Abstract: A large-scale single-photonics-based optical switching system that occupies an area larger than the maximum area of a standard step-and-repeat lithography reticle is disclosed. The system includes a plurality of identical switch blocks, each of is formed in a different reticle field that no larger than the maximum reticle size. Bus waveguides of laterally adjacent switch blocks are stitched together at lateral interfaces that include a second arrangement of waveguide ports that is common to all lateral interfaces. Bus waveguides of vertically adjacent switch blocks are stitched together at vertical interfaces that include a first arrangement of waveguide ports that is common to all vertical interfaces. In some embodiments, the lateral and vertical interfaces include waveguide ports having waveguide coupling regions that are configured to mitigate optical loss due to stitching error.

Abstract: An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

Abstract: A large-scale single-photonics-based optical switching system that occupies an area larger than the maximum area of a standard step-and-repeat lithography reticle is disclosed. The system includes a plurality of identical switch blocks, each of is formed in a different reticle field that no larger than the maximum reticle size. Bus waveguides of laterally adjacent switch blocks are stitched together at lateral interfaces that include a second arrangement of waveguide ports that is common to all lateral interfaces. Bus waveguides of vertically adjacent switch blocks are stitched together at vertical interfaces that include a first arrangement of waveguide ports that is common to all vertical interfaces. In some embodiments, the lateral and vertical interfaces include waveguide ports having waveguide coupling regions that are configured to mitigate optical loss due to stitching error.

Abstract: A large-scale single-photonics-based optical switching system that occupies an area larger than the maximum area of a standard step-and-repeat lithography reticle is disclosed. The system includes a plurality of identical switch blocks, each of is formed in a different reticle field that no larger than the maximum reticle size. Bus waveguides of laterally adjacent switch blocks are stitched together at lateral interfaces that include a second arrangement of waveguide ports that is common to all lateral interfaces. Bus waveguides of vertically adjacent switch blocks are stitched together at vertical interfaces that include a first arrangement of waveguide ports that is common to all vertical interfaces. In some embodiments, the lateral and vertical interfaces include waveguide ports having waveguide coupling regions that are configured to mitigate optical loss due to stitching error.

Abstract: A spatial light modulator (SLM) is disclosed, wherein the SLM has a substrate comprising an array of MEMS-based mirror elements that is periodic with small pitch (<3 microns) and high fill factor (>80%) in a first dimension. Each mirror element includes a micromirror whose height above the substrate is controlled via a vertical comb-drive actuator, which is located completely beneath the micromirror in the first dimension. As a result, mirror element can control the phase of light reflected from its micromirror. In some embodiments, the SLM includes an array of mirror elements that is periodic with small pitch and high fill factor in two dimensions. In such embodiments, the actuator, as well as tethers for supporting the micromirror above the substrate, are located completely beneath the micromirror, thereby enabling high fill factor in both dimensions.

Abstract: An integrated-optics MEMS-actuated beam-steering system is disclosed, wherein the beam-steering system includes a lens and a programmable vertical coupler array having a switching network and an array of vertical couplers, where the switching network can energize of the vertical couplers such that it efficiently emits the light into free-space. The lens collimates the light received from the energized vertical coupler and directs the output beam along a propagation direction determined by the position of the energized vertical coupler within the vertical-coupler array. In some embodiments, the vertical coupler is configured to correct an aberration of the lens. In some embodiments, more than one vertical coupler can be energized to enable steering of multiple output beams. In some embodiments, the switching network is non-blocking.

Abstract: A polarization-independent optical switching system capable of rerouting light signals is disclosed. The system includes a plurality of switching cells, each including a pair of bus waveguides that are formed in different planes above a substrate. Each bus waveguide supports low-loss propagation of both the TE- and TM-polarization modes and are optically decoupled when the switch is in an unswitched state. In its switched state, a shunt waveguide that also supports low-loss propagation of both polarization modes is moved into proximity with both bus waveguides to form a pair of adiabatic directional couplers that enable the light signal to evanescently couple between each bus waveguide and the shunt waveguide. As a result, the path of a light signal through the switching cell is reconfigured.

Abstract: Single-sided optoelectrowetting (SSOEW)-configured substrates are provided, as well as microfluidic devices that include such substrates. The substrates can include a planar electrode, a photoconductive (or photosensitive) layer, a dielectric layer (single-layer or composite), a mesh electrode, and a hydrophobic coating. Fluid droplets can be moved across the hydrophobic coating of such substrates in a light-actuated manner, upon the application of a suitable AC voltage potential across the substrate and the focusing of light into the photoconductive layer of the substrate in a location proximal to the droplets. Walls can be disposed upon the substrates to form the microfluidic devices. Together the walls and substrate can form a microfluidic circuit, through which droplets can be moved.

Abstract: A MEMS-based optical phased array (OPA) having small pitch, high fill factor, and large field of view is presented. The OPA includes a plurality of diffractive elements, each of which diffracts incident light into its diffractive orders to produce at least one beamlet. Each diffractive element is operatively coupled with an actuator that is operative for moving the diffractive element along its longitudinal direction to control the phase of its respective beamlet. The beamlets from all of the diffractive elements are combined to define at least one output beam and steer that output beam in at least one dimension.

Abstract: A spatial light modulator (SLM) is disclosed, wherein the SLM has a substrate comprising an array of MEMS-based mirror elements that is periodic with small pitch (<3 microns) and high fill factor (>80%) in a first dimension. Each mirror element includes a micromirror whose height above the substrate is controlled via a vertical comb-drive actuator, which is located completely beneath the micromirror in the first dimension. As a result, mirror element can control the phase of light reflected from its micromirror. In some embodiments, the SLM includes an array of mirror elements that is periodic with small pitch and high fill factor in two dimensions. In such embodiments, the actuator, as well as tethers for supporting the micromirror above the substrate, are located completely beneath the micromirror, thereby enabling high fill factor in both dimensions.

Abstract: A polarization-independent optical switching system capable of rerouting light signals is disclosed. The system includes a plurality of switching cells, each including a pair of bus waveguides that are formed in different planes above a substrate. Each bus waveguide supports low-loss propagation of both the TE- and TM-polarization modes and are optically decoupled when the switch is in an unswitched state. In its switched state, a shunt waveguide that also supports low-loss propagation of both polarization modes is moved into proximity with both bus waveguides to form a pair of adiabatic directional couplers that enable the light signal to evanescently couple between each bus waveguide and the shunt waveguide. As a result, the path of a light signal through the switching cell is reconfigured.

Abstract: Single-sided optoelectrowetting (SSOEW)-configured substrates are provided, as well as microfluidic devices that include such substrates. The substrates can include a planar electrode, a photoconductive (or photosensitive) layer, a dielectric layer (single-layer or composite), a mesh electrode, and a hydrophobic coating. Fluid droplets can be moved across the hydrophobic coating of such substrates in a light-actuated manner, upon the application of a suitable AC voltage potential across the substrate and the focusing of light into the photoconductive layer of the substrate in a location proximal to the droplets. Walls can be disposed upon the substrates to form the microfluidic devices. Together the walls and substrate can form a microfluidic circuit, through which droplets can be moved.

Abstract: Single-sided optoelectrowetting (SSOEW)-configured substrates are provided, as well as microfluidic devices that include such substrates. The substrates can include a planar electrode, a photoconductive (or photosensitive) layer, a dielectric layer (single-layer or composite), a mesh electrode, and a hydrophobic coating. Fluid droplets can be moved across the hydrophobic coating of such substrates in a light-actuated manner, upon the application of a suitable AC voltage potential across the substrate and the focusing of light into the photoconductive layer of the substrate in a location proximal to the droplets. Walls can be disposed upon the substrates to form the microfluidic devices. Together the walls and substrate can form a microfluidic circuit, through which droplets can be moved.

Abstract: Single-sided optoelectrowetting (SSOEW)-configured substrates are provided, as well as microfluidic devices that include such substrates. The substrates can include a planar electrode, a photoconductive (or photosensitive) layer, a dielectric layer (single-layer or composite), a mesh electrode, and a hydrophobic coating. Fluid droplets can be moved across the hydrophobic coating of such substrates in a light-actuated manner, upon the application of a suitable AC voltage potential across the substrate and the focusing of light into the photoconductive layer of the substrate in a location proximal to the droplets. Walls can be disposed upon the substrates to form the microfluidic devices. Together the walls and substrate can form a microfluidic circuit, through which droplets can be moved.

Abstract: Described herein are single-sided lateral-field optoelectronic tweezers (LOET) devices which use photosensitive electrode arrays to create optically-induced dielectrophoretic forces in an electric field that is parallel to the plane of the device. In addition, phototransistor-based optoelectronic tweezers (PhOET) devices are described that allow for optoelectronic tweezers (OET) operation in high-conductivity physiological buffer and cell culture media.

Abstract: Described herein are single-sided lateral-field optoelectronic tweezers (LOET) devices which use photosensitive electrode arrays to create optically-induced dielectrophoretic forces in an electric field that is parallel to the plane of the device. In addition, phototransistor-based optoelectronic tweezers (PhOET) devices are described that allow for optoelectronic tweezers (OET) operation in high-conductivity physiological buffer and cell culture media.

Abstract: An optical image-driven light induced dielectrophoresis (DEP) apparatus and method are described which provide for the manipulation of particles or cells with a diameter on the order of 100 ?m or less. The apparatus is referred to as optoelectric tweezers (OET) and provides a number of advantages over conventional optical tweezers, in particular the ability to perform operations in parallel and over a large area without damage to living cells. The OET device generally comprises a planar liquid-filled structure having one or more portions which are photoconductive to convert incoming light to a change in the electric field pattern. The light patterns are dynamically generated to provide a number of manipulation structures that can manipulate single particles and cells or groups of particles/cells. The OET preferably includes a microscopic imaging means to provide feedback for the optical manipulation, such as detecting position and characteristics wherein the light patterns are modulated accordingly.

Abstract: An optical image-driven light induced dielectrophoresis (DEP) apparatus and method are described which provide for the manipulation of particles or cells with a diameter on the order of 100 ?m or less. The apparatus is referred to as optoelectric tweezers (OET) and provides a number of advantages over conventional optical tweezers, in particular the ability to perform operations in parallel and over a large area without damage to living cells. The OET device generally comprises a planar liquid-filled structure having one or more portions which are photoconductive to convert incoming light to a change in the electric field pattern. The light patterns are dynamically generated to provide a number of manipulation structures that can manipulate single particles and cells or groups of particles/cells. The OET preferably includes a microscopic imaging means to provide feedback for the optical manipulation, such as detecting position and characteristics wherein the light patterns are modulated accordingly.

Abstract: A system and method of optically routing wavelength channels from within a plurality of optical inputs to any of a plurality of optical outputs. An optical wavelength-selective cross connect (WSXC) switch is described with a first stage of wavelength division multiplexing (WDM) routers which support an optical input and a plurality of optical outputs, which are interconnected to a second stage of WDM routers having a plurality of optical inputs and an optical output. The wavelength channel is routed in two stages from one of the input stage routers to an output stage router for output. It should be appreciated that the WSXC switch of the invention can be utilized for passing optical signals in either direction. In a preferred implementation integrated circuit router chips are stacked into cubes to form the routers stages which are cross coupled using a twisted butt joint to form a WSXC switch.

Abstract: An optical image-driven light induced dielectrophoresis (DEP) apparatus and method are described which provide for the manipulation of particles or cells with a diameter on the order of 100 ?m or less. The apparatus is referred to as optoelectric tweezers (OET) and provides a number of advantages over conventional optical tweezers, in particular the ability to perform operations in parallel and over a large area without damage to living cells. The OET device generally comprises a planar liquid-filled structure having one or more portions which are photoconductive to convert incoming light to a change in the electric field pattern. The light patterns are dynamically generated to provide a number of manipulation structures that can manipulate single particles and cells or group of particles/cells. The OET preferably includes a microscopic imaging means to provide feedback for the optical manipulation, such as detecting position and characteristics wherein the light patterns are modulated accordingly.