Patents by Inventor Mine Nakagawa
Mine Nakagawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7964845Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: GrantFiled: October 20, 2008Date of Patent: June 21, 2011Assignee: Hitachi High-Technologies CorporationInventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto, Akinari Morikawa
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Publication number: 20090050803Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: ApplicationFiled: October 20, 2008Publication date: February 26, 2009Inventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto, Akinari Morikawa
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Patent number: 7456403Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: GrantFiled: October 3, 2005Date of Patent: November 25, 2008Assignee: Hitachi High-Technologies CorporationInventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto
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Publication number: 20070235645Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: ApplicationFiled: October 3, 2005Publication date: October 11, 2007Inventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto
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Patent number: 6963067Abstract: The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.Type: GrantFiled: January 5, 2004Date of Patent: November 8, 2005Assignees: Hitachi High-Technologies Corporation, Hitachi Science Systems, Inc.Inventors: Shuichi Takeuchi, Mine Nakagawa, Mitsugu Sato, Atsushi Takane, Kazutaka Nimura
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Patent number: 6963069Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: GrantFiled: January 30, 2004Date of Patent: November 8, 2005Assignee: Hitachi High-Technologies CorporationInventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto, Akinari Morikawa
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Publication number: 20040238752Abstract: The charged particle beam device of this invention separately detects secondary signal particles emitted from the surface of a sample, dark field signal particles scattered within and transmitted through the sample, bright field signal particles transmitted through the sample without being scattered within the sample, and thereby allows the operator to observe the image with an optimum contrast according to applications. In order to detect only the dark field transmitted signal particles scattered within the sample, among the transmitted signal particles obtained by the primary charged particle beams having transmitted through the thin film sample, the device includes a transmitted signal conversion member having an opening through which the bright field transmitted signal particles not being scattered within the sample can pass, and a detection means for detecting signals colliding against the conversion member.Type: ApplicationFiled: January 30, 2004Publication date: December 2, 2004Inventors: Yuusuke Tanba, Mitsugu Sato, Kaname Takahashi, Shunya Watanabe, Mine Nakagawa, Atsushi Muto, Akinari Morikawa
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Publication number: 20040188611Abstract: The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.Type: ApplicationFiled: January 5, 2004Publication date: September 30, 2004Inventors: Shuichi Takeuchi, Mine Nakagawa, Mitsugu Sato, Atsushi Takane, Kazutaka Nimura