Patents by Inventor Mineyuki NISHINO

Mineyuki NISHINO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
    Patent number: 11360394
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: June 14, 2022
    Assignee: NIKON CORPORATION
    Inventors: Mineyuki Nishino, Katsushi Nakano, Satoshi Takahashi
  • INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, PROGRAM, AND RECORDING MEDIUM
    Publication number: 20210191277
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Application
    Filed: March 8, 2021
    Publication date: June 24, 2021
    Applicant: NIKON CORPORATION
    Inventors: Mineyuki NISHINO, Katsushi NAKANO, Satoshi TAKAHASHI
  • Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
    Patent number: 10942457
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Grant
    Filed: May 4, 2020
    Date of Patent: March 9, 2021
    Assignee: NIKON CORPORATION
    Inventors: Mineyuki Nishino, Katsushi Nakano, Satoshi Takahashi
  • INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, PROGRAM, AND RECORDING MEDIUM
    Publication number: 20200264519
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Application
    Filed: May 4, 2020
    Publication date: August 20, 2020
    Applicant: NIKON CORPORATION
    Inventors: Mineyuki NISHINO, Katsushi NAKANO, Satoshi TAKAHASHI
  • Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
    Patent number: 10642159
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Grant
    Filed: July 3, 2017
    Date of Patent: May 5, 2020
    Assignee: NIKON CORPORATION
    Inventors: Mineyuki Nishino, Katsushi Nakano, Satoshi Takahashi
  • Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
    Patent number: 10317803
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Grant
    Filed: July 3, 2017
    Date of Patent: June 11, 2019
    Assignee: NIKON CORPORATION
    Inventors: Mineyuki Nishino, Katsushi Nakano, Satoshi Takahashi
  • INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, PROGRAM, AND RECORDING MEDIUM
    Publication number: 20170307984
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Application
    Filed: July 3, 2017
    Publication date: October 26, 2017
    Applicant: NIKON CORPORATION
    Inventors: Mineyuki NISHINO, Katsushi NAKANO, Satoshi TAKAHASHI
  • Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
    Patent number: 9720332
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Grant
    Filed: June 6, 2014
    Date of Patent: August 1, 2017
    Assignee: NIKON CORPORATION
    Inventors: Mineyuki Nishino, Katsushi Nakano, Satoshi Takahashi
  • INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, PROGRAM, AND RECORDING MEDIUM
    Publication number: 20140362354
    Abstract: An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object.
    Type: Application
    Filed: June 6, 2014
    Publication date: December 11, 2014
    Inventors: Mineyuki NISHINO, Katsushi NAKANO, Satoshi TAKAHASHI