Abstract: In some embodiments, the present disclosure relates to a method that includes forming a dielectric layer over a conductive structure on a substrate. A removal process is performed to remove a portion of the dielectric layer to expose a portion of the conductive structure. The substrate is transported into a cleaning chamber having a wafer chuck below a bell jar structure. A cleaning process is performed to clean the exposed portion of the conductive structure by turning on a noble gas source to introduce a noble gas within the cleaning chamber, turning on an oxygen gas source to introduce oxygen within the cleaning chamber, applying a first bias to a plasma coil to form a plasma gas, and applying a second bias to the wafer chuck. The substrate is removed from the cleaning chamber. A conductive layer is formed over the dielectric layer and coupled to the conductive structure.

Abstract: A computer-aided design tool for automatically generating a layout for an electronic device to be formed by a set of objects implemented within an integrated circuit, receives input from a user defining a device template specifying shapes, dimensions and relative positions within the layout of the objects forming the device. Some of the object dimensions and/or relative positions are specified as functions of values of input parameters to be supplied by the user. When the user supplies the input parameters, the CAD tool evaluates the functions to determine the object dimensions and/or positions that are functions of the input parameters and then generates a layout for the electronic device wherein object shapes, dimensions and relative positions are as specified in the device template and consistent with the function evaluations.

Abstract: A computer-aided design tool for automatically generating a layout for an electronic device to be formed by a set of objects implemented within an integrated circuit, receives input from a user defining a device template specifying shapes, dimensions and relative positions within the layout of the objects forming the device. Some of the object dimensions and/or relative positions are specified as functions of values of input parameters to be supplied by the user. When the user supplies the input parameters, the CAD tool evaluates the functions to determine the object dimensions and/or positions that are functions of the input parameters and then generates a layout for the electronic device wherein object shapes, dimensions and relative positions are as specified in the device template and consistent with the function evaluations.