Patents by Inventor Minako Kaneko

Minako Kaneko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for dissolving surface layer of semiconductor substrate
    Patent number: 5890501
    Abstract: Disclosed is a method of dissolving a surface of a semiconductor substrate or a thin-film surface layer formed on the semiconductor substrate, with an oxidizing agent and fluorine-series gas. The method is characterized in that an initial dissolution rate is controlled by gradually increasing a concentration of fluorine-series gas introduced in a dissolving solution containing the oxidizing agent.
    Type: Grant
    Filed: November 27, 1996
    Date of Patent: April 6, 1999
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Minako Kaneko, Ayako Shimazaki, Itsuro Ishizaki