Abstract: A gripping mechanism for inspection of a reticle inner pod includes a quadrilateral frame and fourth gripper units. The four gripper units are respectively disposed at four border strips of the quadrilateral frame and are opposite in pairs. Each gripper unit has a body, a first gripping portion and a second gripper portion. The first and second gripping portions are respectively located on different positions of the body. The first gripping portions form a first gripping plane, and the second gripping portions form a second gripping plane. At least two adjacent gripper units have a power member, which is in power connection with the body so as to adjust a distance between two bodies opposite to each other. The gripping mechanism for the inspection of the reticle inner pod is capable of securely gripping the reticle inner pod during transportation or turning of reticles.

Abstract: An electronic component transfer apparatus is configured to transfer an electronic component on a flexible carrier to a target substrate. The electronic component transfer apparatus includes a first frame, a second frame, an abutting component, an actuating mechanism, an energy generating device, an image capture device, and a data processing module. The first frame is configured to carry the flexible carrier. The second frame is configured to carry the target substrate. The abutting component is disposed adjacent to the flexible carrier. The actuating mechanism is configured to actuate the abutting component, so that the abutting end of the abutting component abuts against the flexible carrier. The energy generating device generates an energy beam. The image capture device captures an image through the abutting component. The data processing module receives and computes the image to determine whether to adjust the relative position between the abutting end and the flexible carrier.

Abstract: An electronic component transferring apparatus is configured to transfer an electronic component on a flexible carrier onto a target substrate. The electronic component transferring apparatus includes a first frame configured to carry the flexible carrier, a second frame configured to carry the target substrate, an abutting component arranged adjacent to the flexible carrier, an actuating mechanism, an energy generating device, and an optical sensing module. The actuating mechanism is configured to actuate the abutting component and move the abutting component in a direction of the flexible carrier, such that an abutting end of the abutting component abuts against the flexible carrier. The energy generating device is configured to generate an energy beam penetrating at least a portion of the abutting component and being directed towards the flexible carrier from the abutting end of the abutting component. The optical sensing module is configured to perform sensing through the abutting component.