Patents by Inventor Min-Yuan Chung

Min-Yuan Chung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Powder-proof apparatus for a PECVD reactor chamber
    Patent number: 6089969
    Abstract: A transparent powder-proof housing covers the heater block of a PECVD reactor chamber tightly, thereby to prevent from powder pollution while cleaning the interior of the reactor chamber. The transparent powder-proof housing has two outlets, one for connecting to a vacuum cleaner and the other for human operation inside the reactor chamber. The vacuum cleaner vacuums the powder dust out of the transparent powder-proof housing, thereby to largely reduce the powder pollution in a clean room and the chances to jeopardize human health.
    Type: Grant
    Filed: April 2, 1998
    Date of Patent: July 18, 2000
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Min-Yuan Chung, Bih-Tiao Lin, Wen-Chang Tseng