Patents by Inventor Mina Menaker

Mina Menaker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining a profile quality grade of an inspected feature
    Patent number: 6303931
    Abstract: A method for determining a profile quality grade of inspected feature in a resist. The feature includes side walls. The method includes the steps of acquiring by a metrology device a signal that originates from the feature and analyzing the acquired signal, including fitting a curve from among a family of curves to the acquired signal. The curve is subjected to the following constraint: it corresponds to a signal portion that originates from part of the bottom of the feature. The method further includes the step of determining the profile quality grade of the feature depending upon characteristics of the fitted curve.
    Type: Grant
    Filed: November 17, 1998
    Date of Patent: October 16, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Mina Menaker, Andrei Veldman