are disclosed. A uniform light source having a single wavelength provided by the system is irradiated onto the powder layer before and after applied with glue. Intensities of such reflected images are obtained and subtracted from each other in an image process procedure. A difference obtained through the subtraction is compared with an original 3D model in a computer. If any defect is found such as being larger than a threshold value, the powder-based 3D printing processes will be terminated. Therefore, the technical effects of online printing processes monitoring, time saving and printing resources saving will be achieved.Type: GrantFiled: July 20, 2015Date of Patent: October 2, 2018Assignee: NATIONAL APPLIED RESEARCH LABORATORIESInventors: Hsin-Yi Tsai, Min-Wei Hung, Kuo-Cheng Huang, Keng-Liang Ou, Ching-Ching Yang
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Patent number: 9689869Abstract: A portable fluorescence analysis system comprises a fluorescence strip, a fluorescence excitation device and a mobile Internet device. The fluorescence strip comprises a fluorescence probe configured for detecting an analyte within a specimen. The fluorescence excitation device comprises a sleeve and an excitation light source module. The fluorescence strip is arranged at the one open end of the sleeve. The excitation light source module is arranged at the same opening side of the sleeve and configured for providing an excitation light to excite the fluorescence probe to generate fluorescence. The mobile Internet device comprises an image capturing module and configured for capturing a fluorescence image of the fluorescence strip via the other opening of the sleeve and analyzing fluorescence intensity of the fluorescence image to determine the content of the analyte. The above-mentioned system can be applied to the point of care testing.Type: GrantFiled: December 23, 2015Date of Patent: June 27, 2017Assignee: National Tsing Hua UniversityInventors: Shih-Jie Lo, Min-Wei Hung, Jer-Liang Yeh, Da-Jeng Yao, Chao-Min Cheng
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Patent number: 9600880Abstract: A method and system for qualifying a surgical clip applier with surgical clips are proposed. After successive firing operations of the surgical clip applier, an image capture unit captures sampling images associated respectively with angularly equidistant radial recesses in a rotatable clip-receiving disk for receiving anything fired from the surgical clip applier. Upon determining that each sampling image contains an individual target image portion showing a single fired surgical clip, a processing unit verifies the qualification of the surgical clip applier based on a predetermined specification and characteristic parameters obtained respectively from the individual target image portions and associated respectively with the surgical clips, which are received respectively in the radial recesses.Type: GrantFiled: October 12, 2015Date of Patent: March 21, 2017Assignee: NATIONAL APPLIED RESEARCH LABORATORIESInventors: Han-Chao Chang, Min-Wei Hung, Yu-Hsuan Lin, Cheng-Ru Li
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Publication number: 20160364855Abstract: A method and system for qualifying a surgical clip applier with surgical clips are proposed. After successive firing operations of the surgical clip applier, an image capture unit captures sampling images associated respectively with angularly equidistant radial recesses in a rotatable clip-receiving disk for receiving anything fired from the surgical clip applier. Upon determining that each sampling image contains an individual target image portion showing a single fired surgical clip, a processing unit verifies the qualification of the surgical clip applier based on a predetermined specification and characteristic parameters obtained respectively from the individual target image portions and associated respectively with the surgical clips, which are received respectively in the radial recesses.Type: ApplicationFiled: October 12, 2015Publication date: December 15, 2016Inventors: Han-Chao CHANG, Min-Wei HUNG, Yu-Hsuan LIN, Cheng-Ru LI
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Publication number: 20160176114Abstract: A system for online monitoring powder-based 3D printing processes and method thereof are disclosed. A uniform light source having a single wavelength provided by the system is irradiated onto the powder layer before and after applied with glue. Intensities of such reflected images are obtained and subtracted from each other in an image process procedure. A difference obtained through the subtraction is compared with an original 3D model in a computer. If any defect is found such as being larger than a threshold value, the powder-based 3D printing processes will be terminated. Therefore, the technical effects of online printing processes monitoring, time saving and printing resources saving will be achieved.Type: ApplicationFiled: July 20, 2015Publication date: June 23, 2016Inventors: Hsin-Yi TSAI, Min-Wei HUNG, Kuo-Cheng HUANG, Keng-Liang OU, Ching-Ching YANG
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Patent number: 9348397Abstract: A method of power management is to be implemented by a portable electronic device coupled to a portable power bank. The portable power bank is further coupled to an electrical appliance. In the method, the portable electronic device receives power information from the portable power bank, and controls the portable power bank to operate in one of a first mode, in which electrical power is provided to the electrical appliance, and a second mode, in which electrical power is not provided to the electrical appliance, based on whether or not the portable power bank has sufficient amount of power.Type: GrantFiled: March 27, 2014Date of Patent: May 24, 2016Assignees: NATIONAL TAIWAN NORMAL UNIVERSITY, HEALTHIFE CO., LTD.Inventors: Yu-Shan Su, Han-Chao Chang, Chien-Kai Chung, Min-Wei Hung, Jyun-Yi Lai, Shih-Feng Tseng, Wen-Tse Hsiao, I-Lin Wu
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Publication number: 20160116465Abstract: A portable fluorescence analysis system comprises a fluorescence strip, a fluorescence excitation device and a mobile Internet device. The fluorescence strip comprises a fluorescence probe configured for detecting an analyte within a specimen. The fluorescence excitation device comprises a sleeve and an excitation light source module. The fluorescence strip is arranged at the one open end of the sleeve. The excitation light source module is arranged at the same opening side of the sleeve and configured for providing an excitation light to excite the fluorescence probe to generate fluorescence. The mobile Internet device comprises an image capturing module and configured for capturing a fluorescence image of the fluorescence strip via the other opening of the sleeve and analyzing fluorescence intensity of the fluorescence image to determine the content of the analyte. The above-mentioned system can be applied to the point of care testing.Type: ApplicationFiled: December 23, 2015Publication date: April 28, 2016Inventors: Shih-Jie Lo, Min-Wei Hung, Jer-Liang Yeh, Da-Jeng Yao, Chao-Min Cheng
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Patent number: 9255884Abstract: A portable fluorescence analysis system comprises a fluorescence strip, a fluorescence excitation device and a mobile Internet device. The fluorescence strip comprises a fluorescence probe configured for detecting an analyte within a specimen. The fluorescence excitation device comprises a sleeve and an excitation light source module. The fluorescence strip is arranged at the one open end of the sleeve. The excitation light source module is arranged at the same opening side of the sleeve and configured for providing an excitation light to excite the fluorescence probe to generate fluorescence. The mobile Internet device comprises an image capturing module and configured for capturing a fluorescence image of the fluorescence strip via the other opening of the sleeve and analyzing fluorescence intensity of the fluorescence image to determine the content of the analyte. The above-mentioned system can be applied to the point of care testing.Type: GrantFiled: February 14, 2014Date of Patent: February 9, 2016Assignee: National Tsing Hua UniversityInventors: Shih-Jie Lo, Min-Wei Hung, Jer-Liang Yeh, Da-Jeng Yao, Chao-Min Cheng