Patents by Inventor Ming Fu Li

Ming Fu Li has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11948837
    Abstract: A method for making a semiconductor structure includes: providing a substrate with a contact feature thereon; forming a dielectric layer on the substrate; etching the dielectric layer to form an interconnect opening exposing the contact feature; forming a metal layer on the dielectric layer and outside of the contact feature; and forming a graphene conductive structure on the metal layer, the graphene conductive structure filling the interconnect opening, being electrically connected to the contact feature, and having at least one graphene layer that extends in a direction substantially perpendicular to the substrate.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ching-Fu Yeh, Chin-Lung Chung, Shu-Wei Li, Yu-Chen Chan, Shin-Yi Yang, Ming-Han Lee
  • Patent number: 8528376
    Abstract: A mold set for manufacturing a case is provided. The mold set comprises an upper mold having a fluid channel; a lower mold facing the upper mold; and a drawing mold disposed between the upper mold and the lower mold, wherein the mold set has a case forming space formed among the upper mold, the lower mold and the drawing mold, and the mold set has a sharp-edge forming space communicating with the case forming space, and formed between the drawing mold and the lower mold.
    Type: Grant
    Filed: October 25, 2010
    Date of Patent: September 10, 2013
    Assignee: Metal Industries Research & Development Centre
    Inventors: Ming-Fu Li, Sheng-Chi Tsai, Ping-Kuo Cheng, Tai-Chang Chen
  • Publication number: 20110155341
    Abstract: A mold set for manufacturing a case is provided. The mold set comprises an upper mold having a fluid channel; a lower mold facing the upper mold; and a drawing mold disposed between the upper mold and the lower mold, wherein the mold set has a case forming space formed among the upper mold, the lower mold and the drawing mold, and the mold set has a sharp-edge forming space communicating with the case forming space, and formed between the drawing mold and the lower mold.
    Type: Application
    Filed: October 25, 2010
    Publication date: June 30, 2011
    Applicant: METAL INDUSTRIES RESEARCH & DEVELOPMENT CENTRE
    Inventors: Ming-Fu LI, Sheng-Chi TSAI, Ping-Kuo CHENG, Tai-Chang CHEN
  • Publication number: 20090179281
    Abstract: An N-type Schottky barrier Source/Drain Transistor (N-SSDT) that uses ytterbium silicide (YbSi2-x) for the source and drain is described. The structure includes a suitable capping layer stack.
    Type: Application
    Filed: February 4, 2009
    Publication date: July 16, 2009
    Inventors: Shiyang Zhu, Jingde Chen, Sungjoo Lee, Ming Fu Li, Jagar Singh, Chungxiang Zhu, Dim-Lee Kwong
  • Publication number: 20090163005
    Abstract: A method of fabricating an N-type Schottky barrier Source/Drain Transistor (N-SSDT) with ytterbium silicide (YbSi2-x) for source and drain is presented. The fabrication of YbSi2-x is compatible with the normal CMOS process but ultra-high vacuum, which is required for ErSi2-x fabrication, is not needed here. To prevent oxidation of ytterbium during ex situ annealing and to improve the film quality, a suitable capping layer stack has been developed.
    Type: Application
    Filed: February 9, 2009
    Publication date: June 25, 2009
    Inventors: Shiyang Zhu, Jingde Chen, Sungjoo Lee, Ming Fu Li, Jagar Singh, Chunxiang Zhu, Dim-Lee Kwong
  • Patent number: 7514360
    Abstract: This invention relates to a semiconductor device making use of a highly thermal robust metal electrode as gate material. In particular, the development of Hafnium Nitride as a metal gate electrode (or a part of the metal gate stack) is taught and its manufacturing steps of fabrication with different embodiments are shown.
    Type: Grant
    Filed: March 17, 2004
    Date of Patent: April 7, 2009
    Inventors: Hong Yu Yu, Ming-Fu Li, Dim-Lee Kwong, Lakshmi Kanta Bera
  • Patent number: 7504328
    Abstract: A method of fabricating an N-type Schottky barrier Source/Drain Transistor (N-SSDT) with ytterbium silicide (YbSi2-x) for source and drain is presented. The fabrication of YbSi2-x is compatible with the normal CMOS process but ultra-high vacuum, which is required for ErSi2-x fabrication, is not needed here. To prevent oxidation of ytterbium during ex situ annealing and to improve the film quality, a suitable capping layer stack has been developed.
    Type: Grant
    Filed: May 10, 2005
    Date of Patent: March 17, 2009
    Assignee: National University of Singapore
    Inventors: Shiyang Zhu, Jingde Chen, Sungjoo Lee, Ming Fu Li, Jagar Singh, Chunxiang Zhu, Dim-Lee Kwong
  • Publication number: 20080224236
    Abstract: A gate electrode for semiconductor devices, the gate electrode comprising a mixture of a metal having a work function of about 4 eV or less and a metal nitride.
    Type: Application
    Filed: January 28, 2008
    Publication date: September 18, 2008
    Applicant: NATIONAL UNIVERSITY OF SINGAPORE
    Inventors: Chi Ren, Hongyu Yu, Siu Hung Daniel Chan, Ming-Fu Li, Dim-Lee Kwong
  • Patent number: 7389664
    Abstract: An electromagnetic forming device for a sheet of material is provided. The electromagnetic forming device includes a fixing base, a magnetic concentration block, an electromagnetic actuator, and a die. The fixing base has a groove. The magnetic concentration block is disposed in the groove of the fixing base, and has an accommodating space therein, which is in communication with a surface of the magnetic concentration block via a slit. The electromagnetic actuator, used to generate a magnetic field, is disposed in the accommodating space of the magnetic concentration block, but does not contact the magnetic concentration block. The die and the magnetic concentration block are separated by a gap, and a sheet of material can be disposed in the gap. As the magnetic concentration block is a block, eddy currents in the magnetic concentration block are distributed uniformly, so the generated magnetic field is also distributed uniformly, thus exerting a uniform forming force on the sheet of material.
    Type: Grant
    Filed: November 14, 2007
    Date of Patent: June 24, 2008
    Assignee: Metal Industries Research & Development Centre
    Inventors: Tung-Chen Cheng, Tzyy-Ker Sue, Chi-Keung Chung, Chun-Chieh Wang, Hsing-Ta Hsieh, Ming-Fu Li
  • Patent number: 7002175
    Abstract: A double barrier resonant tunneling diode (RTD) is formed and integrated with a level of CMOS/BJT/SiGe devices and circuits through processes such as metal-to-metal thermocompressional bonding, anodic bonding, eutectic bonding, plasma bonding, silicon-to-silicon bonding, silicon dioxide bonding, silicon nitride bonding and polymer bonding or plasma bonding. The electrical connections are made using conducting interconnects aligned during the bonding process. The resulting circuitry has a three-dimensional architecture. The tunneling barrier layers of the RTD are formed of high-K dielectric materials such as SiO2, Si3N4, Al2O3, Y2O3, Ta2O5, TiO2, HfO2, Pr2O3, ZrO2, or their alloys and laminates, having higher band-gaps than the material forming the quantum well, which includes Si, Ge or SiGe. The inherently fast operational speed of the RTD, combined with the 3-D integrated architecture that reduces interconnect delays, will produce ultra-fast circuits with low noise characteristics.
    Type: Grant
    Filed: October 8, 2004
    Date of Patent: February 21, 2006
    Assignee: Agency for Science, Technology and Research
    Inventors: Jagar Singh, Yong Tian Hou, Ming Fu Li
  • Publication number: 20050285208
    Abstract: A gate electrode for semiconductor devices, the gate electrode comprising a mixture of a metal having a work function of about 4 eV or less and a metal nitride.
    Type: Application
    Filed: June 10, 2005
    Publication date: December 29, 2005
    Inventors: Chi Ren, Hongyu Yu, Siu Hung Daniel Chan, Ming-Fu Li, Dim-Lee Kwong
  • Publication number: 20050205947
    Abstract: This invention relates to a semiconductor device making use of a highly thermal robust metal electrode as gate material. In particular, the development of Hafnium Nitride as a metal gate electrode (or a part of the metal gate stack) is taught and its manufacturing steps of fabrication with different embodiments are shown.
    Type: Application
    Filed: March 17, 2004
    Publication date: September 22, 2005
    Inventors: Hong Yu, Ming-Fu Li, Dim-Lee Kwong, Lakshmi Bera
  • Publication number: 20040245602
    Abstract: Briefly, a preferred embodiment of the present invention includes a metal-insulator-metal (MIM) capacitor including a bottom layer of conductive material formed by depositing this conductive material on a substrate. A dielectric material is then formed on the bottom conductive layer, wherein the dielectric material is preferably an HfO2 dielectric doped with lanthamide material, more preferably Th doped HfO2 with a Th concentration in the range of 0 to 6% and more particularly substantially 4%. A top conductive layer is formed on top of the dielectric.
    Type: Application
    Filed: May 11, 2004
    Publication date: December 9, 2004
    Inventors: Sun Jung Kim, Byung Jin Cho, Ming-Fu Li, Mingbin Yin