Abstract: A method of fabricating a semiconductor memory device includes preparing a semiconductor substrate which is divided into a cell array region and a core and peripheral region adjacent to the cell array region. Signal lines may be formed in a lower layer in a cell region. An insulation layer may be formed on the lower layer. Signal lines connected to cell region signal lines may be formed on an insulation layer of the peripheral region. A capping layer may be formed on the insulation layer and the core and peripheral signal lines. The capping layer may be etched to expose the lower layer of the cell array region and an etch stop may be formed on the lower layer and the core and peripheral region.

Abstract: A method of fabricating a semiconductor memory device includes preparing a semiconductor substrate which is divided into a cell array region and a core and peripheral region adjacent to the cell array region. Signal lines may be formed in a lower layer in a cell region. An insulation layer may be formed on the lower layer. Signal lines connected to cell region signal lines may be formed on an insulation layer of the peripheral region. A capping layer may be formed on the insulation layer and the core and peripheral signal lines. The capping layer may be etched to expose the lower layer of the cell array region and an etch stop may be formed on the lower layer and the core and peripheral region.

Abstract: An integrated circuit device is provided with a plurality of normally open fuse elements. A fuse element includes a fuse insulation film lining a sidewall and a bottom of a recess in a semiconductor substrate. A semiconductor fuse region of first conductivity type (e.g., N-type) is provided in the semiconductor substrate. The semiconductor fuse region extends to the sidewall of the recess. A fuse conductor is provided on a portion of the fuse insulation film extending opposite the semiconductor fuse region. A voltage induced rupture in the fuse insulation film results in a direct electrical connection between the fuse conductor and the semiconductor fuse region.

Abstract: A method of forming a contact structure in a semiconductor device includes forming an interlayer insulating layer containing impurities on a semiconductor substrate. The interlayer insulating layer is patterned to form a pad contact hole. The pad contact hole is filled with a conductive pad. Thermal oxidation annealing is then carried out to form an oxide layer on a top surface of the conductive pad and at an interface between the conductive pad and the interlayer insulating layer.

Abstract: A method of forming a contact structure in a semiconductor device includes forming an interlayer insulating layer containing impurities on a semiconductor substrate. The interlayer insulating layer is patterned to form a pad contact hole. The pad contact hole is filled with a conductive pad. Thermal oxidation annealing is then carried out to form an oxide layer on a top surface of the conductive pad and at an interface between the conductive pad and the interlayer insulating layer.

Abstract: Methods of forming semiconductor devices containing field oxide and channel-stop isolation regions therein include the steps of forming a plurality of first channel-stop isolation regions by implanting first conductivity type impurities at a first dose level into a face of a semiconductor substrate and then forming respective field oxide isolation regions at the locations where the first channel-stop isolation regions have been implanted. A conductive layer, which contacts active regions of the substrate and covers the field oxide isolation regions, is then patterned over the field oxide isolation regions to expose central portions of the upper surfaces of the field oxide isolation regions.